JPS63100443A - Pattern forming method for dyeable resin film - Google Patents
Pattern forming method for dyeable resin filmInfo
- Publication number
- JPS63100443A JPS63100443A JP61245320A JP24532086A JPS63100443A JP S63100443 A JPS63100443 A JP S63100443A JP 61245320 A JP61245320 A JP 61245320A JP 24532086 A JP24532086 A JP 24532086A JP S63100443 A JPS63100443 A JP S63100443A
- Authority
- JP
- Japan
- Prior art keywords
- dyeable
- film
- processing
- monomer
- developer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011347 resin Substances 0.000 title claims abstract description 28
- 229920005989 resin Polymers 0.000 title claims abstract description 28
- 238000000034 method Methods 0.000 title claims description 11
- 239000000178 monomer Substances 0.000 claims abstract description 30
- 239000002736 nonionic surfactant Substances 0.000 claims abstract description 15
- 239000011342 resin composition Substances 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 239000007864 aqueous solution Substances 0.000 claims abstract description 10
- 229920001577 copolymer Polymers 0.000 claims abstract description 9
- 230000002209 hydrophobic effect Effects 0.000 claims abstract description 8
- 239000011521 glass Substances 0.000 abstract description 24
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 10
- 230000000694 effects Effects 0.000 abstract description 2
- 239000004094 surface-active agent Substances 0.000 abstract description 2
- 238000009736 wetting Methods 0.000 abstract description 2
- 230000008595 infiltration Effects 0.000 abstract 1
- 238000001764 infiltration Methods 0.000 abstract 1
- 230000001737 promoting effect Effects 0.000 abstract 1
- -1 polyoxyethylene Polymers 0.000 description 11
- 239000000975 dye Substances 0.000 description 8
- 239000000243 solution Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- 150000003839 salts Chemical group 0.000 description 4
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 3
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 3
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 3
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 description 3
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 235000014113 dietary fatty acids Nutrition 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 238000004043 dyeing Methods 0.000 description 3
- 229930195729 fatty acid Natural products 0.000 description 3
- 239000000194 fatty acid Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 239000000344 soap Substances 0.000 description 3
- 229940044192 2-hydroxyethyl methacrylate Drugs 0.000 description 2
- VGVHNLRUAMRIEW-UHFFFAOYSA-N 4-methylcyclohexan-1-one Chemical compound CC1CCC(=O)CC1 VGVHNLRUAMRIEW-UHFFFAOYSA-N 0.000 description 2
- RNMDNPCBIKJCQP-UHFFFAOYSA-N 5-nonyl-7-oxabicyclo[4.1.0]hepta-1,3,5-trien-2-ol Chemical compound C(CCCCCCCC)C1=C2C(=C(C=C1)O)O2 RNMDNPCBIKJCQP-UHFFFAOYSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 2
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 125000000129 anionic group Chemical group 0.000 description 2
- 239000003945 anionic surfactant Substances 0.000 description 2
- IVRMZWNICZWHMI-UHFFFAOYSA-N azide group Chemical group [N-]=[N+]=[N-] IVRMZWNICZWHMI-UHFFFAOYSA-N 0.000 description 2
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 229920002818 (Hydroxyethyl)methacrylate Polymers 0.000 description 1
- FGLRWHNZUBAWJK-MDZDMXLPSA-N (e)-3-(3-hydroxyphenyl)-1-phenylprop-2-en-1-one Chemical compound OC1=CC=CC(\C=C\C(=O)C=2C=CC=CC=2)=C1 FGLRWHNZUBAWJK-MDZDMXLPSA-N 0.000 description 1
- FFJCNSLCJOQHKM-CLFAGFIQSA-N (z)-1-[(z)-octadec-9-enoxy]octadec-9-ene Chemical compound CCCCCCCC\C=C/CCCCCCCCOCCCCCCCC\C=C/CCCCCCCC FFJCNSLCJOQHKM-CLFAGFIQSA-N 0.000 description 1
- YQPDFPOALLAYGO-UHFFFAOYSA-N 1,5-bis(4-azidophenyl)penta-1,4-dien-3-one Chemical compound C1=CC(N=[N+]=[N-])=CC=C1C=CC(=O)C=CC1=CC=C(N=[N+]=[N-])C=C1 YQPDFPOALLAYGO-UHFFFAOYSA-N 0.000 description 1
