JPS63103948U - - Google Patents
Info
- Publication number
- JPS63103948U JPS63103948U JP1986201702U JP20170286U JPS63103948U JP S63103948 U JPS63103948 U JP S63103948U JP 1986201702 U JP1986201702 U JP 1986201702U JP 20170286 U JP20170286 U JP 20170286U JP S63103948 U JPS63103948 U JP S63103948U
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- processing
- substrate
- thin film
- machined
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Description
第1図は本考案実施例に係る単結晶体加工用基
盤を示す断面図、第2図、第3図はそれぞれ本考
案の他の実施例を示す断面図である。第4図aは
従来の単結晶体加工用基盤を示す斜視図、第4図
bは同図a中のX−X線断面図である。 J1,J2,J3……定盤、1……基体、2…
…薄膜。
盤を示す断面図、第2図、第3図はそれぞれ本考
案の他の実施例を示す断面図である。第4図aは
従来の単結晶体加工用基盤を示す斜視図、第4図
bは同図a中のX−X線断面図である。 J1,J2,J3……定盤、1……基体、2…
…薄膜。
Claims (1)
- 単結晶体よりなる被加工物体を載置し、加工す
る面にビツカース硬度が900〜1800Kg/mm
2の薄膜を被着したことを特徴とする単結晶体加
工用基盤。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986201702U JPS63103948U (ja) | 1986-12-24 | 1986-12-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986201702U JPS63103948U (ja) | 1986-12-24 | 1986-12-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63103948U true JPS63103948U (ja) | 1988-07-06 |
Family
ID=31165401
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986201702U Pending JPS63103948U (ja) | 1986-12-24 | 1986-12-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63103948U (ja) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52149696A (en) * | 1976-06-09 | 1977-12-12 | Toshiba Ceramics Co | Jigs for use in grinding silicon wafer |
JPS5855562A (ja) * | 1981-09-28 | 1983-04-01 | Hitachi Ltd | 研磨皿とその製造方法 |
-
1986
- 1986-12-24 JP JP1986201702U patent/JPS63103948U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52149696A (en) * | 1976-06-09 | 1977-12-12 | Toshiba Ceramics Co | Jigs for use in grinding silicon wafer |
JPS5855562A (ja) * | 1981-09-28 | 1983-04-01 | Hitachi Ltd | 研磨皿とその製造方法 |