JPH0291337U - - Google Patents
Info
- Publication number
- JPH0291337U JPH0291337U JP25089U JP25089U JPH0291337U JP H0291337 U JPH0291337 U JP H0291337U JP 25089 U JP25089 U JP 25089U JP 25089 U JP25089 U JP 25089U JP H0291337 U JPH0291337 U JP H0291337U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- belt
- vapor phase
- phase growth
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 238000001947 vapour-phase growth Methods 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25089U JPH0291337U (tr) | 1989-01-04 | 1989-01-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25089U JPH0291337U (tr) | 1989-01-04 | 1989-01-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0291337U true JPH0291337U (tr) | 1990-07-19 |
Family
ID=31199110
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25089U Pending JPH0291337U (tr) | 1989-01-04 | 1989-01-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0291337U (tr) |
-
1989
- 1989-01-04 JP JP25089U patent/JPH0291337U/ja active Pending