- JHTZQAOSGHPICS-UHFFFAOYSA-N 2,3-bis[(4-azidophenyl)methylidene]-4-methylcyclohexan-1-one Chemical compound C=1C=C(N=[N+]=[N-])C=CC=1C=C1C(C)CCC(=O)C1=CC1=CC=C(N=[N+]=[N-])C=C1 JHTZQAOSGHPICS-UHFFFAOYSA-N 0.000 description 1
- QHVBLSNVXDSMEB-UHFFFAOYSA-N 2-(diethylamino)ethyl prop-2-enoate Chemical compound CCN(CC)CCOC(=O)C=C QHVBLSNVXDSMEB-UHFFFAOYSA-N 0.000 description 1
- JKNCOURZONDCGV-UHFFFAOYSA-N 2-(dimethylamino)ethyl 2-methylprop-2-enoate Chemical compound CN(C)CCOC(=O)C(C)=C JKNCOURZONDCGV-UHFFFAOYSA-N 0.000 description 1
- DPBJAVGHACCNRL-UHFFFAOYSA-N 2-(dimethylamino)ethyl prop-2-enoate Chemical compound CN(C)CCOC(=O)C=C DPBJAVGHACCNRL-UHFFFAOYSA-N 0.000 description 1
- DUVWEYQMWDHDBY-UHFFFAOYSA-N 2-(dimethylamino)prop-2-enamide Chemical compound CN(C)C(=C)C(N)=O DUVWEYQMWDHDBY-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- MPNXSZJPSVBLHP-UHFFFAOYSA-N 2-chloro-n-phenylpyridine-3-carboxamide Chemical compound ClC1=NC=CC=C1C(=O)NC1=CC=CC=C1 MPNXSZJPSVBLHP-UHFFFAOYSA-N 0.000 description 1
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 1
- JNDVNJWCRZQGFQ-UHFFFAOYSA-N 2-methyl-N,N-bis(methylamino)hex-2-enamide Chemical compound CCCC=C(C)C(=O)N(NC)NC JNDVNJWCRZQGFQ-UHFFFAOYSA-N 0.000 description 1
- UFQHFMGRRVQFNA-UHFFFAOYSA-N 3-(dimethylamino)propyl prop-2-enoate Chemical compound CN(C)CCCOC(=O)C=C UFQHFMGRRVQFNA-UHFFFAOYSA-N 0.000 description 1
- MCSXGCZMEPXKIW-UHFFFAOYSA-N 3-hydroxy-4-[(4-methyl-2-nitrophenyl)diazenyl]-N-(3-nitrophenyl)naphthalene-2-carboxamide Chemical compound Cc1ccc(N=Nc2c(O)c(cc3ccccc23)C(=O)Nc2cccc(c2)[N+]([O-])=O)c(c1)[N+]([O-])=O MCSXGCZMEPXKIW-UHFFFAOYSA-N 0.000 description 1
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 1
- JLBJTVDPSNHSKJ-UHFFFAOYSA-N 4-Methylstyrene Chemical compound CC1=CC=C(C=C)C=C1 JLBJTVDPSNHSKJ-UHFFFAOYSA-N 0.000 description 1
- KFDVPJUYSDEJTH-UHFFFAOYSA-N 4-ethenylpyridine Chemical compound C=CC1=CC=NC=C1 KFDVPJUYSDEJTH-UHFFFAOYSA-N 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- DQFBYFPFKXHELB-UHFFFAOYSA-N Chalcone Natural products C=1C=CC=CC=1C(=O)C=CC1=CC=CC=C1 DQFBYFPFKXHELB-UHFFFAOYSA-N 0.000 description 1
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- SJEYSFABYSGQBG-UHFFFAOYSA-M Patent blue Chemical compound [Na+].C1=CC(N(CC)CC)=CC=C1C(C=1C(=CC(=CC=1)S([O-])(=O)=O)S([O-])(=O)=O)=C1C=CC(=[N+](CC)CC)C=C1 SJEYSFABYSGQBG-UHFFFAOYSA-M 0.000 description 1
- 229920001214 Polysorbate 60 Polymers 0.000 description 1
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical group CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical compound C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 1
- 239000000980 acid dye Substances 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 125000005907 alkyl ester group Chemical group 0.000 description 1
- 150000005215 alkyl ethers Chemical class 0.000 description 1
- 239000003093 cationic surfactant Substances 0.000 description 1
- 235000005513 chalcones Nutrition 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical compound CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 1
- MQWCXKGKQLNYQG-UHFFFAOYSA-N methyl cyclohexan-4-ol Natural products CC1CCC(O)CC1 MQWCXKGKQLNYQG-UHFFFAOYSA-N 0.000 description 1
- DFENKTCEEGOWLB-UHFFFAOYSA-N n,n-bis(methylamino)-2-methylidenepentanamide Chemical compound CCCC(=C)C(=O)N(NC)NC DFENKTCEEGOWLB-UHFFFAOYSA-N 0.000 description 1
- 229940088644 n,n-dimethylacrylamide Drugs 0.000 description 1
- YLGYACDQVQQZSW-UHFFFAOYSA-N n,n-dimethylprop-2-enamide Chemical compound CN(C)C(=O)C=C YLGYACDQVQQZSW-UHFFFAOYSA-N 0.000 description 1
- DYUWTXWIYMHBQS-UHFFFAOYSA-N n-prop-2-enylprop-2-en-1-amine Chemical compound C=CCNCC=C DYUWTXWIYMHBQS-UHFFFAOYSA-N 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 125000006353 oxyethylene group Chemical group 0.000 description 1
- 239000003961 penetration enhancing agent Substances 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- 239000000985 reactive dye Substances 0.000 description 1
