JPS63102232U - - Google Patents
Info
- Publication number
- JPS63102232U JPS63102232U JP20267586U JP20267586U JPS63102232U JP S63102232 U JPS63102232 U JP S63102232U JP 20267586 U JP20267586 U JP 20267586U JP 20267586 U JP20267586 U JP 20267586U JP S63102232 U JPS63102232 U JP S63102232U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- heating
- etching apparatus
- etching liquid
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
Landscapes
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20267586U JPS63102232U (ro) | 1986-12-23 | 1986-12-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20267586U JPS63102232U (ro) | 1986-12-23 | 1986-12-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63102232U true JPS63102232U (ro) | 1988-07-02 |
Family
ID=31167284
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20267586U Pending JPS63102232U (ro) | 1986-12-23 | 1986-12-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63102232U (ro) |
-
1986
- 1986-12-23 JP JP20267586U patent/JPS63102232U/ja active Pending