JPS63103884A - High temperature sliding member and sliding method - Google Patents
High temperature sliding member and sliding methodInfo
- Publication number
- JPS63103884A JPS63103884A JP24857786A JP24857786A JPS63103884A JP S63103884 A JPS63103884 A JP S63103884A JP 24857786 A JP24857786 A JP 24857786A JP 24857786 A JP24857786 A JP 24857786A JP S63103884 A JPS63103884 A JP S63103884A
- Authority
- JP
- Japan
- Prior art keywords
- sliding
- temperature
- ceramic
- base material
- metal film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 27
- 239000000463 material Substances 0.000 claims description 65
- 239000000919 ceramic Substances 0.000 claims description 44
- 229910052751 metal Inorganic materials 0.000 claims description 43
- 239000002184 metal Substances 0.000 claims description 43
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 24
- 229910052574 oxide ceramic Inorganic materials 0.000 claims description 20
- 239000011224 oxide ceramic Substances 0.000 claims description 19
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 15
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 15
- 230000013011 mating Effects 0.000 claims description 11
- 229910045601 alloy Inorganic materials 0.000 claims description 10
- 239000000956 alloy Substances 0.000 claims description 10
- 239000011651 chromium Substances 0.000 claims description 9
- 239000010949 copper Substances 0.000 claims description 9
- 229910052759 nickel Inorganic materials 0.000 claims description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 8
- 229910052709 silver Inorganic materials 0.000 claims description 8
- 239000004332 silver Substances 0.000 claims description 8
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052804 chromium Inorganic materials 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 229910017052 cobalt Inorganic materials 0.000 claims description 6
- 239000010941 cobalt Substances 0.000 claims description 6
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 6
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 238000005240 physical vapour deposition Methods 0.000 claims description 6
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 2
- 238000012360 testing method Methods 0.000 description 16
- 239000010410 layer Substances 0.000 description 10
- 238000005299 abrasion Methods 0.000 description 8
- 229910010293 ceramic material Inorganic materials 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- 230000003746 surface roughness Effects 0.000 description 6
- 239000000843 powder Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 238000001771 vacuum deposition Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000011572 manganese Substances 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000314 lubricant Substances 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 230000001737 promoting effect Effects 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical group [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- -1 niracle Chemical compound 0.000 description 2
- 229910052596 spinel Inorganic materials 0.000 description 2
- 239000011029 spinel Substances 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229920000742 Cotton Polymers 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910002077 partially stabilized zirconia Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 231100000241 scar Toxicity 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
Landscapes
- Sliding-Contact Bearings (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、シール材料やベアリング材料等として用いら
れる高温摺動部材およびその摺動方法に関し、更に詳し
くは、耐熱性に優れたセラミックスの本来の特長を変え
ずに表面を改質し、高温摺動特性を向上させたセラミッ
クス高温摺動部材およびその摺動方法に関するものであ
る。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a high-temperature sliding member used as a sealing material, a bearing material, etc., and a sliding method therefor. The present invention relates to a ceramic high-temperature sliding member whose surface has been modified to improve high-temperature sliding properties without changing its features, and a method for sliding the same.
シール材料やベアリング材料等の高温雰囲気下における
摺動部材としては、従来より、コバル）（Ｃｏ）基、ニ
ッケル（Ｎｉ）基等の合金からなる耐熱金属材料が用い
られている。しかし、耐酸化性、高温強度等の耐熱性の
観点から、その使用温度は８００℃程度までに限定され
ているのが現状である。BACKGROUND ART Conventionally, heat-resistant metal materials made of alloys such as cobal (Co) and nickel (Ni) bases have been used as sealing materials, bearing materials, and other sliding members in high-temperature atmospheres. However, from the viewpoint of heat resistance such as oxidation resistance and high-temperature strength, the use temperature is currently limited to about 800°C.
そこで、高温雰囲気下において金属よシ物理的性質、化
学的性質１機械的性質に優れたセラミックス材料の利用
が図られている。ところが、一般的には耐摩材と思われ
ているこのセラミックス材料は、実際には耐摩耗性が小
さく、それも温度の上昇に伴って摩耗の増大が著しいと
いう欠点を有し、構造材としては十分な高温特性を有す
るこのセラミックス材料もそのまま高：１１摺動部材と
して使用することが難しい。Therefore, attempts are being made to utilize ceramic materials that have superior physical, chemical, and mechanical properties in high-temperature atmospheres. However, this ceramic material, which is generally considered to be a wear-resistant material, actually has low wear resistance and has the disadvantage that wear increases significantly as the temperature rises, making it difficult to use as a structural material. This ceramic material, which has sufficient high-temperature properties, is also difficult to use as is as a high:11 sliding member.
これは、セラミックスからなる材料を摺動部材として用
いた場合、高温雰囲気下における摺動過程において９局
部的な高面圧接触部分でセラミックス材料が摩耗して摩
耗粉が生成され、この硬い摩耗粉の研磨作用とそれに伴
う表面粗さの増大により、摺動部材および相手材の摩耗
が促進されるためである。相手材が金属材料のようにセ
ラミックスより軟質材の場合には、生じた摩耗粉が埋収
され易いので、摩耗粉による研磨作用が抑制されるが、
相手材がセラミックス材料よりなる場合には０即成性は
乏しいためＣの摩耗が特に著しく。This is because when a material made of ceramic is used as a sliding member, during the sliding process in a high-temperature atmosphere, the ceramic material is worn away at 9 local high surface pressure contact areas and abrasion powder is generated, and this hard abrasion powder is generated. This is because the abrasive action of and the accompanying increase in surface roughness accelerate the wear of the sliding member and the mating material. When the mating material is softer than ceramics, such as a metal material, the generated abrasion powder is easily buried, so the abrasive action of the abrasion powder is suppressed.