- WPPDXAHGCGPUPK-UHFFFAOYSA-N red 2 Chemical compound C1=CC=CC=C1C(C1=CC=CC=C11)=C(C=2C=3C4=CC=C5C6=CC=C7C8=C(C=9C=CC=CC=9)C9=CC=CC=C9C(C=9C=CC=CC=9)=C8C8=CC=C(C6=C87)C(C=35)=CC=2)C4=C1C1=CC=CC=C1 WPPDXAHGCGPUPK-UHFFFAOYSA-N 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- DQFBYFPFKXHELB-VAWYXSNFSA-N trans-chalcone Chemical compound C=1C=CC=CC=1C(=O)\C=C\C1=CC=CC=C1 DQFBYFPFKXHELB-VAWYXSNFSA-N 0.000 description 1
- RRHXZLALVWBDKH-UHFFFAOYSA-M trimethyl-[2-(2-methylprop-2-enoyloxy)ethyl]azanium;chloride Chemical compound [Cl-].CC(=C)C(=O)OCC[N+](C)(C)C RRHXZLALVWBDKH-UHFFFAOYSA-M 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Coloring (AREA)
- Optical Filters (AREA)
- Surface Treatment Of Glass (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明はガラス等の透明な基材を染料によりストライプ
又はモザイク状又はその他の形状に染色する為の可染性
樹脂膜のパターン形成法に関するものである。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a method for forming a pattern of a dyeable resin film for dyeing a transparent substrate such as glass into a stripe, mosaic, or other shape with a dye. It is something.
近年ガラス等の透明基材をストライプ又はモザイク状等
に着色したものが色分鱗用フィルターとして液晶カラー
TV又はカラーTV用カメラのカラー化の為に増々需要
が増大しつつある。In recent years, the demand for transparent substrates such as glass colored in stripes or mosaic shapes has been increasing as color separation filters for colorizing liquid crystal color TVs or cameras for color TVs.
本発明はかかる需要等を満たす為になされたガラス等の
透明基材にストライプ又はモザイク状等に又はその他の
形状に染色する為の可染性樹脂膜のパターン形成法に関
するものである。The present invention relates to a method for forming a pattern of a dyeable resin film for dyeing a transparent substrate such as glass in stripes, mosaics, or other shapes, which has been developed to meet such demands.
(従来の技術)
従来この分野に於いては可染性感光性樹脂組成物が用い
られているが、これら可染性感光性樹脂の用いられ方は
先ず適当な濃度に希釈した溶液をガラス板等に塗布し、
次にマスクを介して露光したのち現像してストライプ又
はモザイク状の可染性樹脂膜を形成させ、これを所定の
分光特性を有する染料により染色する等の操作を繰返す
ことにより色分解用フィルターを作成しているが、この
樹脂膜の現像時に於いては20〜70℃の中性〜酸性水
溶液を使用して現像を行っている。(Prior Art) Conventionally, dyeable photosensitive resin compositions have been used in this field, but the method for using these dyeable photosensitive resins is to first dilute a solution to a suitable concentration and apply it to a glass plate. etc.,
Next, a color separation filter is created by repeating operations such as exposing to light through a mask, developing it to form a striped or mosaic dyeable resin film, and dyeing this with a dye having predetermined spectral characteristics. When developing this resin film, a neutral to acidic aqueous solution at 20 to 70° C. is used.
(発明が解決しようとする問題点ン
前述のように可染性感光性樹脂組成物をガラス板等に塗
布しマスクを介して露光したのち20〜70℃の水を使
用して現像を行うと現像時間が長かつたり、一度現像に
より脱落した可染性感光性樹脂組成物の粘状物がガラス
板等に再付着する為に不良品が発生し易いとか、又酸性
溶液で現像を行うと、現像時間は短縮出来るが露光部皮
膜の膜荒れが生じるとかの問題があり、工程の合理化、
収率の点で更に改善が望まれていた。(Problems to be Solved by the Invention) As mentioned above, if a dyeable photosensitive resin composition is applied to a glass plate, etc., exposed to light through a mask, and then developed using water at 20 to 70°C. The development time is long, the sticky material of the dyeable photosensitive resin composition that once falls off during development re-adheres to the glass plate, etc., resulting in defective products, and if the development is performed with an acidic solution, Although the development time can be shortened, there are problems such as roughening of the film in the exposed area, so it is necessary to streamline the process.
Further improvement in yield was desired.
(問題点を解決する為の手段)
本発明者等はこれらの問題点を解決すべく検討を行った
結果、可染性感光性樹脂液をガラス板等に塗布しマスク
を介して露光したのち非イオン界面活性剤を含有する″
水溶液を用いて現像を行うことにより目的を達成するこ
とがわかり本発明を完成するに至った。(Means for Solving the Problems) As a result of studies to solve these problems, the present inventors applied a dyeable photosensitive resin liquid to a glass plate, etc., exposed it to light through a mask, and then Contains non-ionic surfactants”
It was found that the object could be achieved by performing development using an aqueous solution, leading to the completion of the present invention.
