JPS63102238U - - Google Patents
Info
- Publication number
- JPS63102238U JPS63102238U JP19747486U JP19747486U JPS63102238U JP S63102238 U JPS63102238 U JP S63102238U JP 19747486 U JP19747486 U JP 19747486U JP 19747486 U JP19747486 U JP 19747486U JP S63102238 U JPS63102238 U JP S63102238U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- chuck
- resist
- resist coater
- semiconductor wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19747486U JPS63102238U (tr) | 1986-12-24 | 1986-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19747486U JPS63102238U (tr) | 1986-12-24 | 1986-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63102238U true JPS63102238U (tr) | 1988-07-02 |
Family
ID=31157246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19747486U Pending JPS63102238U (tr) | 1986-12-24 | 1986-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63102238U (tr) |
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1986
- 1986-12-24 JP JP19747486U patent/JPS63102238U/ja active Pending