JPS6310057U - - Google Patents

Info

Publication number
JPS6310057U
JPS6310057U JP1986103927U JP10392786U JPS6310057U JP S6310057 U JPS6310057 U JP S6310057U JP 1986103927 U JP1986103927 U JP 1986103927U JP 10392786 U JP10392786 U JP 10392786U JP S6310057 U JPS6310057 U JP S6310057U
Authority
JP
Japan
Prior art keywords
polishing jig
semiconductor wafers
template
mat
workpieces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986103927U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0453896Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986103927U priority Critical patent/JPH0453896Y2/ja
Publication of JPS6310057U publication Critical patent/JPS6310057U/ja
Application granted granted Critical
Publication of JPH0453896Y2 publication Critical patent/JPH0453896Y2/ja
Expired legal-status Critical Current

Links

JP1986103927U 1986-07-07 1986-07-07 Expired JPH0453896Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986103927U JPH0453896Y2 (enrdf_load_stackoverflow) 1986-07-07 1986-07-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986103927U JPH0453896Y2 (enrdf_load_stackoverflow) 1986-07-07 1986-07-07

Publications (2)

Publication Number Publication Date
JPS6310057U true JPS6310057U (enrdf_load_stackoverflow) 1988-01-22
JPH0453896Y2 JPH0453896Y2 (enrdf_load_stackoverflow) 1992-12-17

Family

ID=30976940

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986103927U Expired JPH0453896Y2 (enrdf_load_stackoverflow) 1986-07-07 1986-07-07

Country Status (1)

Country Link
JP (1) JPH0453896Y2 (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0413568A (ja) * 1990-04-27 1992-01-17 Shin Etsu Handotai Co Ltd バッキングパッド、その精密平面加工方法およびそれを用いた半導体ウェーハの研磨方法
JPH0650751U (ja) * 1992-12-10 1994-07-12 ロデール・ニッタ株式会社 被研磨物保持具
JP2003179015A (ja) * 1998-06-03 2003-06-27 Applied Materials Inc 化学的機械的研磨用の多層の止め輪を有するキャリア・ヘッド
JP2006255827A (ja) * 2005-03-17 2006-09-28 Fujibo Holdings Inc 保持具
JP2007069295A (ja) * 2005-09-06 2007-03-22 Nitta Haas Inc 被研磨物保持具
JP2008030175A (ja) * 2006-07-31 2008-02-14 Setsuko Kondo ロアチャックパッド
WO2019058871A1 (ja) * 2017-09-22 2019-03-28 信越半導体株式会社 研磨ヘッド及び研磨ヘッドの製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59219153A (ja) * 1983-05-27 1984-12-10 Citizen Watch Co Ltd 磁気ヘツドの精密研磨加工法
JPS60249568A (ja) * 1984-05-21 1985-12-10 Sumitomo Electric Ind Ltd 半導体ウエハの研磨方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59219153A (ja) * 1983-05-27 1984-12-10 Citizen Watch Co Ltd 磁気ヘツドの精密研磨加工法
JPS60249568A (ja) * 1984-05-21 1985-12-10 Sumitomo Electric Ind Ltd 半導体ウエハの研磨方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0413568A (ja) * 1990-04-27 1992-01-17 Shin Etsu Handotai Co Ltd バッキングパッド、その精密平面加工方法およびそれを用いた半導体ウェーハの研磨方法
JPH0650751U (ja) * 1992-12-10 1994-07-12 ロデール・ニッタ株式会社 被研磨物保持具
JP2003179015A (ja) * 1998-06-03 2003-06-27 Applied Materials Inc 化学的機械的研磨用の多層の止め輪を有するキャリア・ヘッド
JP2006255827A (ja) * 2005-03-17 2006-09-28 Fujibo Holdings Inc 保持具
JP2007069295A (ja) * 2005-09-06 2007-03-22 Nitta Haas Inc 被研磨物保持具
JP2008030175A (ja) * 2006-07-31 2008-02-14 Setsuko Kondo ロアチャックパッド
WO2019058871A1 (ja) * 2017-09-22 2019-03-28 信越半導体株式会社 研磨ヘッド及び研磨ヘッドの製造方法

Also Published As

Publication number Publication date
JPH0453896Y2 (enrdf_load_stackoverflow) 1992-12-17

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