JPS63108235A - 振動・音響計測一体型センサ− - Google Patents

振動・音響計測一体型センサ−

Info

Publication number
JPS63108235A
JPS63108235A JP25283286A JP25283286A JPS63108235A JP S63108235 A JPS63108235 A JP S63108235A JP 25283286 A JP25283286 A JP 25283286A JP 25283286 A JP25283286 A JP 25283286A JP S63108235 A JPS63108235 A JP S63108235A
Authority
JP
Japan
Prior art keywords
chamber
vibration
microphone
sound
sound pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25283286A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0340331B2 (enExample
Inventor
Takeshi Okada
健 岡田
Hisao Suzuki
久夫 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOUSHIYOU ENG KK
Original Assignee
TOUSHIYOU ENG KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOUSHIYOU ENG KK filed Critical TOUSHIYOU ENG KK
Priority to JP25283286A priority Critical patent/JPS63108235A/ja
Publication of JPS63108235A publication Critical patent/JPS63108235A/ja
Publication of JPH0340331B2 publication Critical patent/JPH0340331B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP25283286A 1986-10-25 1986-10-25 振動・音響計測一体型センサ− Granted JPS63108235A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25283286A JPS63108235A (ja) 1986-10-25 1986-10-25 振動・音響計測一体型センサ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25283286A JPS63108235A (ja) 1986-10-25 1986-10-25 振動・音響計測一体型センサ−

Publications (2)

Publication Number Publication Date
JPS63108235A true JPS63108235A (ja) 1988-05-13
JPH0340331B2 JPH0340331B2 (enExample) 1991-06-18

Family

ID=17242820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25283286A Granted JPS63108235A (ja) 1986-10-25 1986-10-25 振動・音響計測一体型センサ−

Country Status (1)

Country Link
JP (1) JPS63108235A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012127759A (ja) * 2010-12-14 2012-07-05 Murata Mfg Co Ltd 衝撃及び音響センサ
JP2017198525A (ja) * 2016-04-27 2017-11-02 株式会社日本製鋼所 非接触振動測定による故障診断装置及び方法
CN112088539A (zh) * 2018-03-21 2020-12-15 美商楼氏电子有限公司 用于mems设备的电介质梳
CN119211820A (zh) * 2024-09-20 2024-12-27 维沃移动通信有限公司 麦克风和电子设备

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012127759A (ja) * 2010-12-14 2012-07-05 Murata Mfg Co Ltd 衝撃及び音響センサ
JP2017198525A (ja) * 2016-04-27 2017-11-02 株式会社日本製鋼所 非接触振動測定による故障診断装置及び方法
CN112088539A (zh) * 2018-03-21 2020-12-15 美商楼氏电子有限公司 用于mems设备的电介质梳
US11825266B2 (en) 2018-03-21 2023-11-21 Knowles Electronics, Llc Dielectric comb for MEMS device
CN119211820A (zh) * 2024-09-20 2024-12-27 维沃移动通信有限公司 麦克风和电子设备

Also Published As

Publication number Publication date
JPH0340331B2 (enExample) 1991-06-18

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