When the mating material is made of ceramic material, the wear of C is particularly significant because the instant forming property is poor.
寸法変化が激しくなり、実用に供することが難しい。Dimensional changes become drastic, making it difficult to put it into practical use.
この問題を解決すべく、従来より種々の開発が行われ、
耐摩耗性の向上した摺動部材がいくつか提案されている
。その一つに、セラミックスの啄料に、固体潤滑剤であ
る窒化硼素（ＢＮ）を添カロし、この原料を用いて表層
部を焼成して得られ；を窒化珪素質材料がある（特開昭
５９−１３７３７５号公報］。In order to solve this problem, various developments have been carried out in the past.
Several sliding members with improved wear resistance have been proposed. One such material is silicon nitride material, which is obtained by adding boron nitride (BN), which is a solid lubricant, to a ceramic material and firing the surface layer using this raw material (Unexamined Japanese Patent Publication No. Publication No. 59-137375].
しかしながら、このセラミックス材料は、確かに耐摩耗
性の向上はある程度見られるものの、セラミックス材料
本来有する強度を低下させるという問題があった。However, although this ceramic material does show some improvement in wear resistance, it has the problem of reducing the strength inherent in the ceramic material.
そこで１本発明者等は、上述の如き従来技術の問題点を
解決すべく鋭意研究し、各種の系統的実験を重ねた結果
１本発明を成すに至ったものである。Therefore, the inventors of the present invention conducted intensive research to solve the problems of the prior art as described above, and as a result of various systematic experiments, they came up with the present invention.
本発明の目的は、高温雰囲気下で耐摩耗性に優れた摺動
部材およびその摺動方法を提供するにある。An object of the present invention is to provide a sliding member with excellent wear resistance in a high-temperature atmosphere and a method for sliding the same.
本発明の高温摺動部材は、酸化物セラミックスよりなる
基材と、該基材表面にクロム、マンガン、鉄、コバルト
、ニッケル、銅、銀の一種またはその合金を物理蒸着し
て得られた金属膜と、該金属膜の表面に形成した摺動部
とからなる高温摺動部材であって、５００℃以上の高温
雰囲気下（少なぐとも摺動部及びその近傍を含ｔｒ雰囲
気：以下同じ）で相手材としてのセラミックス部材を前
記摺動部面上を摺動させることによりセラミックス部材
および基材の摩耗を防止したことを特徴とするものであ
る（以下１本第一発明とする）。The high-temperature sliding member of the present invention comprises a base material made of oxide ceramics and a metal obtained by physically vapor depositing one of chromium, manganese, iron, cobalt, nickel, copper, and silver or an alloy thereof on the surface of the base material. A high-temperature sliding member consisting of a film and a sliding part formed on the surface of the metal film, in a high-temperature atmosphere of 500°C or higher (at least a tr atmosphere including the sliding part and its vicinity; the same applies hereinafter). This invention is characterized in that wear of the ceramic member and the base material is prevented by sliding a ceramic member as a mating member on the surface of the sliding part (hereinafter referred to as the first invention).
本発明の高温摺動部材の摺動方法は、一対のセラミック
ス部材よりなる摺動部材を高温で摺動させる方法におい
て、少なくとも一方の部材を酸化物セラミックスからな
るセラミックス基材表面にクロム、マンガン、鉄、コバ
ルト、ニラクル、銅。The sliding method of a high-temperature sliding member of the present invention is a method of sliding a sliding member made of a pair of ceramic members at a high temperature, in which at least one member is coated on the surface of a ceramic base material made of oxide ceramics with chromium, manganese, Iron, cobalt, niracle, copper.
銀の一種またはその合金よりなる金属膜を物理蒸着によ
り被覆してその表面に摺動部を形成し、該摺動部を７］
（ｌ熱することにより前記摺動部に酸化物層を形成させ
、 ５００″Ｃ以上の高温雰囲気下で相手材としてのセ
ラミックス部材を前記摺動部の酸化物層上を摺動させ、
セラミックス部材と金属膜の摺動部との摩擦面馴染みを
促進することにより。A metal film made of a type of silver or an alloy thereof is coated by physical vapor deposition to form a sliding part on the surface, and the sliding part is
(By heating, an oxide layer is formed on the sliding part, and a ceramic member as a mating material is slid on the oxide layer of the sliding part in a high temperature atmosphere of 500"C or more,
By promoting frictional surface compatibility between the ceramic member and the sliding part of the metal film.
セラミックス部材および基材の摩耗を防止したことを特
徴とするものである（以下１本第二発明とする）。This invention is characterized by preventing wear of the ceramic member and the base material (hereinafter referred to as the second invention).
以下に１本発明の構成をより詳細に説明する。The configuration of the present invention will be explained in more detail below.
先ず１本第一発明の高温摺動部材について説明する。First, the high temperature sliding member of the first invention will be explained.
本第−発明における基材は、高温摺動部材としての基材
をなすもので、酸化物を主な原料として製造式れた酸化
物セラミックス焼結体であり、アルミナ（ＡｌＯｓ）、
ジルコニア（Ｚｒ０２） 等ノ酸化物セラミックスを
用いる。この酸化物セラミックスは、耐酸化性に優れ、
窒化珪素や炭化珪素に比べると高温強度がやや劣るが、
従来の耐熱合金に比べて高温雰囲気下において優れた物
理的、化学的および機械的性質をイｆする。The base material in this first invention is a base material for a high-temperature sliding member, and is an oxide ceramic sintered body manufactured using oxides as main raw materials, including alumina (AlOs),
Oxide ceramics such as zirconia (Zr02) are used. This oxide ceramic has excellent oxidation resistance,
Although its high temperature strength is slightly inferior to silicon nitride and silicon carbide,
It has superior physical, chemical and mechanical properties in high temperature atmospheres compared to conventional heat resistant alloys.
