JPS63102029U - - Google Patents
Info
- Publication number
- JPS63102029U JPS63102029U JP19641386U JP19641386U JPS63102029U JP S63102029 U JPS63102029 U JP S63102029U JP 19641386 U JP19641386 U JP 19641386U JP 19641386 U JP19641386 U JP 19641386U JP S63102029 U JPS63102029 U JP S63102029U
- Authority
- JP
- Japan
- Prior art keywords
- beams
- laser
- deflection surface
- laser beams
- passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000000926 separation method Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Optical Head (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19641386U JPS63102029U (enExample) | 1986-12-19 | 1986-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19641386U JPS63102029U (enExample) | 1986-12-19 | 1986-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63102029U true JPS63102029U (enExample) | 1988-07-02 |
Family
ID=31155212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19641386U Pending JPS63102029U (enExample) | 1986-12-19 | 1986-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63102029U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS502950A (enExample) * | 1973-05-08 | 1975-01-13 |
-
1986
- 1986-12-19 JP JP19641386U patent/JPS63102029U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS502950A (enExample) * | 1973-05-08 | 1975-01-13 |
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