JPS63101901A - Feedback controller - Google Patents
Feedback controllerInfo
- Publication number
- JPS63101901A JPS63101901A JP24700586A JP24700586A JPS63101901A JP S63101901 A JPS63101901 A JP S63101901A JP 24700586 A JP24700586 A JP 24700586A JP 24700586 A JP24700586 A JP 24700586A JP S63101901 A JPS63101901 A JP S63101901A
- Authority
- JP
- Japan
- Prior art keywords
- proportional
- control
- integral
- controller
- derivative
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 claims description 7
- 238000013016 damping Methods 0.000 abstract description 7
- 230000004043 responsiveness Effects 0.000 abstract 3
- 230000002542 deteriorative effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 230000004044 response Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 235000002020 sage Nutrition 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 230000001010 compromised effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
Landscapes
- Feedback Control In General (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はロゲット、工作機械等す−♂機構を有するフィ
ードバック制御装置の改良に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an improvement of a feedback control device having a straight-back mechanism such as a logget, a machine tool, etc.
従来この種フィードバック制御装置とし℃、制御対象の
状態に応じて比例制御器(以下Pと称す)、積分制御器
(以下Iと称す)、微分制御器(以下りと称す)を独立
に制御していた。Conventionally, this type of feedback control device independently controls a proportional controller (hereinafter referred to as P), an integral controller (hereinafter referred to as I), and a differential controller (hereinafter referred to as RI) depending on the temperature and the state of the controlled object. was.
上記PIDは、比例制御によって連応性が増す反面、減
衰性が悪くなり、また微分制御により”(減衰性が増す
反面、連応性が悪くなり、さらに積分制御によって定常
特性が改善される反面、オーパージ、−トが生じていた
。そのためHぢ制御器の3つの制御器を調整することで
相反する条件を妥協させた特性の制御器とし℃いた。In the PID mentioned above, proportional control increases the coupling but deteriorates the damping property, and differential control increases the damping property but worsens the coupling, and integral control improves the steady-state characteristics, but the opacity Therefore, by adjusting the three controllers of the H controller, a controller with characteristics that compromised the conflicting conditions was created.
そこで、本発明は、連応性、減衰性、定常特性の条件を
同時に満たすフィードバック制御装置を提供することを
目的とする。Therefore, an object of the present invention is to provide a feedback control device that simultaneously satisfies the conditions of coordination, damping performance, and steady-state characteristics.
本発明は上記目的を達成するために、次のように構成し
たものである。すなわち、制御対象の状態を検出する状
態検出器と、この状態検出器の検出値を目標値にフィー
ドバック制御するサーが機構と、このサー?機構の目標
値と制御対象の間に設けられた比例制御器P、積分制御
器!、微分制御器りと、上記制御対象の状態に応じ℃上
記各制御器および各制御器の組合せのいずれかを切り換
え選択する手段とから構成したものである。In order to achieve the above object, the present invention is constructed as follows. In other words, there is a state detector that detects the state of the controlled object, a mechanism that feeds back the detected value of this state detector to a target value, and this sensor? Proportional controller P and integral controller installed between the target value of the mechanism and the controlled object! , a differential controller, and means for switching and selecting one of the above-mentioned controllers and combinations of the controllers according to the state of the controlled object.
上記のように構成することにより、制御対象の状態に応
じ℃各制御器が切り換え選択されるので、連応性、減衰
性、定常特性を同時に満たすことができる。By configuring as described above, each of the °C controllers is switched and selected depending on the state of the controlled object, so that coordination, damping performance, and steady-state characteristics can be satisfied at the same time.
以下、本発明の一実施例につい1図面を参照して説明す
る。はじめに第1のブロック図により構成を説明する。Hereinafter, one embodiment of the present invention will be described with reference to one drawing. First, the configuration will be explained using a first block diagram.
lは制御対象、例えば工作機械、2は検出器、3は目標
値計算部、4は制御装置である。この制御装置4は比例
フィード/々ツクダイン(Kp)6、積分器7、積分フ
ィード/々ツクrイン(Kx)8、微分フィードバック
ダイン(KD19、スイッチ10.11および制御切換
指令部12とからなり℃いる。5は増幅器〜、である。1 is a controlled object, for example, a machine tool; 2 is a detector; 3 is a target value calculation section; and 4 is a control device. This control device 4 consists of a proportional feed/input (Kp) 6, an integrator 7, an integral feed/input (Kx) 8, a differential feedback inn (KD 19, a switch 10, 11, and a control switching command unit 12). ℃. 5 is an amplifier ~.
このような構成のものにおい℃、制御対象1より検出器
2によって制御対象1の状態の位置Xと速度量が検出さ
れる。この位置X、速度iと目標値計算部3で計算され
た位−置の目標値X、が制御装置4に入り、この制御装
置4の出力が増幅器5で増幅され、制御対象10制御人
力Uとなる。In such a configuration, the position X and velocity of the controlled object 1 are detected by the detector 2 from the controlled object 1. The position X, the speed i, and the position target value becomes.