また、酸化物セラミックスよりなる基材の摺動部表面に
形成した金属膜は、高温で軟化または溶融することによ
り、或いは雰囲気により酸化されることにより潤滑剤と
なってセラミックス基材に対して耐摩耗性を付与する金
属薄膜であり、クロム（Ｃｒ）、ｖンガ＞ （？ｖｌｎ
） 、鉄（Ｆｅ）、：ｚバルト（Ｃｏ）、ニアケル（
Ｎｉ）、銅（Ｃｕ）、銀（Ａｇ）の一種またはその合金
よりなる金属膜である。In addition, the metal film formed on the surface of the sliding part of the base material made of oxide ceramics becomes a lubricant when softened or melted at high temperatures or oxidized in the atmosphere, making it resistant to the ceramic base material. It is a thin metal film that imparts abrasion resistance, and is made of chromium (Cr).
), iron (Fe), :z baltic (Co), niakel (
The metal film is made of one of Ni), copper (Cu), and silver (Ag) or an alloy thereof.
ここで、この金属膜の膜厚は、高温摺動部材の基材とし
ての酸化物セラミックス材料に耐摩耗性を付与する程度
の厚さであり、かつこの酸化物セラミックス基材の表面
粗さを越えた膜厚であれば。Here, the thickness of this metal film is such that it imparts wear resistance to the oxide ceramic material as the base material of the high-temperature sliding member, and it also reduces the surface roughness of this oxide ceramic base material. If the film thickness exceeds.
特に限定するものではないが、好フしくけ、０．１〜５
μｍである。これは、金属膜の膜厚が、０．１μｍ未満
の場合には、摺動時に摩擦面に発生するせん断力による
基材の破壊を防止することが難しく、また、５μｍを越
えた場合には、高温時に金属の溶融或いは酸化による寸
法変化が激しくなシ。Although not particularly limited, it has a good effect, 0.1 to 5
It is μm. This is because if the thickness of the metal film is less than 0.1 μm, it is difficult to prevent the base material from being destroyed by the shear force generated on the friction surface during sliding, and if the thickness exceeds 5 μm, , where the dimensions change drastically due to metal melting or oxidation at high temperatures.
摺動部材として作用しにくいからである。更に。This is because it is difficult to act as a sliding member. Furthermore.
酸化物セラミックスがジルコニア質セラミックスであり
、かつ金属膜がマンガン（Ｍｎ ） 、鉄（Ｆｅ）。The oxide ceramic is a zirconia ceramic, and the metal film is manganese (Mn) and iron (Fe).
コバルト（Ｃｏ）、ニッケル（Ｎｉ）、銀（Ａｇ）の場
合には、金属膜の膜厚を１μｍ以上とすることが好フし
い。これは、高温ではジルコニア質セラミックスの強度
低下が比較的大きいためである。この場合、相手材に窒
化珪素などの高温強度の高いセラミックスを組み合わせ
ることにより、より 一層耐摩耗性を向上させることが
できる。In the case of cobalt (Co), nickel (Ni), and silver (Ag), the thickness of the metal film is preferably 1 μm or more. This is because the strength of zirconia ceramics decreases relatively significantly at high temperatures. In this case, wear resistance can be further improved by combining ceramics with high high temperature strength such as silicon nitride as the mating material.
また、セラミックス基材の摺動部表面に形成する金属膜
は、常温から高温まで基材より軟らかく。Furthermore, the metal film formed on the surface of the sliding part of the ceramic base material is softer than the base material from room temperature to high temperature.
高温では表面から酸化されるが、それが特に摩擦初期に
おいてはセラミックス基材同士の直接接触を防止し、Ｗ
ｌ擦図面馴染を促進する役割を果たし。At high temperatures, the surface is oxidized, but this prevents direct contact between the ceramic base materials, especially in the early stages of friction, and W
l It plays a role in promoting familiarity with the rubbing pattern.
基材の摩耗が特に多くなる５００’Ｃ以上の温度におい
て、高い耐摩耗性を付与する。Provides high abrasion resistance at temperatures above 500'C, where wear of the base material is particularly high.
また、セラミックス基材と金属膜の種類によっては基材
と被覆金属の酸化物が反応し、脆い金属間化合物を生成
して、使用温度が制限されることがある。例えば、アル
ミナセラミックスにＮｉ 膜を形成する場合には、使用
雰囲気温度を９００℃程度１でとするのが好ましい。こ
れは、使用温度が１０００℃の場合には、摩擦熱による
温度上昇が加わり、金属膜の２価酸化物、 ＮｉＯとア
ルミナ基材間での Ｎｉ Ｏ−）−Ａｌ ２０１１ →
ＮｉＡ４＋０４ なる反応によってスピネルか生成さ
れ、耐摩耗性が損なわれるからである。ただし、これは
Ｎｉ の酸化物が２価のものだけであるからで、１価ま
た！′ｉ３価以上の多価酸化物ともなる金属膜では９例
えスピネルを生成しても、その上に被覆金属単体の酸化
物層が形成されるので、 １０００℃以上でも優れた耐
摩耗性をアルミナ基材に付与する。Furthermore, depending on the type of the ceramic base material and the metal film, the base material and the oxide of the coating metal may react to form a brittle intermetallic compound, which may limit the operating temperature. For example, when forming a Ni film on alumina ceramics, it is preferable that the ambient temperature used is about 900°C. This is because when the operating temperature is 1000℃, the temperature rise due to frictional heat is added, and the divalent oxide of the metal film, NiO-)-Al 2011 between NiO and the alumina base material.
