JPS63104675A - Organic film forming device - Google Patents

Abstract

PURPOSE:To permit incorporation of the titled device into an automated production line by dropping a film forming material on the surface of a developing soln. in a rotating liquid tank and controlling the rotating speed of the liquid tank, thereby forming the solid film of the monomolecules of the film forming material on the surface of the developing soln. CONSTITUTION:The liquid tank 1 which is rotatable and contains the developing soln. 3 and a means for dropping the film forming material to drop the film forming material soln. onto the surface of the developing soln. 3 in the liquid tank 1 are provided to the above-mentioned device. The rotating speed of the liquid tank 1 is controlled to form the solid film of the molomolecules 4 of the above-mentioned film forming material (e.g., stearic acid) on the surface of the developing soln. 3. As a result, the thickness of the monomolecules is increased without using a float and the incorporation of the device into the automated production line is permitted.

Description

[Detailed Description of the Invention] [Industrial Application Field] This invention relates to a thin film forming apparatus used for semiconductors, electronic devices, etc., and in particular uses the Langmuir-Prodgett method (DB method), which can form organic thin films. LB
Related to Film Forming Apparatus [Prior Art] FIG. 4 is a diagram showing a conventional film forming apparatus disclosed in, for example, Japanese Patent Application Laid-Open No. 60-222173. Figure 4(a)
, (b) In Ic, CD is a rectangular liquid tank, □□□ is a frame, (goods) is a float, ■ is a weight, ni) is a pulley, ■ is a magnet,
07) is the pair of magnets, (Foundation) is the suction pipe, ■ is the suction nozzle, (To) is the liquid level, (51) is the carrier percentage, (52) is the upper and lower arms of the carrier.

Next, the operation will be explained. A frame □□□ is suspended horizontally inside the shallow rectangular liquid tank 0D to partition the liquid surface.

This is a two-dimensional cylinder, and the inside of the frame forms a closed space. A float (to) is floating inside the frame. The longitudinal width of the float mackerel is made slightly narrower than the distance between the opposing frames (6), so that it can move smoothly from side to side as a two-dimensional piston. Since the weight 1 is connected to the float K via the pulley, the float is always pulled to the right. To push back or stop the float, a magnet fixed on the float is used. In other words, this can be done by bringing a pair of magnets (goods) close together and exerting a repulsive force. On the other hand, the left and right nozzles 0I are connected to a suction pump via suction pipes.

Film formation is performed, for example, as follows.

An organic film-forming substance (hereinafter referred to as a film-forming substance) to be formed, such as stearic acid or arachidic acid, is dissolved in a suitable solvent such as chloroform, benzene, hexane, or the like. Generally, 100mI! 10-20 mg of film-forming material in a solvent of
A concentration of about 100% is appropriate. When the solution of this film-forming substance is dropped onto the liquid surface ω using a microsyringe or the like, it spreads over the liquid surface. Since the solvent evaporates into the gas phase, single molecules of the film-forming substance are left behind. This single molecule exhibits two-dimensional behavior on the liquid surface (support). 2 when the areal density of molecules is low
It is called a gas film of a two-dimensional gas, and a two-dimensional ideal gas equation of state is established between the occupied area per molecule and the surface film pressure.

Gradually moving the float from the gas film state to the right, reducing the spread of the liquid surface where the monomolecular film develops, increasing the surface density and increasing the monomolecular film pressure, the intermolecular interaction becomes stronger. ,2
After passing through a liquid film of a dimensional liquid, it changes to a solid film of a two-dimensional solid, that is, a state in which it can be formed.

While maintaining this solid film state, the desired carrier (51) (
Generally glass, plastic and ceramic.

A desired monomolecular film is formed on the carrier (51) by moving the substrate (such as a metal substrate) up and down across the liquid surface j.

In addition, cleaning the liquid surface and removing unnecessary monomolecular film,
This can be done with a nozzle θ.

[Problem that the invention seeks to solve]

Since the conventional organic film forming apparatus is configured as described above, the presence of a float is indispensable in order to increase the monomolecular film pressure. However, the presence of the float poses a structural impediment to incorporating the device into an automated production line, and there are also problems in that it is difficult to automate the process of cleaning the float.

This invention was made to solve the above-mentioned problems, and it provides an organic film forming device that can increase the monomolecular film pressure without using a float and can be incorporated into an automated production line. The purpose is to obtain.

[Means for solving problems]

The organic film forming apparatus according to the present invention includes a rotatable liquid tank containing a developing solution, a film forming substance dropping means for dropping a film forming substance onto the liquid surface of the developing solution in the rotating liquid tank, and The rotation speed of the tank is controlled to create a solid film of a single molecule of the film-forming substance on the surface of the developing solution.

