JPS63106759U - - Google Patents
Info
- Publication number
- JPS63106759U JPS63106759U JP20184586U JP20184586U JPS63106759U JP S63106759 U JPS63106759 U JP S63106759U JP 20184586 U JP20184586 U JP 20184586U JP 20184586 U JP20184586 U JP 20184586U JP S63106759 U JPS63106759 U JP S63106759U
- Authority
- JP
- Japan
- Prior art keywords
- molten metal
- discharge electrode
- evaporation crucible
- evaporation
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001704 evaporation Methods 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 3
- 238000007738 vacuum evaporation Methods 0.000 claims 2
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
図面は本考案の一実施例を示す概略的な断面図
である。 １……真空処理室、２……ストリツプ、３……
蒸発ルツボ、４……吸上管、５……溶解炉、６…
…ルツボ、７……加熱用ヒータ、８……放電電極
。
である。 １……真空処理室、２……ストリツプ、３……
蒸発ルツボ、４……吸上管、５……溶解炉、６…
…ルツボ、７……加熱用ヒータ、８……放電電極
。
Claims (1)
- 真空処理室内に設置された蒸発ルツボ内の溶融
金属を抵抗加熱で加熱して蒸発させるようにした
真空蒸着装置において、前記蒸発ルツボ内の溶融
金属表面に対向させて網目状の放電電極を設ける
と共に、該放電電極と蒸発ルツボとの間に電圧を
印加して、放電電極と蒸発ルツボ内の溶融金属表
面との間に放電が発生するよう構成したことを特
徴とする真空蒸着装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20184586U JPH0523564Y2 (ja) | 1986-12-26 | 1986-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20184586U JPH0523564Y2 (ja) | 1986-12-26 | 1986-12-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63106759U true JPS63106759U (ja) | 1988-07-09 |
| JPH0523564Y2 JPH0523564Y2 (ja) | 1993-06-16 |
Family
ID=31165680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20184586U Expired - Lifetime JPH0523564Y2 (ja) | 1986-12-26 | 1986-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0523564Y2 (ja) |
-
1986
- 1986-12-26 JP JP20184586U patent/JPH0523564Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0523564Y2 (ja) | 1993-06-16 |