JPS63100692U - - Google Patents

Info

Publication number
JPS63100692U
JPS63100692U JP19576686U JP19576686U JPS63100692U JP S63100692 U JPS63100692 U JP S63100692U JP 19576686 U JP19576686 U JP 19576686U JP 19576686 U JP19576686 U JP 19576686U JP S63100692 U JPS63100692 U JP S63100692U
Authority
JP
Japan
Prior art keywords
exhaust hole
drive unit
unit housing
housing
molecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19576686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19576686U priority Critical patent/JPS63100692U/ja
Publication of JPS63100692U publication Critical patent/JPS63100692U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP19576686U 1986-12-18 1986-12-18 Pending JPS63100692U (pt)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19576686U JPS63100692U (pt) 1986-12-18 1986-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19576686U JPS63100692U (pt) 1986-12-18 1986-12-18

Publications (1)

Publication Number Publication Date
JPS63100692U true JPS63100692U (pt) 1988-06-30

Family

ID=31153957

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19576686U Pending JPS63100692U (pt) 1986-12-18 1986-12-18

Country Status (1)

Country Link
JP (1) JPS63100692U (pt)

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