JPS63105063U - - Google Patents
Info
- Publication number
- JPS63105063U JPS63105063U JP20397586U JP20397586U JPS63105063U JP S63105063 U JPS63105063 U JP S63105063U JP 20397586 U JP20397586 U JP 20397586U JP 20397586 U JP20397586 U JP 20397586U JP S63105063 U JPS63105063 U JP S63105063U
- Authority
- JP
- Japan
- Prior art keywords
- defect
- signal
- outputs
- trigger
- photographing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 3
- 239000000428 dust Substances 0.000 claims 1
- 238000007689 inspection Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20397586U JPS63105063U (lm) | 1986-12-24 | 1986-12-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20397586U JPS63105063U (lm) | 1986-12-24 | 1986-12-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63105063U true JPS63105063U (lm) | 1988-07-07 |
Family
ID=31169808
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20397586U Pending JPS63105063U (lm) | 1986-12-24 | 1986-12-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63105063U (lm) |
-
1986
- 1986-12-24 JP JP20397586U patent/JPS63105063U/ja active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS63105063U (lm) | ||
JPS5689005A (en) | Position detector | |
JPS6355217U (lm) | ||
JPS61105805U (lm) | ||
JPS62168410U (lm) | ||
JPS63127106A (ja) | 立体形状の測定方法 | |
JPS5916786U (ja) | 自動焦点レ−ザ加工機 | |
JPH0349543U (lm) | ||
JPH0224367U (lm) | ||
JPH0216011U (lm) | ||
JPH0542326Y2 (lm) | ||
JPH0214005U (lm) | ||
JPH03110304U (lm) | ||
JPH01144809U (lm) | ||
JPS5998353U (ja) | レチクル面の傷の検出装置 | |
JPH03109150U (lm) | ||
JPS62147128U (lm) | ||
JPH0245407U (lm) | ||
JPS6253349U (lm) | ||
JPS63190957U (lm) | ||
JPS6288947U (lm) | ||
JPS60181660U (ja) | 角度可変型液体識別センサ | |
JPS6083906U (ja) | 表面粗さ計測装置 | |
JPH0395907U (lm) | ||
JPS57141503A (en) | Highly accurate reflective sensor for reading mark position |