JPS63106762U - - Google Patents
Info
- Publication number
- JPS63106762U JPS63106762U JP20341486U JP20341486U JPS63106762U JP S63106762 U JPS63106762 U JP S63106762U JP 20341486 U JP20341486 U JP 20341486U JP 20341486 U JP20341486 U JP 20341486U JP S63106762 U JPS63106762 U JP S63106762U
- Authority
- JP
- Japan
- Prior art keywords
- unit
- sputtering
- semiconductor wafer
- metal film
- pretreatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims 3
- 235000012431 wafers Nutrition 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20341486U JPS63106762U (OSRAM) | 1986-12-26 | 1986-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20341486U JPS63106762U (OSRAM) | 1986-12-26 | 1986-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63106762U true JPS63106762U (OSRAM) | 1988-07-09 |
Family
ID=31168722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20341486U Pending JPS63106762U (OSRAM) | 1986-12-26 | 1986-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63106762U (OSRAM) |
-
1986
- 1986-12-26 JP JP20341486U patent/JPS63106762U/ja active Pending