JPH0576357B2 - - Google Patents

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Publication number
JPH0576357B2
JPH0576357B2 JP60166664A JP16666485A JPH0576357B2 JP H0576357 B2 JPH0576357 B2 JP H0576357B2 JP 60166664 A JP60166664 A JP 60166664A JP 16666485 A JP16666485 A JP 16666485A JP H0576357 B2 JPH0576357 B2 JP H0576357B2
Authority
JP
Japan
Prior art keywords
liquid
monomolecular
layer
film
solid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60166664A
Other languages
Japanese (ja)
Other versions
JPS6227069A (en
Inventor
Hiroki Saito
Masaaki Takimoto
Itsuki Toritani
Kyotaka Fukino
Yasuro Nishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP16666485A priority Critical patent/JPS6227069A/en
Publication of JPS6227069A publication Critical patent/JPS6227069A/en
Publication of JPH0576357B2 publication Critical patent/JPH0576357B2/ja
Granted legal-status Critical Current

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Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はウエブ状基体上又はウエブ状基体に設
けられた層上に両親媒性分子の単分子膜を連続的
に形成る装置に関する。特に固体状単分子膜形成
装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for continuously forming a monomolecular film of amphipathic molecules on a web-like substrate or a layer provided on a web-like substrate. In particular, it relates to a solid monolayer forming apparatus.

〔従来の技術〕[Conventional technology]

従来、ガラス、金属材料、金属蒸着膜、等の基
体上に有機化合物の薄膜を形成することが種々行
われており、その1つとして両親媒性分子の単分
子層を設ける方法が例えばラングミユアーブロヂ
エツト、″フイジカル レビユー″(Langmuir−
Blodgett,″Physical Review″)51、664(1937)
によつて提案されている。この方法は、両親媒性
分子である飽和脂肪酸をベンゼン等の揮発性溶媒
に溶解した溶液を水面上に静かに滴下すると、溶
媒が揮発したあとに単分子層が残される。このよ
うにして形成された単分子層を圧縮して所定の表
面圧にした後に、ガラス基板を水中に浸漬して引
上げるとガラス表面に固体状単分子膜が形成され
る。この場合ガラス基板を引き上げると第3図に
示すように単分子膜の水に面している親水基が基
板側に付き、疎水基(又は親油基)が表面に並ぶ
単分子膜構成となる(A形膜と称する)。またガ
ラス基板を浸漬すると第4図のように疎水基(又
は親油基)が基板側に付き親水基が表面に並ぶ単
分子膜構成となる(B形膜と称する)。(「薄膜ハ
ンドブツク」、268〜269頁、日本術振興会編、昭
和58年12月、(株)オーム社発行)。
Conventionally, various methods have been used to form thin films of organic compounds on substrates such as glass, metal materials, metal vapor deposited films, etc. One of these methods is a method of forming a monomolecular layer of amphipathic molecules, such as Langmiu. Arbrodiet, “Physical Review” (Langmuir-
Blodgett, ``Physical Review'') 51 , 664 (1937)
proposed by. In this method, a solution of a saturated fatty acid, which is an amphiphilic molecule, dissolved in a volatile solvent such as benzene is gently dropped onto the water surface, and a monomolecular layer is left behind after the solvent evaporates. After compressing the monomolecular layer thus formed to a predetermined surface pressure, the glass substrate is immersed in water and pulled up to form a solid monomolecular film on the glass surface. In this case, when the glass substrate is pulled up, the hydrophilic groups facing water in the monomolecular film are attached to the substrate side, and the hydrophobic groups (or lipophilic groups) are lined up on the surface, forming a monomolecular film structure, as shown in Figure 3. (referred to as A-type membrane). Further, when a glass substrate is immersed, a monomolecular film structure is formed in which the hydrophobic groups (or lipophilic groups) are attached to the substrate side and the hydrophilic groups are arranged on the surface as shown in FIG. 4 (referred to as a B-type film). (``Thin Film Handbook'', pp. 268-269, edited by Japan Society for the Promotion of Science, December 1981, published by Ohmsha Co., Ltd.).

このような方法による固体状単分子膜が最近エ
レクトロニクス等の分野において絶縁層等に利用
されるようになり、種々の改良が提案されている
(例えば、特開昭52−98038号公報)。
Solid monomolecular films produced by such a method have recently come to be used as insulating layers in fields such as electronics, and various improvements have been proposed (for example, Japanese Patent Laid-Open No. 52-98038).

