JPS63100829U - - Google Patents

Info

Publication number
JPS63100829U
JPS63100829U JP19565486U JP19565486U JPS63100829U JP S63100829 U JPS63100829 U JP S63100829U JP 19565486 U JP19565486 U JP 19565486U JP 19565486 U JP19565486 U JP 19565486U JP S63100829 U JPS63100829 U JP S63100829U
Authority
JP
Japan
Prior art keywords
sample
section
liquid
processing
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19565486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19565486U priority Critical patent/JPS63100829U/ja
Publication of JPS63100829U publication Critical patent/JPS63100829U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP19565486U 1986-12-19 1986-12-19 Pending JPS63100829U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19565486U JPS63100829U (enExample) 1986-12-19 1986-12-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19565486U JPS63100829U (enExample) 1986-12-19 1986-12-19

Publications (1)

Publication Number Publication Date
JPS63100829U true JPS63100829U (enExample) 1988-06-30

Family

ID=31153736

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19565486U Pending JPS63100829U (enExample) 1986-12-19 1986-12-19

Country Status (1)

Country Link
JP (1) JPS63100829U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003068694A (ja) * 2001-08-28 2003-03-07 Fujikoshi Mach Corp ウェーハの洗浄装置及びウェーハの接着装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003068694A (ja) * 2001-08-28 2003-03-07 Fujikoshi Mach Corp ウェーハの洗浄装置及びウェーハの接着装置

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