即ち、本発明は、
a)可染性モノマーfAl
b) 可染性モノマー囚以外の親水性モノマーfB)
C)疎水性モノマー(q
より成る共重合体(Dを構成成分とする可染性感光性樹
脂組成物を用いてガラス板等の基材表面に皮膜を設け、
マスクを用いて露光し、現像液にて現像する際に、現像
液として非イオン界面活性剤を含有する水溶液を用いる
ことを特徴とする可染性樹脂膜のパターン形成法に関す
る。That is, the present invention comprises a) a dyeable monomer fAl b) a hydrophilic monomer other than the dyeable monomer fB)
C) Providing a film on the surface of a substrate such as a glass plate using a dyeable photosensitive resin composition containing a copolymer (D) consisting of a hydrophobic monomer (q),
The present invention relates to a pattern forming method for a dyeable resin film, which is characterized by using an aqueous solution containing a nonionic surfactant as the developing solution when exposing using a mask and developing with a developing solution.
本発明の非イオン界面活性剤含有水溶液を用いると現像
時間が無添加の場合に比して短縮出来る上に現像により
脱落した未露光部の樹脂の再付着も減少し、工程の合理
化と品質の向上及び収率の向上に役立つ。この場合非イ
オン界面活性剤は未露光部への水の濡れと浸透促進剤、
脱落樹脂の再付着防止剤として作用し、短時間に現像を
可能にするものと推定される。By using the nonionic surfactant-containing aqueous solution of the present invention, the development time can be shortened compared to when no additive is used, and the redeposition of resin in unexposed areas that has fallen off during development is also reduced, streamlining the process and improving quality. Useful for improving production and yield. In this case, the nonionic surfactant is a water wetting and penetration enhancer in the unexposed area.
It is presumed that it acts as a re-deposition preventive agent for the fallen resin and enables development in a short time.
界面活性剤の中でもアニオン界面活性剤は可染性感光性
樹脂とイオン的に結合する為に、現像液にアニオン界面
活性剤を添加することにより現像性が悪くなる。又、カ
チオン界面活性剤を用いると現像時間の短縮及び未露光
樹脂組成物の再付着がなくなるが、これを染料で染色し
た場合、染色された露光部の透明性が失われ商品価値が
なくなってしまうので不適当であった。Among surfactants, anionic surfactants are ionically bonded to the dyeable photosensitive resin, so adding anionic surfactants to the developer deteriorates the developability. In addition, using a cationic surfactant shortens the development time and eliminates the redeposition of unexposed resin compositions, but when this is dyed with dyes, the dyed exposed areas lose transparency and have no commercial value. It was inappropriate because it would be stored away.
本発明で用いられる非イオン界面活性剤としてはポリオ
キシエチレンアルキルエーテル及ヒポリオキシエチレン
アルキルフェノールエーテル系、ソルビタン脂肪酸エス
テル系、ポリオキシエチレンソルビタン脂肪酸エステル
糸、ポリオキシエチレンア、シルエステル系、オキシエ
チレンオキシプロピレンブロックボリマー、脂肪酸モノ
グリセライド、等が挙げられる。これらは1種又は2種
以上の混合系でも良い。これら非イオン界面活性剤の使
用量は水1000部に対して0.1〜50部が好ましく
、特に0.5〜10部が好ましい。又現像温度は15〜
80℃が好ましい。Nonionic surfactants used in the present invention include polyoxyethylene alkyl ether and hypopolyoxyethylene alkylphenol ether, sorbitan fatty acid ester, polyoxyethylene sorbitan fatty acid ester thread, polyoxyethylene alkyl ester, oxyethylene Examples include oxypropylene block polymers, fatty acid monoglycerides, and the like. These may be used alone or in a mixed system of two or more. The amount of these nonionic surfactants used is preferably 0.1 to 50 parts, particularly preferably 0.5 to 10 parts, per 1000 parts of water. Also, the developing temperature is 15~
80°C is preferred.
本発明で用いられる可染性感光性樹脂組成物としては例
えば次のようなものが挙げられる。Examples of the dyeable photosensitive resin composition used in the present invention include the following.