また、本出願人は、先に蒸着又は電解メツキ等
によつて支持体上に強磁性合金薄膜を形成した磁
気記録媒体にこの方法を利用して飽和脂肪酸また
はその金属塩の単分子膜を保護層として設けるこ
とを提案した(特公昭56−30609号公報)。
In addition, the applicant has applied this method to a magnetic recording medium in which a thin ferromagnetic alloy film has been formed on a support by vapor deposition or electrolytic plating to protect a monomolecular film of saturated fatty acid or its metal salt. It was proposed to provide it as a layer (Special Publication No. 56-30609).

これらの改良方法においては、例えば第2図に
示すように、タンク1の下層液(水層)2の表面
にベンゼン、クロロホルム等の揮発性溶媒の溶解
したステアリン酸、パルミチン酸の如き飽和脂肪
酸の溶液を滴下して水面上に飽和脂肪酸の単分子
層4を形成させ、水面下に一部が浸漬しているシ
リンダー5等の適当な圧縮手段によつて単分子層
4を圧縮して固体状単分子膜(凝集膜)6とな
し、水中に設けられたガイドローラ7によつて案
内される基体8の表面に単分子膜の保護層9が形
成される。この場合、第3図、第4図の示すよう
に基体の引き上げ時に単分子膜を形成すればA形
膜引き込み時にはB形膜が形成される。基体に付
着してはこび出される分の単分子層は、ノズル3
から脂肪酸溶液を供給することによつて補給され
る。
In these improved methods, for example, as shown in Figure 2, saturated fatty acids such as stearic acid and palmitic acid are added to the surface of the lower liquid (aqueous layer) 2 in a tank 1 in a volatile solvent such as benzene and chloroform. The solution is dropped to form a monomolecular layer 4 of saturated fatty acid on the water surface, and the monomolecular layer 4 is compressed into a solid state using an appropriate compression means such as a cylinder 5 partially immersed below the water surface. A monomolecular film (coagulated film) 6 is formed, and a protective layer 9 of a monomolecular film is formed on the surface of a substrate 8 guided by a guide roller 7 provided in water. In this case, as shown in FIGS. 3 and 4, if a monomolecular film is formed when the substrate is pulled up, a B-type film is formed when the A-type film is pulled in. The monomolecular layer that adheres to the substrate and spills out is transferred to the nozzle 3.
Supplemented by supplying fatty acid solution from

これまで開示された方式においては、下層液
(水相)上に形成される両親媒性分子の単分子層
を圧縮して固体状単分子膜を形成する装置として
は、例えば、前記特公昭56−30609号公報に例示
された方式においては、液面上に存在するバリア
ーをバネによつて押圧することによつて液面上の
単分子層に表面圧を加え、また特開昭52−98038
号公報には、一部が液面上、一部が液面下にある
水平に設けられたシリンダ回転させることによ
り、液面上に形成された単分子層を液面上のシリ
ンダー上に乗せて塗布域に送り、これにより単分
子膜に表面圧を加え固体状単分子膜を形成させる
装置が開示されている。
In the methods disclosed so far, the apparatus for forming a solid monolayer by compressing a monomolecular layer of amphiphilic molecules formed on a lower liquid (aqueous phase) is, for example, the above-mentioned Japanese Patent Publication No. 56 In the method exemplified in Japanese Patent Publication No. 30609, surface pressure is applied to the monomolecular layer on the liquid surface by pressing a barrier existing on the liquid surface with a spring.
The publication describes that by rotating a horizontally installed cylinder with part above the liquid surface and part below the liquid surface, a monomolecular layer formed on the liquid surface is placed on the cylinder above the liquid surface. An apparatus is disclosed in which the monomolecular film is conveyed to a coating area, thereby applying surface pressure to the monomolecular film to form a solid monomolecular film.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかるにこれらの装置においては、いづれも加
圧部材が液面上にあるため、液面に波紋を起こし
て単分子層や固体状単分子膜に乱れを生じないよ
うに細心の注意を払わなければならないことや、
該加圧部材が単分子膜に接する機会が多いので、
時によつては両親媒性分子の着脱にむらを生じ、
円滑な単分子層の塗布域への移行を妨げること等
があり、その為該加圧部材の材料の選定と運転及
び保守上の考慮が必要であつた。本発明の目的は
前記欠点を解消し、運転・保守上安定した条件の
得られる固体状単分子膜形成装置を提供すること
にある。
However, in all of these devices, the pressure member is above the liquid surface, so extreme care must be taken to avoid causing ripples on the liquid surface and disturbing the monomolecular layer or solid monolayer. things that should not happen,
Since there are many opportunities for the pressure member to come into contact with the monomolecular film,
In some cases, the attachment and detachment of amphipathic molecules becomes uneven,
Smooth transfer of the monomolecular layer to the coating area may be hindered, and therefore consideration must be given to the selection of the material of the pressure member and its operation and maintenance. SUMMARY OF THE INVENTION An object of the present invention is to provide a solid monomolecular film forming apparatus that eliminates the above-mentioned drawbacks and provides stable conditions for operation and maintenance.