This is because spinel is produced by the NiA4+04 reaction, which impairs wear resistance. However, this is because Ni oxides are only divalent, and monovalent as well! Even if spinel is formed in a metal film that is also a polyvalent oxide with a valence of 3 or more, an oxide layer of the coating metal alone is formed on top of it, so alumina has excellent wear resistance even at temperatures above 1000°C. Apply to the base material.
本第−発明の高温摺動部材は、上述したセラミックス基
材の表面に、クロム（Ｃｒ）、マンガン（Ｍｎ）、鉄（
Ｆｅ）、＝ｚパルト（Ｃｏ） 、 ニッケル（Ｎｉ）、
銅（Ｃｕ）、銀（Ａｇ）の一種またはその合金よりなる
金属膜を形成してなる。The high-temperature sliding member of the present invention has chromium (Cr), manganese (Mn), iron (
Fe), =zpart (Co), Nickel (Ni),
A metal film made of one of copper (Cu), silver (Ag), or an alloy thereof is formed.
ここで、金属膜の酸化物セラミックス基材表面への被覆
・形成は、物理蒸着法により行う。この物理蒸着（ＰＶ
Ｄ ： Ｐｈｙｓｉｃａｌ Ｖａｐｏｒ Ｄｅｐｏｓｉ
ｔｉｏｎ ）は。Here, the coating and formation of the metal film on the surface of the oxide ceramic substrate is performed by a physical vapor deposition method. This physical vapor deposition (PV
D: Physical Vapor Deposit
tion) is.
上述の如く高温摺動部材として有用な金属膜をセラミッ
クス基材表面へ被覆・形成し得るものであれば、その具
体的方法について特定するものではなく、真空蒸着法、
スパッタリング法、イオンブレーティング法等の何れの
方法であってもよい。As mentioned above, as long as a metal film useful as a high-temperature sliding member can be coated and formed on the surface of a ceramic base material, the specific method is not specified, and vacuum deposition method,
Any method such as sputtering method or ion blating method may be used.
本第−発明の高温摺動部材の代表的な製造方法を間単に
述べると、以下の様である。A typical manufacturing method of the high-temperature sliding member of the present invention will be briefly described as follows.
先ず、高温摺動部材としての目的に応じた所望の性質を
有する酸化物セラミックスを、従来のセラミックスのｌ
！ｌｉ造方法により得、基材とする。First, an oxide ceramic having desired properties according to the purpose of a high-temperature sliding member was used, compared to conventional ceramics.
! It is obtained by the lithography method and used as a base material.
次て、得られた酸化物セラミックス基材を、真空蒸着装
置、スパッタリング装置等に配設し、所望の金属を真空
蒸着法、スパッタリング法等の物理蒸着法により市化物
セラミックス基材の表面に被覆し２本第一発明にかかる
高温摺動部材を得る。Next, the obtained oxide ceramic substrate is placed in a vacuum evaporation device, a sputtering device, etc., and a desired metal is coated on the surface of the municipal ceramic substrate by a physical vapor deposition method such as a vacuum evaporation method or a sputtering method. Second, a high-temperature sliding member according to the first invention is obtained.
また０本第一発明の高温摺動部材は、金属膜の摺動部に
酸化物Ｎを形成したものであってもよい。Further, the high temperature sliding member of the first invention may be one in which oxide N is formed on the sliding portion of the metal film.
その場合、該酸化物層は、高温摺動部材を加熱すること
により形成する。In that case, the oxide layer is formed by heating the high temperature sliding member.
次に、第二発明の高温摺動部材の摺動方法は。Next, there is a method for sliding a high temperature sliding member according to the second invention.
第一発明の高温摺動部材と相手材としてのセラミックス
部材と全高温で摺動させる方法である。即ち２本第二発
明の高温摺動部材の摺動方法は、一対のセラミックス部
材よりなる摺動部材を高温で摺動させる方法において、
少なくとも一方の部材全酸化物を主な原料として製造さ
れた酸化物セラミックス焼結体からなるセラミックス基
材表面にクロム、マンガン、鉄、コバルト、ニッケル、
銅。This is a method of sliding the high-temperature sliding member of the first invention on a ceramic member as a mating material at a total high temperature. That is, the method for sliding a high-temperature sliding member of the second invention is a method for sliding a sliding member made of a pair of ceramic members at a high temperature,
At least one member is a ceramic base material made of an oxide ceramic sintered body manufactured using all oxides as the main raw material.Chromium, manganese, iron, cobalt, nickel, etc.
copper.
銀の一種またはその合金よりなる金属膜を物理蒸着によ
υ被覆してその表面に摺動部を形成し、該摺動部を加熱
することにより前記摺動部の少なくとも表面に酸化物層
を形成式せ、少なくとも摺動面及びその近傍を含む雰囲
気が５００℃以上の高温雰囲気下で相手材としてのセラ
ミックス部材と前記摺動部の酸化物層を摺動させ、セラ
ミックス部材と金属膜の摺動部との摩擦面馴染みを促進
することにより、セラミックス部材および基材の摩耗を
防止するものである。A metal film made of a type of silver or an alloy thereof is coated by physical vapor deposition to form a sliding part on its surface, and an oxide layer is formed on at least the surface of the sliding part by heating the sliding part. In the forming method, the ceramic member as a mating material and the oxide layer of the sliding part are slid together in a high-temperature atmosphere of 500°C or higher, including at least the sliding surface and its vicinity, and the sliding of the ceramic member and the metal film is performed. By promoting frictional surface familiarity with the moving parts, wear of the ceramic member and the base material is prevented.
この際、金属膜の摺動部への酸化物層の形成は。At this time, an oxide layer is formed on the sliding part of the metal film.
