JPS63100828U - - Google Patents
Info
- Publication number
- JPS63100828U JPS63100828U JP19461886U JP19461886U JPS63100828U JP S63100828 U JPS63100828 U JP S63100828U JP 19461886 U JP19461886 U JP 19461886U JP 19461886 U JP19461886 U JP 19461886U JP S63100828 U JPS63100828 U JP S63100828U
- Authority
- JP
- Japan
- Prior art keywords
- chemical solution
- tank
- nozzle
- processing tank
- processing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19461886U JPS63100828U (fr) | 1986-12-19 | 1986-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19461886U JPS63100828U (fr) | 1986-12-19 | 1986-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63100828U true JPS63100828U (fr) | 1988-06-30 |
Family
ID=31151756
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19461886U Pending JPS63100828U (fr) | 1986-12-19 | 1986-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63100828U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02139400A (ja) * | 1988-11-17 | 1990-05-29 | Nec Kyushu Ltd | 定量薬液供給装置 |
-
1986
- 1986-12-19 JP JP19461886U patent/JPS63100828U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02139400A (ja) * | 1988-11-17 | 1990-05-29 | Nec Kyushu Ltd | 定量薬液供給装置 |