即ち、可染性モノマー(A)、親水性モノマー(刑、疎
水性モノマー(C)より成る共重合体(D又はこれに感
光剤、例えば4.4′−ジアジドカルコン、2゜6−ビ
ス(4−アジドペンザルノシクロヘキサノン、2.6−
ビス(4−アジドベンザルノシクロヘキサノン、2.6
−ビス(4−アジドベンザル)4−メチルシクロヘキサ
ノン、1.3−ビス(4−アジドベンザル)−2−プロ
パノン等ヲ組合せて可染性感光性樹脂組成物としたもの
、又はこの共重合体(口に感光性基例えばシンナモイル
基、アジド基、アクリル基、スチリルピリジニウム塩構
造又はスチリルキノリウム塩構造等を有する化合物を反
応させて可染性感光性樹脂組成物としたもの等がある。That is, a copolymer (D) consisting of a dyeable monomer (A), a hydrophilic monomer (C), a hydrophobic monomer (C), or a photosensitive agent such as 4,4'-diazide chalcone, 2°6-bis (4-azidopenzalnocyclohexanone, 2.6-
Bis(4-azidobenzalnocyclohexanone, 2.6
- A dyeable photosensitive resin composition made by combining bis(4-azidobenzal)4-methylcyclohexanone, 1,3-bis(4-azidobenzal)-2-propanone, etc., or a copolymer of this There are dyeable photosensitive resin compositions prepared by reacting compounds having a photosensitive group such as a cinnamoyl group, an azide group, an acrylic group, a styrylpyridinium salt structure, or a styrylquinolium salt structure.
可染性モノマー(A)、親水性モノマー(B、疎水性モ
ノマー(C)よりなる共重合体aそれ自体を可染性感光
性樹脂組成物として用いる場合、モノマーとしてシンナ
モイル基、アジド基、アクリル基、スチリルピリジニウ
ム塩構造又はスチリルキノリウム塩構造等を有するモノ
マーを共重合させて得た可染性感光性樹脂組成物が好ま
しい。When copolymer a itself consisting of a dyeable monomer (A), a hydrophilic monomer (B, and a hydrophobic monomer (C)) is used as a dyeable photosensitive resin composition, the monomers may include a cinnamoyl group, an azide group, and an acrylic group. A dyeable photosensitive resin composition obtained by copolymerizing a monomer having a styrylpyridinium salt structure, a styrylquinolium salt structure, or the like is preferred.
本発明で用いられる可染性モノマー(A)としては例え
ば次のものが挙げられる。Examples of the dyeable monomer (A) used in the present invention include the following.
(N、N−ジメチルアミツノエチルアクリレート、(N
、N−ジメチルアミノ)エチルメタクリレート、(N、
N−ジエチルアミノ)エチルアクリレート、(N、N−
ジエチルアミツノエチルメタクリレート、(N、N−ジ
メチルアミノプロピルアクリルアミド、(N、N−ジメ
チルアミツノプロビルメタクリルアミド、(N、N−ジ
メチルアミツノエチルビニルエーテル、(N、N−ジメ
チルアミノ)プロピルアクリレート、(N、N−ジメチ
ルアミノンプロピルメタクリレート、4−ビニルピリジ
ン、ジアリルアミン、2−ヒドロキシ−3−メタクリロ
イルオキシプロピル、トリメチルアンモニウムクロライ
ド、メタクリロイルオキシエチルトリメチルアンモニウ
ムクロライド。(N,N-dimethylaminoethyl acrylate, (N
, N-dimethylamino)ethyl methacrylate, (N,
N-diethylamino)ethyl acrylate, (N,N-
Diethylamitunoethyl methacrylate, (N,N-dimethylaminopropylacrylamide, (N,N-dimethylaminopropyl methacrylamide), (N,N-dimethylamitunoethyl vinyl ether, (N,N-dimethylamino)propyl acrylate) , (N,N-dimethylaminonepropyl methacrylate, 4-vinylpyridine, diallylamine, 2-hydroxy-3-methacryloyloxypropyl, trimethylammonium chloride, methacryloyloxyethyltrimethylammonium chloride.
又本発明で用いられる親水性モノマー(Bとしては次の
ものが挙げられる。Further, examples of the hydrophilic monomer (B) used in the present invention include the following.
ヒドロキシエチルアクリレート、ヒドロキシエチルメタ
クリレート、アクリルアミド、メタクリルアミド、ビニ
ルピロリドン、N、N −ジメチルアクリルアミド。Hydroxyethyl acrylate, hydroxyethyl methacrylate, acrylamide, methacrylamide, vinylpyrrolidone, N,N-dimethylacrylamide.
又本発明で用いられる疎水性モノマー(C)としてはメ
チルアクリレート、メチルメタクリレート、エチルアク
リレート、スチレン、p−メチルスチレン、ブチルアク
リレート、ブチルメタクリレート等が挙げられる。Examples of the hydrophobic monomer (C) used in the present invention include methyl acrylate, methyl methacrylate, ethyl acrylate, styrene, p-methylstyrene, butyl acrylate, and butyl methacrylate.
これら可染性モノマー(A)、親水性モノマーfBl、
疎水性モノマー(Qの配合割合は可染性モノマー(A)
10〜80重量%、親水性モノマー(T32〜60重量
%、疎水性モノマーfQ s〜50重景%であるものが
好ましい。これらのモノマーは従来技術により重合出来
る。These dyeable monomers (A), hydrophilic monomer fBl,
Hydrophobic monomer (the blending ratio of Q is the dyeable monomer (A)
10 to 80% by weight of hydrophilic monomers (T32 to 60% by weight) and hydrophobic monomers fQs to 50% by weight. These monomers can be polymerized by conventional techniques.