〔問題点を解決するための手段〕[Means for solving problems]

本発明者らは種々検討を重ねた結果、上記目的
を液槽内の液自体を流動させることにより達成出
来ることを見出し、本発明を得ることが出来た。
As a result of various studies, the present inventors discovered that the above object can be achieved by causing the liquid itself to flow in the liquid tank, and were able to obtain the present invention.

即ち、本発明は、液面上に両親媒性分子の揮発
性溶媒溶液を導入して単分子層を形成し、該溶媒
を除去すると共に該単分子層を圧縮して、固体状
単分子膜を形成する装置において、単分子層形成
の液槽に液輸送手段と、液均一吹出手段と、液速
調節手段とを備えたことを特徴とする固体状単分
子膜形成装置である。
That is, the present invention introduces a volatile solvent solution of amphiphilic molecules onto the liquid surface to form a monomolecular layer, and removes the solvent and compresses the monomolecular layer to form a solid monomolecular film. This solid monolayer forming apparatus is characterized in that a liquid tank for forming a monomolecular layer is equipped with a liquid transport means, a liquid uniform blowing means, and a liquid speed adjusting means.

本発明においては、液面上に供給された両親媒
性分子の揮発性溶媒溶液によつて出来た単分子層
を圧縮して固体状単分子膜を形成さすことにおい
て、この印加圧を下層液(水相)の流動によつて
行わんとするものである。
In the present invention, in compressing a monomolecular layer formed by a volatile solvent solution of amphipathic molecules supplied on the liquid surface to form a solid monomolecular film, this applied pressure is applied to the lower layer liquid. It is intended to be carried out by the flow of (aqueous phase).

揮発性溶媒としては、ヘキサン、クロロホル
ム、ベンゼン等が用いられ、両親媒性分子として
は、保護層として用いる場合は、トリデカン酸、
ミリスチン酸、ペンタデカン酸、パルミチン酸、
マルガリン酸、ステアリン酸、ノナデカン酸、ア
ラキン酸等の炭素数13〜21の直鎖型脂肪酸又はこ
れらのLi、Na、K、Mg、Ca、Ba等の塩が用い
られる。下層液としては一般には純水または無機
塩等の水溶液が用いられる。よく用いられる下層
液はCa2+、Cd2+、Ba2+、Mg2 1等の二価の金属イ
オンを含み、塩酸、炭酸水素ナトリウムを加えて
PHを調節したものである。
As volatile solvents, hexane, chloroform, benzene, etc. are used, and as amphipathic molecules, when used as a protective layer, tridecanoic acid,
myristic acid, pentadecanoic acid, palmitic acid,
Straight-chain fatty acids having 13 to 21 carbon atoms, such as margaric acid, stearic acid, nonadecanoic acid, and arachidic acid, or salts thereof such as Li, Na, K, Mg, Ca, and Ba are used. Generally, pure water or an aqueous solution of an inorganic salt is used as the lower layer liquid. The commonly used lower layer solution contains divalent metal ions such as Ca 2+ , Cd 2+ , Ba 2+ , Mg 2 1, etc., and is treated by adding hydrochloric acid and sodium hydrogen carbonate.
The pH is adjusted.

本発明における液輸送手段とは、液槽内の液に
流動を与える装置、例えば、渦巻ポンプ、プロペ
ラ状スクリユー等であつて、その配置は液槽内で
あつても液槽外で配管を伴うものであつてもよ
い。
The liquid transport means in the present invention refers to a device that gives flow to the liquid in the liquid tank, such as a centrifugal pump, a propeller-shaped screw, etc., and its arrangement involves piping outside the liquid tank even if it is inside the liquid tank. It may be something.