[Effect]

The organic film forming device of the present invention utilizes the difference between the surface area of the developing solution when the water tank is rotating and the surface area of the developing solution when the water tank is stationary to create a high film pressure on the surface of the developing solution. Form a monolayer.

〔Example〕

Hereinafter, one example of this invention will be explained using the drawings. 1st
In the figure, (1) is a circular liquid tank, (2) is a rotating device, (
3) is a developing solution, (4) is a single molecule, and (4a) is a single molecule (
4) is a hydrophilic group, and (4b) is a single molecule hydrophobic group.

A developing solution, such as pure water, is placed in a cylindrical liquid tank (1) made of a hydrophobic material such as Teflon, and the cylindrical liquid tank (1) is rotated at a certain rotational speed, that is, an angular velocity, by a rotating device (2). Due to the viscosity of the developing solution (3), each part gradually gains an angular velocity, and finally the developing solution as a whole rotates like a rigid body with a constant angular velocity, and the liquid surface shows a paraboloid of rotation. . A film-forming substance solution (same as conventional) prepared by dissolving a film-forming substance such as stearic acid or arachidic acid in a solvent such as chloroform is placed on the center of the developing solution (3) liquid surface using a means for dropping the film-forming substance (not shown). ), the single molecule (4) on the liquid surface transfers the hydrophilic group (4a) to the developing solution (3).
) side, the hydrophobic groups (4b) are directed toward the gas phase side, and are clogged from the outer periphery by centrifugal force. After spreading the film material solution on the liquid surface to a certain extent, if the angular velocity is gradually reduced, the surface area of the liquid surface will gradually decrease, and the film thickness of the monomolecular film on the liquid surface will also increase accordingly. will rise to the value.

After the developing solution (3) has come to rest and a monomolecular film with a high film thickness is formed on the liquid surface, an organic thin film can be formed on the substrate by a horizontal deposition method.

Further, the film pressure can be controlled not only by the amount of the film-forming substance solution developed, but also by changing the angular velocity and changing the area of the developing solution (3).

In the above embodiment, the rotation device (2) is directly attached to the cylindrical hot liquid tank (1), but the rotation device (2) may be attached indirectly. Figure 2 shows an indirect example.

(5) is a rotation transmitting device, which can be composed of a belt or a gear. This method is inferior in controllability of angular velocity compared to the method in which a direct rotation device (2) is attached, but if a film-forming material with good film-forming properties is used, an indirect method is sufficient. By improving the performance of (5), the controllability of angular velocity can be improved.

FIG. 3 shows an example in which a plurality of cylindrical liquid tanks (1) are rotated using one rotating device (2). In addition, in this example, the cylindrical liquid tank (
1) The angular velocity can be changed separately, and monomolecular films with different film pressures can be obtained at the same time.

Furthermore, although a cylindrical liquid tank is shown in the above embodiment, the same effect can be obtained with other types such as a conical type.

〔Effect of the invention〕

As described above, the present invention includes a rotatable liquid tank containing a developing solution, a film-forming substance dropping means for dropping a film-forming substance onto the liquid surface of the developing solution in the rotating liquid tank, and The rotation speed of the tank is controlled to create a monomolecular solid film of the film-forming substance mentioned above on the surface of the developing solution, resulting in a simple structure and easy maintenance such as cleaning, making it suitable for automated production lines. This has the effect of providing an organic film forming device that can be incorporated.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing an organic film forming apparatus according to an embodiment of the present invention, FIGS. 2 and 3 are sectional views showing other embodiments of the invention, and FIG. 4 is a sectional view showing a conventional organic film forming apparatus. Indicates the creation device,
FIG. 4(a) is a perspective view, and FIG. 4(b) is a sectional view of FIG. 4(a). (1)...Circular water tank, (2)...Rotating device, (3)
. . .Developing solution, (4) . . . Single molecule, (5) . . . Rotation transmitting device. In the drawings, the same reference numerals indicate the same or equivalent parts.

Claims (2)

[Claims] (1) A rotatable liquid tank containing a developing solution, comprising a film-forming substance dropping means for dropping a film-forming substance solution onto the surface of the developing solution in the liquid tank, and controlling the rotational speed of the liquid tank. An organic film forming apparatus which forms a monomolecular solid film of the above-mentioned film-forming substance on the surface of a developing solution. (2) The organic film forming apparatus according to claim 1, wherein the liquid tank is a circular liquid tank.