又本発明で用いられる可染性感光性樹脂組成物はガラス
板等に塗布し易くする為に有機溶剤に希釈されて用いら
れる。有機溶剤としては例えばメチルセロソルブ、エチ
ルセロソルブ、エチレングリコールモノエチルエーテル
アセf −ト、ジグライム、メチルイソブチルケトン、
トルエン、キシレン等が挙げられる。Further, the dyeable photosensitive resin composition used in the present invention is diluted with an organic solvent to make it easier to apply to glass plates and the like. Examples of organic solvents include methyl cellosolve, ethyl cellosolve, ethylene glycol monoethyl ether acetate, diglyme, methyl isobutyl ketone,
Examples include toluene and xylene.
この可染性感光性樹脂組成物を塗布したガラス等の基材
はマスクを介して紫外線等により露光される。未露光部
は非イオン界面活性剤を含有する水溶液により現像され
る。A base material such as glass coated with this dyeable photosensitive resin composition is exposed to ultraviolet light or the like through a mask. The unexposed areas are developed with an aqueous solution containing a nonionic surfactant.
このように現像された樹脂の膜厚は例えば0.2〜10
μの任意の厚さに膜を作成出来る。The film thickness of the resin developed in this way is, for example, 0.2 to 10
A film can be created with any thickness of μ.
現像された所定のパターンを有するガラス、プラスチッ
ク等の基材はアニオン染料により染色される。A substrate such as glass or plastic having a developed predetermined pattern is dyed with an anionic dye.
アニオン性染料としてはカラーインデックス(5oci
ety of Dyers and Colourls
ts発行)にC,lAc1dとして記載されている酸性
染料、同じくC0I Directとして記載されてい
る直接染料及び同じ< C−I Reactiveとし
て記載されている反応性染料等が挙げられるが、特に酸
性染料が好ましい。Color index (5oci) is an anionic dye.
ety of Dyers and Colors
Examples include acid dyes listed as C, lAc1d in the same C0I Direct, reactive dyes listed as C-I Reactive, etc., but especially acidic dyes. preferable.
(実施例)
実施例1゜
ジメチルアミノプロピルアクリルアミド 30部2
−ヒドロキシエチルメタクリレート 15部ビ
ニルピロリドン 34’メ
チルメタクリレート 30#ジ
メチルアミノアクリルアミド 91より
成る共重合体16部に4,4−ジアジドカルコン0.6
5部、エチルセロソルブ84部を混合溶解させた溶液を
可染性感光性樹脂液とした。(Example) Example 1゜Dimethylaminopropylacrylamide 30 parts 2
-Hydroxyethyl methacrylate 15 parts Vinylpyrrolidone 34' Methyl methacrylate 30# Dimethylaminoacrylamide 16 parts of a copolymer consisting of 91 and 0.6 parts of 4,4-diazide chalcone
A dyeable photosensitive resin liquid was prepared by mixing and dissolving 5 parts of ethyl cellosolve and 84 parts of ethyl cellosolve.
次にガラス基板にシランカップリング剤KBM503(
信越化学工業■ン10%エタノール溶液を塗布し風乾後
110℃、5分間加熱乾燥したものを塗布用基材とした
。Next, silane coupling agent KBM503 (
A 10% ethanol solution of Shin-Etsu Chemical Co., Ltd. was applied, air-dried, and then heated at 110° C. for 5 minutes to prepare a coating substrate.
この塗布用基材表面にロールコータ−法により前記可染
性感光性樹脂液を塗布し、これを100℃、30分乾燥
後、所定のパターンを有するマスクを介して面照度8
mW/ cm2のUV照射を15秒間行い、エマルゲン
913(花王石鹸■製、ポリオキシエチレンノニルフェ
ノールエーテル型非イオン界面活性剤〕を水1000部
に対して2部、含有する60℃の現像液にて撹拌下、5
分間現像を行うと照射部のみ可染膜を有するガラス基板
が得られた。この可染性膜は0.7μの膜厚であった。The dyeable photosensitive resin liquid was applied to the surface of the coating base material by a roll coater method, and after drying at 100°C for 30 minutes, the surface illuminance was 8.
UV irradiation was carried out at mW/cm2 for 15 seconds, and a developer solution at 60°C containing 2 parts of Emulgen 913 (polyoxyethylene nonylphenol ether type nonionic surfactant manufactured by Kao Soap ■) per 1000 parts of water was used. under stirring, 5
When development was carried out for a minute, a glass substrate having a dyeable film only in the irradiated area was obtained. This dyeable film had a thickness of 0.7μ.
このガラス基板を350℃、30分間乾燥後、レッド2
】P(日本化薬■裂、カラーフィルター用色素)を0.
2%となるように水に溶解させ、60℃、】0分間染色
を行うと濃厚赤色のパターンに染色されたガラス板が得
られた。このガラス板は未露光部への現像による脱落樹
脂の再付着も極めて少く画像は極めて鮮明であった。After drying this glass substrate at 350°C for 30 minutes, Red 2
] P (Nippon Kayaku, color filter dye) was 0.
