JPH01158641U - - Google Patents
Info
- Publication number
- JPH01158641U JPH01158641U JP5423088U JP5423088U JPH01158641U JP H01158641 U JPH01158641 U JP H01158641U JP 5423088 U JP5423088 U JP 5423088U JP 5423088 U JP5423088 U JP 5423088U JP H01158641 U JPH01158641 U JP H01158641U
- Authority
- JP
- Japan
- Prior art keywords
- filaments
- gas
- chamber
- ionize
- ionized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5423088U JPH01158641U (ko) | 1988-04-22 | 1988-04-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5423088U JPH01158641U (ko) | 1988-04-22 | 1988-04-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01158641U true JPH01158641U (ko) | 1989-11-01 |
Family
ID=31280165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5423088U Pending JPH01158641U (ko) | 1988-04-22 | 1988-04-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01158641U (ko) |
-
1988
- 1988-04-22 JP JP5423088U patent/JPH01158641U/ja active Pending
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