JPS63106768U - - Google Patents

Info

Publication number
JPS63106768U
JPS63106768U JP19936386U JP19936386U JPS63106768U JP S63106768 U JPS63106768 U JP S63106768U JP 19936386 U JP19936386 U JP 19936386U JP 19936386 U JP19936386 U JP 19936386U JP S63106768 U JPS63106768 U JP S63106768U
Authority
JP
Japan
Prior art keywords
ion extraction
extraction electrode
plasma
plasma device
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19936386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19936386U priority Critical patent/JPS63106768U/ja
Publication of JPS63106768U publication Critical patent/JPS63106768U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP19936386U 1986-12-29 1986-12-29 Pending JPS63106768U (ru)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19936386U JPS63106768U (ru) 1986-12-29 1986-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19936386U JPS63106768U (ru) 1986-12-29 1986-12-29

Publications (1)

Publication Number Publication Date
JPS63106768U true JPS63106768U (ru) 1988-07-09

Family

ID=31160914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19936386U Pending JPS63106768U (ru) 1986-12-29 1986-12-29

Country Status (1)

Country Link
JP (1) JPS63106768U (ru)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07161490A (ja) * 1993-12-13 1995-06-23 Nec Corp プラズマ処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07161490A (ja) * 1993-12-13 1995-06-23 Nec Corp プラズマ処理装置

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