When it was dissolved in water to a concentration of 2% and dyed at 60°C for 0 minutes, a glass plate dyed in a deep red pattern was obtained. In this glass plate, there was very little re-adhesion of the resin that had fallen off during development to the unexposed areas, and the image was extremely clear.
参考例1゜
実施例】に於いてエマルゲン913を含まない60℃の
現像液を用いて同様の操作を行った所、未露光部ガラス
板への脱落樹脂の再付着は実施例1に比して多く、実施
例1と同様の鮮明な画像を得るに要する現像時間は13
分を要した。この場合でも未露光部ガラス板への脱落樹
脂の再付着の防止は不充分であった。In Reference Example 1゜Example, when the same operation was carried out using a 60°C developing solution that did not contain Emulgen 913, the re-adhesion of the fallen resin to the unexposed glass plate was different from that in Example 1. The development time required to obtain a clear image similar to that in Example 1 was 13
It took several minutes. Even in this case, prevention of re-adhesion of the fallen resin to the unexposed glass plate was insufficient.
実施例2゜
実施例】に於いてエマルゲン9J3の代りにエマルゲン
930(花王石鹸■製、ポリオキシエチレンノニルフェ
ノールエーテル型非イオン界面活性剤)を水1000部
に対して1.8部含有する現像液を用いて実施例1と同
様の操作を行った所、実施例】と同様の結果が得られた
。Example 2 In Example 2, a developer containing 1.8 parts of Emulgen 930 (manufactured by Kao Soap, polyoxyethylene nonylphenol ether type nonionic surfactant) per 1000 parts of water was used instead of Emulgen 9J3. When the same operation as in Example 1 was carried out using , the same results as in Example were obtained.
実施例3゜
ジメチルアミノプロピルアクリルアミド 32部2
−ヒドロキシエチルメタクリレート 」21ビ
ニルピロリドン 161ジ
メチル了ミノアクリルアミド 131ブチ
ル了クリレート 1】#メチ
ルメタクリレート J4Iより
成る共重合体17部に2.6−ビス(4−アジドヘンザ
ル)4−メチルシクロヘキサノン0.78部、エチルセ
ロノル183部を混合溶解させた溶液な可染性感光性樹
脂液とした。Example 3゜Dimethylaminopropylacrylamide 32 parts 2
-Hydroxyethyl methacrylate 21 Vinyl pyrrolidone 161 Dimethyl minoacrylamide 131 Butyl acrylate 1] #Methyl methacrylate 17 parts of a copolymer consisting of J4I, 0.78 part of 2,6-bis(4-azidohenzal)4-methylcyclohexanone, A dyeable photosensitive resin liquid was prepared by mixing and dissolving 183 parts of ethylcelonol.
この可染性感光性樹脂液を実施例1と同様の操作により
ガラス板に塗布、乾燥、パターンを有するマスクを介し
てのUV照射を行った。This dyeable photosensitive resin liquid was applied to a glass plate in the same manner as in Example 1, dried, and irradiated with UV through a patterned mask.
次にエマルゲン430(花王石鹸■製、ポリオキシエチ
レンオレイルエーテル)を水1000部に対して2.5
部含有する58℃の現像液にて8分間現像を行うと照射
部のみ可染膜を有するガラス基板が得られた。この可染
性膜の膜厚は0.8μであった。このガラス基板を15
0℃、30分間乾燥後、グリーンIF(日本化薬■製、
カラーフィルター用色素)を0.1%となるように水に
溶解させ、62℃、12分間染色を行うと濃厚緑色のパ
ターンに染色されたガラス板が得られた。このガラス板
は未露光部への現像による脱落樹脂の再付着もなく、画
像は極めて鮮明であった。Next, add 2.5 parts of Emulgen 430 (manufactured by Kao Soap ■, polyoxyethylene oleyl ether) to 1000 parts of water.
When development was carried out for 8 minutes using a developer at 58.degree. The thickness of this dyeable film was 0.8μ. 15 pieces of this glass substrate
After drying at 0℃ for 30 minutes, Green IF (manufactured by Nippon Kayaku ■,
Color filter dye) was dissolved in water to a concentration of 0.1% and dyed at 62° C. for 12 minutes to obtain a glass plate dyed in a deep green pattern. In this glass plate, there was no redeposition of the resin that had fallen off during development to the unexposed areas, and the image was extremely clear.
参考例2゜
実施例3に於いてエマルゲン430を含まない58℃の
現像液を用いて同様の操作を行った所、未露光部ガラス
板への脱落樹脂の再付着は実施例3に比して多く、又実
施例3と同様の鮮明な画像を得るに要する現像時間は1
5分を豊した。この場合でも未露光部ガラス板への脱落
樹脂の再付着の防止は不充分であった。Reference Example 2゜When the same operation as in Example 3 was performed using a developer at 58°C that did not contain Emulgen 430, the redeposition of the fallen resin to the unexposed glass plate was compared to that in Example 3. In addition, the developing time required to obtain a clear image similar to that in Example 3 is 1
I enriched my 5 minutes. Even in this case, prevention of re-adhesion of the fallen resin to the unexposed glass plate was insufficient.