少なくとも該摺動Ｓｔたはその近傍の温度雰囲気を金属
膜が酸化する温度となるように加熱することにより行な
う。従って、該加熱は、＃１化層を形成する部分のみを
所定の温度雰囲気としても、該部分を含む雰囲気を所定
の温度雰囲気としてもよい。更に、該加熱は、単に相手
材としてのセラミックス部材との摺動により前記部分に
摩擦熱を発生させ、該部分を含む雰囲気を所定の温度雰
囲気としてもよい。This is carried out by heating at least the temperature atmosphere of the sliding part St or its vicinity to a temperature at which the metal film is oxidized. Therefore, the heating may be performed by setting only the part where the #1 layer is to be formed into a predetermined temperature atmosphere, or setting the atmosphere including the part to a predetermined temperature atmosphere. Further, the heating may be performed by simply generating frictional heat in the portion due to sliding with a ceramic member serving as a mating member, and setting the atmosphere including the portion to a predetermined temperature atmosphere.
木簡−発明の高温摺動部材および第二発明の摺動方法は
、 ５００’Ｃ以上の高温雰囲気下において耐摩耗性に
優れている。The high-temperature sliding member of the wooden tablet invention and the sliding method of the second invention have excellent wear resistance in a high-temperature atmosphere of 500'C or higher.
また９本第二発明の摺動方法により、５００℃以上の高
温雰囲気下においても摺動部材の摺動による摩耗を防止
することができる。Further, by the sliding method of the second aspect of the present invention, it is possible to prevent wear of the sliding member due to sliding even in a high temperature atmosphere of 500° C. or higher.
この様に２本第一発明の高温摺動部材および第二発明の
摺動方法がかかる効果を発揮するメカニズムについては
、未だ必ずしも明らかではないが。The mechanism by which the two high-temperature sliding members of the first invention and the sliding method of the second invention exhibit such effects is not necessarily clear yet.
次の様に考えられる。It can be considered as follows.
即ち１本発明の高温摺動部材の基材としての酸化物セラ
ミックスは、耐熱性に優れ、温度の上昇に伴う機械的性
質の低下が小さく、 ｓｏｏ’ｃ以上のような高温雰
囲気下においても十分な強度を有し。Namely, the oxide ceramics used as the base material of the high-temperature sliding member of the present invention have excellent heat resistance, have small decreases in mechanical properties as the temperature rises, and can be used satisfactorily even in high-temperature atmospheres such as soo'c or higher. It has great strength.
また、熱膨張係数も小ざいので熱変形量が小はい。Also, the coefficient of thermal expansion is small, so the amount of thermal deformation is small.
そして、この酸化物セラミックス基材の表面に形成した
金属膜は、基材よシ軟質な金属またはその合金であり、
下地としてのセラミックス基材によく馴染む。また、こ
の金属膜は、高温では軟化。The metal film formed on the surface of this oxide ceramic base material is a metal or an alloy thereof that is softer than the base material,
It blends well with the ceramic base material as the base material. Additionally, this metal film softens at high temperatures.
溶融または雰囲気と反応して酸化展となって、基材の摩
耗を防止する潤滑剤となる。When melted or reacted with the atmosphere, it becomes oxidized and becomes a lubricant that prevents wear of the base material.
この高温摺動部材および方法全高温雰囲気下で用いた場
合、摺動により摩擦面に作用する負荷を下地のセラミッ
クス基材で受け、摩擦に伴うせん断力は極く表面の高温
で軟化した金属薄膜またはその高温酸化物層で受は持た
れる。さらに、加工精度等により不可避的に局部的な高
面圧接触や片当りの生ずる摺動面は、この酸化物層の変
形あるいはわずかな摩耗によって速やかに馴染ませられ
る。これにより、摺動面にセラミックス摩粍粉等の硬い
摩耗促進物質が生成されず、基材及び相手材の耐摩耗性
が著しく向上され、優れた高温摺動特性を発揮している
ものと思われる。This high-temperature sliding member and method When used in a high-temperature atmosphere, the load that acts on the friction surface due to sliding is received by the underlying ceramic base material, and the shearing force caused by friction is extremely absorbed by the thin metal film on the surface that has been softened by the high temperature. Or the uke is held by the high temperature oxide layer. Furthermore, the sliding surface, where local high surface pressure contact or uneven contact occurs unavoidably due to machining accuracy, etc., can be quickly conformed to by deformation or slight wear of this oxide layer. As a result, hard wear-promoting substances such as ceramic grinding powder are not generated on the sliding surface, and the wear resistance of the base material and mating material is significantly improved, resulting in excellent high-temperature sliding properties. It will be done.
木簡−および第二発明は、高温摺動特性、耐熱性、耐摩
耗性だ優れているので、熱交換器のシール材料、溶湯中
で用いるベアリング材料、ターボチャージャーのベアリ
ング材料等の高温雰囲気下における摺動部材および摺動
方法として広く利用することができる。The wooden tablet and the second invention have excellent high-temperature sliding properties, heat resistance, and wear resistance, so they can be used as sealing materials for heat exchangers, bearing materials used in molten metal, bearing materials for turbochargers, etc. in high-temperature atmospheres. It can be widely used as a sliding member and a sliding method.
実施例 １゜
先ず、酸化物セラミックス基材として、アルミナ焼結体
（京セラ■製： Ａ４７９ ）の２６ Ｘ ２６ Ｘ４
ｆｆの平板の中心に直径５ｆｌの穴をあけ１表面粗さが
０．０５μｍＲｔになるように研磨して得たものを用意
した。Example 1 First, as an oxide ceramic base material, a 26 x 26 x 4 alumina sintered body (manufactured by Kyocera ■: A479) was used.
A hole with a diameter of 5 fl was made in the center of a flat plate of ff and polished to a surface roughness of 0.05 μmRt.
