JPS63106765U - - Google Patents
Info
- Publication number
- JPS63106765U JPS63106765U JP19982686U JP19982686U JPS63106765U JP S63106765 U JPS63106765 U JP S63106765U JP 19982686 U JP19982686 U JP 19982686U JP 19982686 U JP19982686 U JP 19982686U JP S63106765 U JPS63106765 U JP S63106765U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- reaction
- thin film
- raw material
- reaction gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims description 10
- 239000012495 reaction gas Substances 0.000 claims description 8
- 239000002994 raw material Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000007664 blowing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19982686U JPS63106765U (is) | 1986-12-27 | 1986-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19982686U JPS63106765U (is) | 1986-12-27 | 1986-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63106765U true JPS63106765U (is) | 1988-07-09 |
Family
ID=31161811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19982686U Pending JPS63106765U (is) | 1986-12-27 | 1986-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63106765U (is) |
-
1986
- 1986-12-27 JP JP19982686U patent/JPS63106765U/ja active Pending