JPS63100829U - - Google Patents
Info
- Publication number
- JPS63100829U JPS63100829U JP19565486U JP19565486U JPS63100829U JP S63100829 U JPS63100829 U JP S63100829U JP 19565486 U JP19565486 U JP 19565486U JP 19565486 U JP19565486 U JP 19565486U JP S63100829 U JPS63100829 U JP S63100829U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- section
- liquid
- processing
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 10
- 238000001035 drying Methods 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims 3
- 239000007921 spray Substances 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19565486U JPS63100829U (es) | 1986-12-19 | 1986-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19565486U JPS63100829U (es) | 1986-12-19 | 1986-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63100829U true JPS63100829U (es) | 1988-06-30 |
Family
ID=31153736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19565486U Pending JPS63100829U (es) | 1986-12-19 | 1986-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63100829U (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003068694A (ja) * | 2001-08-28 | 2003-03-07 | Fujikoshi Mach Corp | ウェーハの洗浄装置及びウェーハの接着装置 |
-
1986
- 1986-12-19 JP JP19565486U patent/JPS63100829U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003068694A (ja) * | 2001-08-28 | 2003-03-07 | Fujikoshi Mach Corp | ウェーハの洗浄装置及びウェーハの接着装置 |
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