次に、このセラミックス基材を真空蒸着装置（−８。Next, this ceramic base material was coated with a vacuum evaporator (-8.
日本電子■製、ＪＥＥ−５Ｂ ）に入れ、１０ ハス
カル（Ｐａ）に減圧し、セラミックス基材を３５０〜４
００’Ｃに加熱し、タングステン（ト）綿製バスケット
を用いて真空蒸着を行い、基材に第１表に示す金属を被
覆した。これにより０本発明にかかる高温摺動部材を得
た（試料番号１〜６．８〜１２）。JEE-5B (manufactured by JEOL Ltd.), the pressure was reduced to 10 Pa, and the ceramic base material was heated to 350 to 4
The base material was coated with the metal shown in Table 1 by heating to 00'C and performing vacuum deposition using a tungsten cotton basket. As a result, high-temperature sliding members according to the present invention were obtained (sample numbers 1 to 6.8 to 12).
尚、試料番号７および１３〜１５については、スパッタ
リング装置を用い、導入ガス全アルゴン（Ａｒ）ガス、
真空度１４Ｐａとして１時間以上のグロー放ｔを行ない
、基材表面にニッケルまたは鉄を被覆した。For sample numbers 7 and 13 to 15, using a sputtering device, the introduced gas was entirely argon (Ar) gas,
Glow exposure was performed for 1 hour or more at a vacuum degree of 14 Pa, and the surface of the base material was coated with nickel or iron.
得られた高温摺動部材の性能評価試験を、摩擦摩耗試験
により打った。A performance evaluation test of the obtained high-temperature sliding member was carried out using a friction and wear test.
先ず、得られた高温摺動部材を試料板Ａとした。First, the obtained high-temperature sliding member was designated as sample plate A.
次に、上述のセラミックス基材と同質のアルミナ焼結体
（京セラ（１！！Ｊ ： Ａ４７９ ： ２６ Ｘ ２
６ Ｘ４ｊｒｊ。Next, an alumina sintered body (Kyocera (1!!J: A479: 26 x 2
6 X4jrj.
表面粗さが０．０５μ７７ＪＲ２）の一方の而（摩擦面
部）を、直径２５Ｍ、厚み１！Ｉｎｌの円板か突出した
形となるように加工し、更に中央部に直径１０ｆｌの穴
を空は試料板Ｂとした。次に、スラスト・カラー型の高
ｉｓ擦試験機の回転軸側の試験片台に試料板Ａを、７Ｊ
Ｏ圧軸側の試験片台に試料板Ｂを載置し、第２表に示す
試験条件により摩擦摩耗試験を行った。One side (friction surface) with a surface roughness of 0.05μ77JR2) has a diameter of 25M and a thickness of 1! A disk of Inl was processed to have a protruding shape, and a hole with a diameter of 10 fl in the center was used as sample plate B. Next, sample plate A was placed on the test piece stand on the rotating shaft side of the thrust collar type high IS friction tester.
Sample plate B was placed on the test piece stand on the O-pressure axis side, and a friction and wear test was conducted under the test conditions shown in Table 2.
得られた結果を、第１表に示す。尚、摩耗量は。The results obtained are shown in Table 1. In addition, the amount of wear is.
試料板Ａおよび試料板Ｂの重量変化を測定することによ
り得た。その際、試料板Ａが高温に加熱されると、金属
膜は酸化されて重量増７１０ｔ−もたらすので、この影
響を避けるために、すべり距離１２０ｍの試験後の試料
板の重量とすベシ距ｉ６ｏｏｍの試験後の試料板の重量
との差を摩耗量の指標とした。゛また。試料番号１およ
び試料番号７については、試料板Ａの摩耗痕の断面プロ
フィールを触針式粗さ計により得た。その結果を、第１
図および第２図に示す。図中、１および２は試料板Ａの
最表面を、１１および１２は試料板Ａの摩耗痕の表面を
それぞれ示す。It was obtained by measuring the weight change of sample plate A and sample plate B. At that time, when the sample plate A is heated to a high temperature, the metal film is oxidized and the weight increases by 710 tons, so in order to avoid this effect, the weight of the sample plate after the test with a sliding distance of 120 m and the bevel distance i6oom The difference between the weight of the sample plate after the test was used as an index of the amount of wear.゛Again. For Sample No. 1 and Sample No. 7, the cross-sectional profile of the wear marks on sample plate A was obtained using a stylus roughness meter. The results are shown in the first
As shown in FIG. In the figure, 1 and 2 indicate the outermost surface of the sample plate A, and 11 and 12 indicate the surfaces of the abrasion marks on the sample plate A, respectively.
比較のために、試料板Ａとして金属膜のないアルミナ焼
結体（上述のセラミックス基材と同様のもの）を用いた
もの（試料番号Ｃ１，Ｃ２）、または、試料板Ａおよび
試料板Ｂとしてα−３ｉＣおよびβ−５ｉＣからなる炭
化珪素焼結体（ＳｉＣ：イビデン■１ｉ！：イビセラム
、同寸法）を用いた（試料番号Ｃ３，Ｃ４）ほかは上述
と同様の構成により比較試験を同様に行った。得られた
結果を、第１表に併せて示す。筐た。試料番号Ｃ２につ
いては、試料板Ａの摩耗痕の断面プロフィールを触針式
粗さ計により得た。その結果を、第３図に示す。For comparison, samples using an alumina sintered body (similar to the ceramic base material described above) without a metal film were used as sample plates A (sample numbers C1 and C2), or sample plates A and B were used as sample plates. Comparative tests were conducted in the same manner with the same configuration as above except that silicon carbide sintered bodies (SiC: IBIDEN 1i!: IBICERAM, same dimensions) consisting of α-3iC and β-5iC were used (sample numbers C3 and C4). went. The obtained results are also shown in Table 1. It was a cabinet. For sample number C2, the cross-sectional profile of the wear marks on sample plate A was obtained using a stylus roughness meter. The results are shown in FIG.
