JPS63100828U - - Google Patents
Info
- Publication number
- JPS63100828U JPS63100828U JP19461886U JP19461886U JPS63100828U JP S63100828 U JPS63100828 U JP S63100828U JP 19461886 U JP19461886 U JP 19461886U JP 19461886 U JP19461886 U JP 19461886U JP S63100828 U JPS63100828 U JP S63100828U
- Authority
- JP
- Japan
- Prior art keywords
- chemical solution
- tank
- nozzle
- processing tank
- processing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第1図はこの考案のウエツト処理装置の一実施
例を示す斜視図、第2図は従来のウエツト処理装
置を示す斜視図である。
11……薬液タンク、13……供給パイプ、1
4……供給ポンプ、15……案内パイプ、16…
…ノズル、17……処理槽、18……小穴。
FIG. 1 is a perspective view showing an embodiment of the wet treatment apparatus of this invention, and FIG. 2 is a perspective view showing a conventional wet treatment apparatus. 11... Chemical tank, 13... Supply pipe, 1
4... Supply pump, 15... Guide pipe, 16...
... Nozzle, 17... Processing tank, 18... Small hole.
Claims (1)
より処理槽に自動供給するようにしたウエツト処
理装置において、 ノズルは、処理槽の縁を越えて槽の底部近傍に
開口しており、かつ処理槽薬液上限レベルより上
の位置に小穴を有することを特徴とするウエツト
処理装置。[Scope of Claim for Utility Model Registration] In a wet processing device that automatically supplies a chemical solution under pressure from a chemical solution automatic supply device to a processing tank from a nozzle, the nozzle has an opening extending beyond the edge of the processing tank near the bottom of the tank. What is claimed is: 1. A wet processing device characterized by having a small hole at a position above the upper limit level of a chemical solution in a processing tank.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19461886U JPS63100828U (en) | 1986-12-19 | 1986-12-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19461886U JPS63100828U (en) | 1986-12-19 | 1986-12-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63100828U true JPS63100828U (en) | 1988-06-30 |
Family
ID=31151756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19461886U Pending JPS63100828U (en) | 1986-12-19 | 1986-12-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63100828U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02139400A (en) * | 1988-11-17 | 1990-05-29 | Nec Kyushu Ltd | Quantitatively feeding apparatus of chemicals |
-
1986
- 1986-12-19 JP JP19461886U patent/JPS63100828U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02139400A (en) * | 1988-11-17 | 1990-05-29 | Nec Kyushu Ltd | Quantitatively feeding apparatus of chemicals |