次に、液均一吹出手段とは、単分子層が形成さ
れ、該単分子層に液の流動による圧縮圧が加えら
れて固体状単分子膜が形成されることになるが、
液槽の液はウエツブ基体巾方向に均一の液の動き
であることが重要になる。そのため液輸送手段か
ら供給された液を巾方向に均一に吹出させるため
に、輸送手段により送られる液の動圧を一度均一
な静圧に変えこの静圧によつて吹出すことが望ま
しい。そのためには液槽の巾方向に渡つたチヤン
バーでその外壁が細孔を多数開孔させたものであ
るとか、網状のもの、又は密度の高い布地等のも
のを被せたもの等が用いられる。液はこの均一吹
出手段により、液槽の巾方向に液の均一な動きを
得ることが出来る。
Next, the liquid uniform blowing means means that a monomolecular layer is formed, and a compressive pressure is applied to the monomolecular layer by the flow of liquid to form a solid monomolecular film.
It is important that the liquid in the liquid tank moves uniformly in the width direction of the web substrate. Therefore, in order to uniformly blow out the liquid supplied from the liquid transport means in the width direction, it is desirable to once change the dynamic pressure of the liquid sent by the transport means to a uniform static pressure and blow out using this static pressure. For this purpose, a chamber extending across the width of the liquid tank with a large number of pores in its outer wall, a net-like chamber, or a chamber covered with dense cloth or the like is used. This uniform blowing means allows the liquid to move uniformly in the width direction of the liquid tank.

次に、液速調節手段であるが、液表面の単分子
層を、ウエツブの塗布装置の方向に向つて固体状
単分子膜を形成させるためには、単分子膜下層の
液の動きにより単分子層を圧縮する力を与えるこ
とが必要になる。その為に必要な液速度と液の流
動の方向を与えるために流路を適当に調節するた
めの手段であり、堰状のもの、ガイド状のもの等
が用いられる。
Next, regarding the liquid speed adjustment means, in order to form a solid monomolecular film by moving the monomolecular layer on the liquid surface in the direction of the web coating device, it is necessary to It is necessary to apply a force that compresses the molecular layer. For this purpose, it is a means for appropriately adjusting the flow path in order to provide the necessary liquid velocity and direction of liquid flow, and a weir-like type, a guide-type type, etc. are used.

〔作用〕[Effect]

本発明において、上記の如き構成において、液
輸送手段は液層の液を単分子層から団体状単分子
膜に形成して行く方向に対し、単分子層に圧縮す
る力を与えるべく液を流動させる働きをなし、液
均一吹出手段は、液槽の巾方向に渡り均一な液の
流れを形成し、液速調節手段は、単分子層から固
体半分子膜を形成する行程においてその液層の位
置に適した液速を与えるための役目をなすのであ
る。上記の如く、本発明は液面には波を立てずに
巾方向均一な液速度と方向をもつた液の流動を与
えることが出来、これによつて単分子層を圧縮し
て固体状単分子膜を形成することが出来るのであ
る。
In the present invention, in the configuration as described above, the liquid transport means flows the liquid in the direction of forming the liquid layer from a monomolecular layer to a collective monolayer in order to apply a compressive force to the monomolecular layer. The liquid uniform blowing means forms a uniform liquid flow across the width of the liquid tank, and the liquid speed adjusting means controls the flow of the liquid layer in the process of forming a solid half-molecular film from a monomolecular layer. Its role is to provide the appropriate liquid velocity for the location. As described above, the present invention can provide liquid flow with uniform liquid velocity and direction in the width direction without creating waves on the liquid surface, thereby compressing the monomolecular layer and making it possible to form a solid monolayer. It is possible to form a molecular film.

(実施例) 以下、本発明を蒸着型磁気記録媒体に保護層を
設ける場合について説明するが、本発明は、これ
のみに限られず、エレクトロニクスその他の分野
における単分子膜の形成に応用できることは勿論
である。
(Example) The present invention will be described below with reference to the case where a protective layer is provided on a vapor-deposited magnetic recording medium. However, the present invention is not limited to this, and can of course be applied to the formation of monomolecular films in electronics and other fields. It is.