図中、３は試料板Ａの最表面を、 １３ｆ′ｉ試料板Ａ
の摩耗痕の表面をそれぞれ示す。In the figure, 3 indicates the outermost surface of sample plate A, 13f'i sample plate A
The surfaces of the wear marks are shown respectively.
第２表 摩擦試験条件
以上の結果より明らかの如く２本発明にかかる高温摺動
部材を用いた場合には、高温雰囲気下で耐摩耗性に優れ
ていることが分る。Table 2 Friction test conditions As is clear from the above results, when the high temperature sliding member according to the present invention is used, it is found that the wear resistance is excellent in a high temperature atmosphere.
実施例 ２゜
先ず、酸化物セラミックス基材として、 ３ｍｏ１％Ｙ
２Ｏ１１部分安定化ジルコニア（ＺｒＯ２：京セラ■製
： ｚ２０１ ）の２６ Ｘ ２６ Ｘ ４朋の平板の
中心に直径５ｎの穴をあけ９表面粗さが０．１μｍＲｚ
になるように研磨処理して得たものを用意した。Example 2 First, as an oxide ceramic base material, 3 mo1% Y
A hole with a diameter of 5n was drilled in the center of a 26 x 26 x 4 flat plate of 2O11 partially stabilized zirconia (ZrO2: manufactured by Kyocera ■: z201), and the surface roughness was 0.1 μmRz.
I prepared the one obtained by polishing it so that it looks like this.
次に、このセラミックス基材に、実施例１と同様の真空
蒸着装置を用いて真空蒸着を行い、第３表に示す金属を
被覆した。これにより９本発明にかかる高温摺動部材を
得た（試料番号１６〜１９）。Next, this ceramic base material was coated with the metals shown in Table 3 by vacuum deposition using the same vacuum deposition apparatus as in Example 1. As a result, nine high-temperature sliding members according to the present invention were obtained (sample numbers 16 to 19).
尚、試料番号２０については、スパッタリング装置を用
い、導入ガスをアルゴン（Ａｒ）ガス、圧力を４Ｐａと
して膜厚に応じて１時間以上グロー放Ｎを汁ない、基材
表面にニッケルを被覆した。For sample No. 20, nickel was coated on the surface of the base material using a sputtering device, using argon (Ar) gas as the introduced gas and a pressure of 4 Pa, and leaving no glow N for 1 hour or more depending on the film thickness.
次に、得られた高温摺動部材を試料板Ａとし。Next, the obtained high-temperature sliding member was used as sample plate A.
上述のセラミックス基材と同質のジルコニア焼結体（京
セラ■製： Ｚ２０１：２６Ｘ２６Ｘ４ｎ、表面粗さが
０．１μｍＲｚ）の一方の面（摩擦面部）ヲ、直径２５
ｆｆ、厚みＩＨの円板が突出した形となるように加工し
、更に中央部シζ直径１１０３ｆＪの穴を空は試料板Ｂ
とした。また、試料番号１９については窒化珪素焼結体
（京セラ■＠ ： ５Ｎ２２０ ：上述の試料板Ｂと同
様の形状）を試料板Ｂとした。次に、スラスト・カラー
型の高温摩擦試験機の回転軸側の試験片台に試料板Ａを
、加圧軸側の試験片台に試料板Ｂを載置し、第２表に示
す試験条件により摩擦率耗試験を行った。得られた結果
を、第３表に示吋尚、摩耗量の測定方法は、実施例１と
同様であ、已また。試料番号１８については、試料板Ａ
の摩耗舊の断面プロフィールを触針式粗さ計により得た
。One surface (friction surface part) of a zirconia sintered body of the same quality as the above-mentioned ceramic base material (manufactured by Kyocera ■: Z201:26X26X4n, surface roughness 0.1 μmRz), diameter 25
ff, a disk with thickness IH is processed so that it has a protruding shape, and a hole with a diameter of ζ 1103fJ in the center is made from sample plate B.
And so. Further, for sample number 19, a silicon nitride sintered body (Kyocera ■@: 5N220: similar shape to the above-mentioned sample plate B) was used as sample plate B. Next, sample plate A was placed on the test piece stand on the rotating shaft side of a thrust collar type high temperature friction tester, and sample plate B was placed on the test piece stand on the pressurized shaft side, and the test conditions shown in Table 2 were set. A friction rate wear test was conducted. The obtained results are shown in Table 3. The method for measuring the amount of wear was the same as in Example 1. For sample number 18, sample plate A
The cross-sectional profile of the wear hole was obtained using a stylus roughness meter.
その結果を、第４図に示す。図中、４は試料板Ａの最表
面を、１４は試料板Ａの摩耗痕の表面をそれぞれ示す。The results are shown in FIG. In the figure, 4 indicates the outermost surface of the sample plate A, and 14 indicates the surface of the abrasion marks on the sample plate A, respectively.
比較のために、試料板Ａとして金属膜のないジルコニア
焼結体（上述のセラミックス基材と同様のもの）を用い
た（試料番号Ｃ５〜Ｃ７）ほかは上述と同様の構成によ
り比較試験を行った。得られた結果を、第３表に併せて
示す。また、試料番号Ｃ７については、試料板Ａの摩耗
痕の断面プロフィール全触針式粗さ計により得た。その
結果を。For comparison, a comparative test was conducted with the same configuration as above except that a zirconia sintered body (same as the above-mentioned ceramic base material) without a metal film was used as sample plate A (sample numbers C5 to C7). Ta. The obtained results are also shown in Table 3. Regarding sample number C7, the cross-sectional profile of the wear marks on sample plate A was obtained using a full stylus roughness meter. The result.
