JPS63103736U - - Google Patents

Info

Publication number
JPS63103736U
JPS63103736U JP19690886U JP19690886U JPS63103736U JP S63103736 U JPS63103736 U JP S63103736U JP 19690886 U JP19690886 U JP 19690886U JP 19690886 U JP19690886 U JP 19690886U JP S63103736 U JPS63103736 U JP S63103736U
Authority
JP
Japan
Prior art keywords
saturation tank
dew point
gas generator
liquid
saturated gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19690886U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19690886U priority Critical patent/JPS63103736U/ja
Publication of JPS63103736U publication Critical patent/JPS63103736U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Description

【図面の簡単な説明】
第1図A図は本考案の一実施例の側面図、第1
B図は第1A図のA―A断面図、第1C図は第1
A図の一部拡大図、第2A図は本考案の別の実施
例の側面図、第2B図は第2A図のB―B断面図
、第3A図は従来の定露点飽和気体発生装置の飽
和槽の側面図、第3B図は第3A図のC―C断面
図。 1……飽和槽、2……供給口、3……液面、4
……排出口、5……格子状の板、6……微小な縦
孔、7,8……引き上げられた液面または氷面、
9……金網。

Claims (1)

  1. 【実用新案登録請求の範囲】 液面もしくは氷面に接しながら気体が流れるよ
    うに構成される定露点飽和気体発生装置の飽和槽
    において、 毛細管現象により液体を引き上げる物体が、前
    記飽和槽中に設けられていることを特徴とする定
    露点飽和気体発生装置の飽和槽。
JP19690886U 1986-12-22 1986-12-22 Pending JPS63103736U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19690886U JPS63103736U (ja) 1986-12-22 1986-12-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19690886U JPS63103736U (ja) 1986-12-22 1986-12-22

Publications (1)

Publication Number Publication Date
JPS63103736U true JPS63103736U (ja) 1988-07-05

Family

ID=31156144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19690886U Pending JPS63103736U (ja) 1986-12-22 1986-12-22

Country Status (1)

Country Link
JP (1) JPS63103736U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012160566A (ja) * 2011-01-31 2012-08-23 Tokyo Electron Ltd 気化装置及び成膜装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5929679B2 (ja) * 1976-11-04 1984-07-21 凸版印刷株式会社 金属板への部分着色法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5929679B2 (ja) * 1976-11-04 1984-07-21 凸版印刷株式会社 金属板への部分着色法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012160566A (ja) * 2011-01-31 2012-08-23 Tokyo Electron Ltd 気化装置及び成膜装置

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