第1図は本発明の1例を示す説明図であつて、
下層液槽1内の下層液(水層)2表面にノズル3
から両親媒性分子を揮発性溶媒に溶解した溶液と
して適下し、下層液面上に両親媒性分子の単分子
層4を形成させる。
FIG. 1 is an explanatory diagram showing one example of the present invention,
A nozzle 3 is placed on the surface of the lower liquid (aqueous layer) 2 in the lower liquid tank 1.
A solution of amphiphilic molecules dissolved in a volatile solvent is dropped from the solution to form a monomolecular layer 4 of amphiphilic molecules on the lower liquid surface.

下層液槽1において、槽外に設けたポンプ10
によつて液槽の液を循環させるが、液物一吹出手
段の一例として、槽の下部に穴明板12で囲まれ
たチヤンバ14を用いた。このチヤンバー14か
ら液は穴明板12を通して均一な分布で槽内に吹
出すことになる。この場合、単分子層4が形成さ
れる液面領域では、液面の動きは殆どない状態で
ある。単分子層4は加熱手段12により、溶剤を
蒸発させる。下層液は、液速調節手段としてのガ
イド板11によりその流路を狭められることによ
つて、液面近辺の流速を次第に上昇させ、液面と
ガイド板の最も近接したところで最高速度となつ
て、液表面を塗布装置側に向つて圧縮し、これに
よつて単分子層4は固体単分子膜6を形成する。
そして下層液槽の下部にある液吸込口より再びポ
ンプに吸引されて、液の流動を継続することにな
る。一方、作られた固体状単分子膜6を、塗布装
置15によつて、ウエツブ状基体(磁気記録媒
体)8の上に塗布し保護層9を形成する。
In the lower liquid tank 1, a pump 10 provided outside the tank
As an example of the liquid blowing means, a chamber 14 surrounded by a perforated plate 12 was used at the bottom of the tank. The liquid is blown out from this chamber 14 into the tank through the perforated plate 12 in a uniform distribution. In this case, in the liquid surface region where the monomolecular layer 4 is formed, there is almost no movement of the liquid surface. The solvent in the monomolecular layer 4 is evaporated by heating means 12 . The flow path of the lower layer liquid is narrowed by the guide plate 11 serving as a liquid speed adjusting means, so that the flow speed near the liquid surface gradually increases, and reaches the maximum speed at the point where the liquid surface and the guide plate are closest. , the liquid surface is compressed toward the coating device, whereby the monomolecular layer 4 forms a solid monomolecular film 6.
Then, the liquid is sucked into the pump again from the liquid suction port at the bottom of the lower liquid tank, and the liquid continues to flow. On the other hand, the produced solid monomolecular film 6 is coated onto a web-shaped substrate (magnetic recording medium) 8 using a coating device 15 to form a protective layer 9.

次に、本発明を蒸着磁気テープに保護層を設け
る場合に適用した実施例について説明する。
Next, an example will be described in which the present invention is applied to a case where a protective layer is provided on a vapor-deposited magnetic tape.

真空蒸着装置中に25μm厚50cm巾のポリエチレ
ンテレフタレートフイルムを設置し、Co75重量
%、Ni25重量%の組成のものを蒸着源フイラメ
ントより真空度5.0+10-6Torr中で該フイルム上
に0.3μmの厚さとなるように蒸着せしめた。
A polyethylene terephthalate film with a thickness of 25 μm and a width of 50 cm was placed in a vacuum evaporation apparatus, and a film with a composition of 75% Co and 25% Ni was deposited onto the film to a thickness of 0.3 μm in a vacuum degree of 5.0 + 10 -6 Torr from a deposition source filament. It was vapor-deposited so that it became thick.

第1図に示すような装置の下層液槽1の水面上
にベンゼン100c.c.あたり0.005gのパルミチン酸を
溶解した溶液を滴下し単分子層を形成させた。
A solution containing 0.005 g of palmitic acid per 100 c.c. of benzene was dropped onto the water surface of the lower liquid tank 1 of the apparatus shown in FIG. 1 to form a monomolecular layer.

下層液2の流動によつて単分子層4に圧縮力を
与え固体状単分子膜6を形成させ、ビードコート
塗布装置15によりウエツブ状基体8である蒸着
磁気テープの表面に保護層9として固体状単分子
膜6を塗布した。
A compressive force is applied to the monomolecular layer 4 by the flow of the lower layer liquid 2 to form a solid monomolecular film 6, and a solid monomolecular film 6 is coated as a protective layer 9 on the surface of the vapor-deposited magnetic tape, which is a web-like substrate 8, by the bead coat coating device 15. A monomolecular film 6 was applied.