そして、位置X、速度量および位置の目標値X、が制御
装置4に入力されるが、ここでスイッチ10.11が開
い℃いる時すなわち位置誤差X、1−Xが大きい時は、
比例制御のみとなって、位置誤差xd−xが比例フィー
ドバックダインQC,26をへて制御装置4の出力とな
り、連応性が向上する。また、スイッチ10が閉じてい
る時すなわち位置誤差X6− )Cが残ったtま速度の
誤差が小さくなるいわゆる定常誤差が残る時は、位置誤
差16 Xが積分器1で積分され積分フィードバック
ゲイン(K!28をへたものが制御装置4の出力に加わ
り、定常特性が改善される。同様に、スイッチ11が閉
じている時すなわち位置誤差X6− )Cが小さい時は
、速度i(位置の微分)が微分フィードバックダイン(
KD)9をへたものが制御装置4の出力に加わり、減衰
性が向上する。Then, the position X, velocity amount, and position target value X are input to the control device 4, but when the switch 10.11 is open, that is, when the position error X, 1-X is large,
With only proportional control, the position error xd-x passes through the proportional feedback dynes QC, 26 and becomes the output of the control device 4, improving coordination. Furthermore, when the switch 10 is closed, that is, the position error X6-)C remains, and when a so-called steady error remains, in which the speed error becomes small, the position error 16X is integrated by the integrator 1 and the integral feedback gain ( K!28 is added to the output of the control device 4, improving the steady-state characteristics.Similarly, when the switch 11 is closed, that is, when the position error differential) is the differential feedback dyne (
KD) 9 is added to the output of the control device 4, improving damping performance.
そし曵、上記スイッチ10.11の開閉は制御対象1の
状態の誤差 Xとiにより制御切換指合部12によっ
て決まる。スイッチ10はlit≧11のとき開き、「
1く・lのとき閉じる。またスイッチ11はI 14−
x I≧・富のと1!開11!d−XI<ISのとき
閉じる。The opening/closing of the switches 10 and 11 is determined by the control switching coupling section 12 based on the errors X and i in the state of the controlled object 1. The switch 10 opens when lit≧11, and “
Closes when 1ku・l. Moreover, the switch 11 is I14-
x I≧・Wealth 1! Open 11! Close when d-XI<IS.
なお、第1図O?(yA、、、eKP、に!、KD、a
t te!の値は制御対象1と希望する応答特性により
設定する。In addition, Figure 1 O? (yA,,,eKP,ni!,KD,a
Tte! The value of is set depending on the controlled object 1 and the desired response characteristics.
以上述べたことから、第2図の位相面上での制御の切換
え領域の設定を示す図のように領域13では比例微分制
御、領域14では比例積分制御、領域15では比例積分
微分制御、それ以外では比例制御のみが行なわれる。こ
れにより目標値が一定で第3図の16の様に従来では振
動しないと連応性が出せないような場合でも、本発明の
実施例によれば、比例微分制御領域13に入り、第3図
の11の様に連応性をおとさずに振動を抑制できる。From the above, as shown in the diagram in Figure 2, which shows the setting of control switching regions on the phase plane, in region 13, proportional differential control, in region 14, proportional integral control, and in region 15, proportional integral differential control. Otherwise, only proportional control is performed. As a result, even in a case where the target value is constant and correspondence cannot be achieved conventionally without vibration, as shown in 16 in FIG. 3, according to the embodiment of the present invention, the proportional differential control region 13 is entered, as shown in As in No. 11, vibration can be suppressed without compromising connectivity.
また定常誤差が残る制御対象1は14のP!制御領域に
入り、積分制御により定常誤差はなくなり、さらに積分
器7によるオーパージ、−トは比例ff分微分領域に入
ることにより解決される。Moreover, the controlled object 1 with a steady error remains is 14 P! Entering the control region, steady-state errors are eliminated by integral control, and the overage and -t caused by the integrator 7 are resolved by entering the proportional ff differential region.
以上述べた本発明によれば、制御対象の状態を検出する
状態検出器と、この状態検出器の検出値を目標値にフィ
ードバック制御するサーゲ機構と、このサーが機構の目
標値と制御対象の間に設けられた比例制御器P、積分制
御器工、微分制御器りと、上記制御対象の状態に応じ℃
上記各制御器および各制御器の組合せのいずれかを切り
換え選択する手段とから構成したので、連応性、減衰性
、定常特性の条件を同時に満たすフィードバック制御装
置を提供できる。According to the present invention described above, there is a state detector that detects the state of a controlled object, a sage mechanism that performs feedback control of the detected value of this state detector to a target value, and a sage mechanism that controls the target value of the mechanism and the controlled object. The proportional controller P, the integral controller, and the differential controller installed in between allow the temperature to change depending on the state of the control object mentioned above.
