JPS6310554U - - Google Patents

Info

Publication number
JPS6310554U
JPS6310554U JP10437986U JP10437986U JPS6310554U JP S6310554 U JPS6310554 U JP S6310554U JP 10437986 U JP10437986 U JP 10437986U JP 10437986 U JP10437986 U JP 10437986U JP S6310554 U JPS6310554 U JP S6310554U
Authority
JP
Japan
Prior art keywords
rotation axis
type optical
transmission
spinner
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10437986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10437986U priority Critical patent/JPS6310554U/ja
Publication of JPS6310554U publication Critical patent/JPS6310554U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP10437986U 1986-07-07 1986-07-07 Pending JPS6310554U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10437986U JPS6310554U (enrdf_load_stackoverflow) 1986-07-07 1986-07-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10437986U JPS6310554U (enrdf_load_stackoverflow) 1986-07-07 1986-07-07

Publications (1)

Publication Number Publication Date
JPS6310554U true JPS6310554U (enrdf_load_stackoverflow) 1988-01-23

Family

ID=30977820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10437986U Pending JPS6310554U (enrdf_load_stackoverflow) 1986-07-07 1986-07-07

Country Status (1)

Country Link
JP (1) JPS6310554U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018023918A (ja) * 2016-08-09 2018-02-15 株式会社ディスコ 薬液塗布装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018023918A (ja) * 2016-08-09 2018-02-15 株式会社ディスコ 薬液塗布装置

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