JPS63105330U - - Google Patents
Info
- Publication number
- JPS63105330U JPS63105330U JP20164986U JP20164986U JPS63105330U JP S63105330 U JPS63105330 U JP S63105330U JP 20164986 U JP20164986 U JP 20164986U JP 20164986 U JP20164986 U JP 20164986U JP S63105330 U JPS63105330 U JP S63105330U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- heated gas
- gas
- air supply
- casing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims 1
Landscapes
- Drying Of Solid Materials (AREA)
- Centrifugal Separators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20164986U JPS63105330U (OSRAM) | 1986-12-24 | 1986-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20164986U JPS63105330U (OSRAM) | 1986-12-24 | 1986-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63105330U true JPS63105330U (OSRAM) | 1988-07-08 |
Family
ID=31165299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20164986U Pending JPS63105330U (OSRAM) | 1986-12-24 | 1986-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63105330U (OSRAM) |
-
1986
- 1986-12-24 JP JP20164986U patent/JPS63105330U/ja active Pending
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