Since the feedback control device is comprised of the above-mentioned controllers and means for switching and selecting one of the combinations of controllers, it is possible to provide a feedback control device that simultaneously satisfies the conditions of coordination, damping performance, and steady-state characteristics.
第1図は本発明によるフィードバック制御装置の一実施
例を示すブロック図、第2図は第1図の位相面上での制
御の切換え領域の設定を示す図、第3図は従来装置と本
発明装置スラッグ応答の比較図である。
1・・・制御対象、2・・・検出器、3・・・目標値計
算部、4・・・制御装置、5・・・増幅器Am2.6・
・・比例フイートハックrインに、、7・・・積分器、
8・・・積分フィードバックディンに1.9・・・微分
フィードバックゲインKD、10.11・・・スイッチ
、12・・・制御切換指令部、13・・・比例微分制御
領域、14・・・比例積分制御領域、15・・・比例積
分微分制御領域、16・・・本発明を用いない場合のス
ラッグ応答の例、17・・・本発明を用いた場合のスラ
ッグ応答の例である。FIG. 1 is a block diagram showing an embodiment of the feedback control device according to the present invention, FIG. 2 is a diagram showing the setting of the control switching region on the phase plane of FIG. 1, and FIG. 3 shows the conventional device and the present invention. FIG. 3 is a comparison diagram of inventive device slug responses. DESCRIPTION OF SYMBOLS 1... Controlled object, 2... Detector, 3... Target value calculation part, 4... Control device, 5... Amplifier Am2.6.
...proportional foot hack r in, 7...integrator,
8...Integral feedback gain 1.9...Differential feedback gain KD, 10.11...Switch, 12...Control switching command section, 13...Proportional differential control area, 14...Proportional Integral control region, 15...Proportional-integral-derivative control region, 16...Example of slug response when the present invention is not used, 17...Example of slug response when the present invention is used.
Claims (1)
器の検出値を目標値にフィードバック制御するサーボ機
構と、このサーボ機構の目標値と制御対象の間に設けら
れた比例制御器(P)、積分制御器(I)、微分制御器
(D)と、上記制御対象の状態に応じて上記各制御器お
よび各制御器の組合せのいずれかを切り換え選択する手
段とからなるフィードバック制御装置。A state detector that detects the state of the controlled object, a servo mechanism that feedback-controls the detected value of this state detector to a target value, and a proportional controller (P ), an integral controller (I), a differential controller (D), and means for switching and selecting one of the controllers and combinations of the controllers according to the state of the controlled object.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24700586A JPS63101901A (en) | 1986-10-17 | 1986-10-17 | Feedback controller |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24700586A JPS63101901A (en) | 1986-10-17 | 1986-10-17 | Feedback controller |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63101901A true JPS63101901A (en) | 1988-05-06 |
Family
ID=17156965
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24700586A Pending JPS63101901A (en) | 1986-10-17 | 1986-10-17 | Feedback controller |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63101901A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02300901A (en) * | 1989-05-16 | 1990-12-13 | Kensetsusho Kenchiku Kenkyu Shocho | Continuously force exerting device |
JPH0635504A (en) * | 1992-02-03 | 1994-02-10 | Osaka Cement Co Ltd | Feedback control system |
EP1667000A1 (en) * | 2004-12-02 | 2006-06-07 | Mitutoyo Corporation | Control device |
US7085611B2 (en) | 2002-10-23 | 2006-08-01 | Samsung Electronics Co., Ltd. | Control method of PI controller |
JP2020049568A (en) * | 2018-09-25 | 2020-04-02 | 東京エレクトロン株式会社 | Carrying device, semiconductor manufacturing device and carrying method |
-
1986
- 1986-10-17 JP JP24700586A patent/JPS63101901A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02300901A (en) * | 1989-05-16 | 1990-12-13 | Kensetsusho Kenchiku Kenkyu Shocho | Continuously force exerting device |
JPH0635504A (en) * | 1992-02-03 | 1994-02-10 | Osaka Cement Co Ltd | Feedback control system |
US7085611B2 (en) | 2002-10-23 | 2006-08-01 | Samsung Electronics Co., Ltd. | Control method of PI controller |
EP1667000A1 (en) * | 2004-12-02 | 2006-06-07 | Mitutoyo Corporation | Control device |
US7471056B2 (en) | 2004-12-02 | 2008-12-30 | Mitutoyo Corporation | Control device |
JP2020049568A (en) * | 2018-09-25 | 2020-04-02 | 東京エレクトロン株式会社 | Carrying device, semiconductor manufacturing device and carrying method |
US11850743B2 (en) | 2018-09-25 | 2023-12-26 | Tokyo Electron Limited | Transport apparatus, semiconductor manufacturing apparatus, and transport method |
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