第５図に示す。図中、５は試料板Ａの最表面を。It is shown in FIG. In the figure, 5 is the outermost surface of sample plate A.
１５は試料板Ａの摩耗痕の表面をそれぞれ示す。15 shows the surface of the wear marks on the sample plate A, respectively.
以上の結果より明らかの如く２本発明にかかる高濡摺動
部材企用いた場合には、高温雰囲気下で耐摩耗性に優れ
ていることが分る。As is clear from the above results, when the highly wetted sliding member according to the present invention is used, it is found that the wear resistance is excellent in a high temperature atmosphere.
図は２本発明の実施例１または実施例２における摩擦摩
耗試験後の試料Ａの摩耗痕の断面プロフィールを示す線
図で、第１図ないし第５図はそれぞれ試料番号１，７．
Ｃ２，１８，Ｃ７の線図である。2 is a diagram showing the cross-sectional profile of the wear scar of sample A after the friction and wear test in Example 1 or Example 2 of the present invention, and FIGS. 1 to 5 are diagrams showing sample numbers 1 and 7, respectively.
It is a diagram of C2, 18, and C7.
Claims (5)
にクロム、マンガン、鉄、コバルト、ニッケル、銅、銀
の一種またはその合金を物理蒸着して得られた金属膜と
、該金属膜の表面に形成した摺動部とからなる高温摺動
部材であって、５００℃以上の高温雰囲気下で相手材と
してのセラミックス部材を前記摺動部面上を摺動させる
ことによりセラミックス部材および基材の摩耗を防止し
たことを特徴とする高温摺動部材。(1) A base material made of oxide ceramics, a metal film obtained by physically vapor depositing one of chromium, manganese, iron, cobalt, nickel, copper, and silver or an alloy thereof on the surface of the base material, and the metal film. A high-temperature sliding member consisting of a sliding part formed on the surface of a ceramic member and a substrate by sliding a ceramic member as a mating member on the surface of the sliding part in a high-temperature atmosphere of 500°C or higher. A high-temperature sliding member characterized by preventing material wear.
を特徴とする特許請求の範囲第（１）項記載の高温摺動
部材。(2) The high-temperature sliding member according to claim (1), wherein the metal film has a thickness of 0.1 μm to 5 μm.
とする特許請求の範囲第（１）項記載の高温摺動部材。(3) A high-temperature sliding member according to claim (1), characterized in that an oxide layer is formed on the sliding portion of the metal film.
たはジルコニアセラミックスであることを特徴とする特
許請求の範囲第（１）項記載の高温摺動部材。(4) The high-temperature sliding member according to claim (1), wherein the oxide ceramic is an alumina ceramic or a zirconia ceramic.
で摺動させる方法において、少なくとも一方の部材を酸
化物セラミックスからなるセラミックス基材表面にクロ
ム、マンガン、鉄、コバルト、ニッケル、銅、銀の一種
またはその合金よりなる金属膜を物理蒸着により被覆し
てその表面に摺動部を形成し、該摺動部を加熱すること
により前記摺動部に酸化物層を形成させ、５００℃以上
の高温雰囲気下で相手材としてのセラミックス部材を前
記摺動部の酸化物層上を摺動させ、セラミックス部材と
金属膜の摺動部との摩擦面馴染みを促進することにより
、セラミックス部材および基材の摩耗を防止したことを
特徴とする高温摺動部材の摺動方法。(5) In a method of sliding a sliding member made of a pair of ceramic members at high temperature, at least one member is coated with chromium, manganese, iron, cobalt, nickel, copper, or silver on the surface of a ceramic base material made of oxide ceramic. A metal film made of one kind or an alloy thereof is coated by physical vapor deposition to form a sliding part on the surface, and the sliding part is heated to form an oxide layer on the sliding part, and then heated to a temperature of 500°C or higher. The ceramic member and base material are made to slide on the oxide layer of the sliding part in a high-temperature atmosphere to promote frictional surface familiarization between the ceramic member and the sliding part of the metal film. A method for sliding a high-temperature sliding member, characterized by preventing wear of the member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24857786A JPS63103884A (en) | 1986-10-20 | 1986-10-20 | High temperature sliding member and sliding method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24857786A JPS63103884A (en) | 1986-10-20 | 1986-10-20 | High temperature sliding member and sliding method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63103884A true JPS63103884A (en) | 1988-05-09 |
| JPH0587476B2 JPH0587476B2 (en) | 1993-12-16 |
Family
ID=17180198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24857786A Granted JPS63103884A (en) | 1986-10-20 | 1986-10-20 | High temperature sliding member and sliding method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63103884A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0234590A (en) * | 1988-07-26 | 1990-02-05 | Yoshino Hard:Kk | Sealing member and sealing mechanism |
| JP2007127192A (en) * | 2005-11-04 | 2007-05-24 | Toyota Motor Corp | Spline |
| GB2458960A (en) * | 2008-04-04 | 2009-10-07 | Ricardo Uk Ltd | Sliding bearing |
-
1986
- 1986-10-20 JP JP24857786A patent/JPS63103884A/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0234590A (en) * | 1988-07-26 | 1990-02-05 | Yoshino Hard:Kk | Sealing member and sealing mechanism |
| JP2007127192A (en) * | 2005-11-04 | 2007-05-24 | Toyota Motor Corp | Spline |
| GB2458960A (en) * | 2008-04-04 | 2009-10-07 | Ricardo Uk Ltd | Sliding bearing |
| GB2458804A (en) * | 2008-04-04 | 2009-10-07 | Ricardo Uk Ltd | Bearing surfaces capable of forming wear resistant oxide film |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0587476B2 (en) | 1993-12-16 |
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