JPS63106768U - - Google Patents
Info
- Publication number
- JPS63106768U JPS63106768U JP19936386U JP19936386U JPS63106768U JP S63106768 U JPS63106768 U JP S63106768U JP 19936386 U JP19936386 U JP 19936386U JP 19936386 U JP19936386 U JP 19936386U JP S63106768 U JPS63106768 U JP S63106768U
- Authority
- JP
- Japan
- Prior art keywords
- ion extraction
- extraction electrode
- plasma
- plasma device
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 8
- 238000005530 etching Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19936386U JPS63106768U (ko) | 1986-12-29 | 1986-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19936386U JPS63106768U (ko) | 1986-12-29 | 1986-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63106768U true JPS63106768U (ko) | 1988-07-09 |
Family
ID=31160914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19936386U Pending JPS63106768U (ko) | 1986-12-29 | 1986-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63106768U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07161490A (ja) * | 1993-12-13 | 1995-06-23 | Nec Corp | プラズマ処理装置 |
-
1986
- 1986-12-29 JP JP19936386U patent/JPS63106768U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07161490A (ja) * | 1993-12-13 | 1995-06-23 | Nec Corp | プラズマ処理装置 |