JPH0186227U - - Google Patents
Info
- Publication number
- JPH0186227U JPH0186227U JP18312287U JP18312287U JPH0186227U JP H0186227 U JPH0186227 U JP H0186227U JP 18312287 U JP18312287 U JP 18312287U JP 18312287 U JP18312287 U JP 18312287U JP H0186227 U JPH0186227 U JP H0186227U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- blow
- holes
- material gas
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 5
- 238000009792 diffusion process Methods 0.000 claims description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 2
- 230000005495 cold plasma Effects 0.000 claims 1
- 238000000354 decomposition reaction Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18312287U JPH0186227U (is) | 1987-11-30 | 1987-11-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18312287U JPH0186227U (is) | 1987-11-30 | 1987-11-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0186227U true JPH0186227U (is) | 1989-06-07 |
Family
ID=31474554
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18312287U Pending JPH0186227U (is) | 1987-11-30 | 1987-11-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0186227U (is) |
-
1987
- 1987-11-30 JP JP18312287U patent/JPH0186227U/ja active Pending