〔発明の効果〕〔Effect of the invention〕

本発明は液の流動に依り、下層液面上に存在す
る単分子層に圧縮力を与えるので、加圧部材によ
る材料の選定そして運転、保守上に特別な考慮が
必要なくなり、安定した条件で製造することが出
来るようになつた。又、本発明では、液循環によ
り液の濾過や、成分、温度等の調整も容易に出来
るので分子層そして固体状単分子膜を形成する条
件の変更設定に有利な装置である。
Since the present invention uses liquid flow to apply compressive force to the monomolecular layer existing on the lower liquid surface, there is no need for special considerations in selecting materials, operation, and maintenance using a pressurizing member, and it is possible to maintain stable conditions. It became possible to manufacture it. In addition, in the present invention, liquid filtration and adjustment of components, temperature, etc. can be easily performed by liquid circulation, so the device is advantageous for changing the conditions for forming a molecular layer and a solid monomolecular film.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示す説明図、第2
図は従来の単分子膜形成方法を示す説明図、第3
図、第4図は単分子膜形成の原理を示す説明図。 1……下層液槽、2……下層液、3……ノズ
ル、4……単分子層、5……シリンダー、6……
固体状単分子膜、7……回転ロール、8……基体
(磁気記録媒体)、9……保護層、10……ポン
プ、11……ガイド板、12……加熱手段、13
……穴明板、14……チヤンバー、15……塗布
装置。
FIG. 1 is an explanatory diagram showing one embodiment of the present invention, and FIG.
The figure is an explanatory diagram showing the conventional monomolecular film formation method.
FIG. 4 is an explanatory diagram showing the principle of monomolecular film formation. 1... Lower layer liquid tank, 2... Lower layer liquid, 3... Nozzle, 4... Monomolecular layer, 5... Cylinder, 6...
Solid monomolecular film, 7... Rotating roll, 8... Substrate (magnetic recording medium), 9... Protective layer, 10... Pump, 11... Guide plate, 12... Heating means, 13
...Perforated plate, 14...Chamber, 15...Coating device.

Claims (1)

【特許請求の範囲】[Claims] 1 液面上に両親媒性分子の揮発性溶媒溶液を導
入して単分子層を形成し、該溶媒を除去すると共
に該単分子層を圧縮して、固体状単分子膜を形成
する装置において、単分子層形成の液槽に液輸送
手段と、液均一吹出手段と、液速調節手段とを備
えたことを特徴とする固体状単分子膜形成装置。
1 In an apparatus for forming a monomolecular layer by introducing a volatile solvent solution of amphiphilic molecules onto a liquid surface, removing the solvent and compressing the monomolecular layer to form a solid monomolecular film. A solid monomolecular film forming apparatus characterized in that a liquid tank for forming a monomolecular layer is equipped with a liquid transport means, a liquid uniform blowing means, and a liquid speed adjusting means.
JP16666485A 1985-07-30 1985-07-30 Device for forming solid monomolecular film Granted JPS6227069A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16666485A JPS6227069A (en) 1985-07-30 1985-07-30 Device for forming solid monomolecular film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16666485A JPS6227069A (en) 1985-07-30 1985-07-30 Device for forming solid monomolecular film

Publications (2)

Publication Number Publication Date
JPS6227069A JPS6227069A (en) 1987-02-05
JPH0576357B2 true JPH0576357B2 (en) 1993-10-22

Family

ID=15835442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16666485A Granted JPS6227069A (en) 1985-07-30 1985-07-30 Device for forming solid monomolecular film

Country Status (1)

Country Link
JP (1) JPS6227069A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06220B2 (en) * 1988-10-19 1994-01-05 新日本製鐵株式会社 Organic thin film manufacturing equipment
JP3262472B2 (en) * 1994-04-22 2002-03-04 キヤノン株式会社 Langmuir Blodgett film production equipment
FR2977810A1 (en) * 2011-07-13 2013-01-18 Commissariat Energie Atomique INSTALLATION AND METHOD FOR DEPOSITING OR ADJUSTABLE PARTICLE FILM OF ADJUSTABLE WIDTH TO A SCROLLING SUBSTRATE

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60193325A (en) * 1984-03-15 1985-10-01 Canon Inc Film forming apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60193325A (en) * 1984-03-15 1985-10-01 Canon Inc Film forming apparatus

Also Published As

Publication number Publication date
JPS6227069A (en) 1987-02-05

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