JPS63100692U - - Google Patents
Info
- Publication number
- JPS63100692U JPS63100692U JP19576686U JP19576686U JPS63100692U JP S63100692 U JPS63100692 U JP S63100692U JP 19576686 U JP19576686 U JP 19576686U JP 19576686 U JP19576686 U JP 19576686U JP S63100692 U JPS63100692 U JP S63100692U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust hole
- drive unit
- unit housing
- housing
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19576686U JPS63100692U (fr) | 1986-12-18 | 1986-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19576686U JPS63100692U (fr) | 1986-12-18 | 1986-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63100692U true JPS63100692U (fr) | 1988-06-30 |
Family
ID=31153957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19576686U Pending JPS63100692U (fr) | 1986-12-18 | 1986-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63100692U (fr) |
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1986
- 1986-12-18 JP JP19576686U patent/JPS63100692U/ja active Pending