実施例4゜
実施例3に於いてエマルゲン430の代りにエマルゲン
9】3を水1000部に対して2.3部含有する現像液
を用いて実施例3と同様の操作を行った所、実施例3と
同様の結果が得られた。Example 4 The same operation as in Example 3 was carried out using a developer containing 2.3 parts of Emulgen 9]3 per 1000 parts of water instead of Emulgen 430. Similar results to Example 3 were obtained.
(発明の効果)
本発明は可染性感光性樹脂膜の現像に非イオン界面活性
剤含有水溶液を使用するので現像時間が短縮出来るから
工程の合理化に役立つ。更に又未露光部への脱落樹脂の
再付着が防止出来るからより高品質のものが得られると
共に収率の向上に役立つ。従って本性は色分解用フィル
ターの品質向上が計れる上に工程の合理化によるコスト
ダウンに役立つ。(Effects of the Invention) Since the present invention uses an aqueous solution containing a nonionic surfactant for developing the dyeable photosensitive resin film, the developing time can be shortened, which is useful for streamlining the process. Furthermore, since redeposition of the fallen resin to unexposed areas can be prevented, higher quality products can be obtained and the yield can be improved. Therefore, this property can not only improve the quality of color separation filters, but also help reduce costs by streamlining the process.
Claims (1)
c)疎水性モノマー(C) より成る共重合体(D)を構成成分とする可染性感光性
樹脂組成物を用いて基材表面に皮膜を設けマスクを用い
て露光し、現像液にて現像する際に、現像液として非イ
オン界面活性剤を含有する水溶液を用いることを特徴と
する可染性樹脂膜のパターン形成法。[Claims] a) Dyeable monomer (A) b) Hydrophilic monomer (B) other than the dyeable monomer (A)
c) A film is formed on the surface of the substrate using a dyeable photosensitive resin composition containing a copolymer (D) consisting of a hydrophobic monomer (C), and exposed using a mask, and then processed with a developer. A pattern forming method for a dyeable resin film, characterized in that during development, an aqueous solution containing a nonionic surfactant is used as a developer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24532086A JPH0644151B2 (en) | 1986-10-17 | 1986-10-17 | Pattern forming method for dyeable resin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24532086A JPH0644151B2 (en) | 1986-10-17 | 1986-10-17 | Pattern forming method for dyeable resin film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63100443A true JPS63100443A (en) | 1988-05-02 |
JPH0644151B2 JPH0644151B2 (en) | 1994-06-08 |
Family
ID=17131905
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24532086A Expired - Lifetime JPH0644151B2 (en) | 1986-10-17 | 1986-10-17 | Pattern forming method for dyeable resin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0644151B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5332607B2 (en) * | 2006-02-22 | 2013-11-06 | コニカミノルタ株式会社 | Antireflection film, method for producing antireflection film, hard coat film, polarizing plate and display device |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5026601A (en) * | 1973-07-09 | 1975-03-19 | ||
JPS5611906A (en) * | 1979-07-11 | 1981-02-05 | Agency Of Ind Science & Technol | Photo-insolubilizable polyvinyl alcohol derivative and its preparation |
JPS6079349A (en) * | 1983-10-06 | 1985-05-07 | Mitsubishi Chem Ind Ltd | Water-soluble photosensitive composition and organic color filter |
JPS60129742A (en) * | 1983-12-16 | 1985-07-11 | Agency Of Ind Science & Technol | Colored image |
JPS60129743A (en) * | 1983-12-16 | 1985-07-11 | Agency Of Ind Science & Technol | Polyvinyl alcohol type copolymer |
-
1986
- 1986-10-17 JP JP24532086A patent/JPH0644151B2/en not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5026601A (en) * | 1973-07-09 | 1975-03-19 | ||
JPS5611906A (en) * | 1979-07-11 | 1981-02-05 | Agency Of Ind Science & Technol | Photo-insolubilizable polyvinyl alcohol derivative and its preparation |
JPS6079349A (en) * | 1983-10-06 | 1985-05-07 | Mitsubishi Chem Ind Ltd | Water-soluble photosensitive composition and organic color filter |
JPS60129742A (en) * | 1983-12-16 | 1985-07-11 | Agency Of Ind Science & Technol | Colored image |
JPS60129743A (en) * | 1983-12-16 | 1985-07-11 | Agency Of Ind Science & Technol | Polyvinyl alcohol type copolymer |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5332607B2 (en) * | 2006-02-22 | 2013-11-06 | コニカミノルタ株式会社 | Antireflection film, method for producing antireflection film, hard coat film, polarizing plate and display device |
Also Published As
Publication number | Publication date |
---|---|
JPH0644151B2 (en) | 1994-06-08 |
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