JPS63100443A - Pattern forming method for dyeable resin film - Google Patents

Pattern forming method for dyeable resin film

Info

Publication number
JPS63100443A
JPS63100443A JP61245320A JP24532086A JPS63100443A JP S63100443 A JPS63100443 A JP S63100443A JP 61245320 A JP61245320 A JP 61245320A JP 24532086 A JP24532086 A JP 24532086A JP S63100443 A JPS63100443 A JP S63100443A
Authority
JP
Japan
Prior art keywords
dyeable
film
processing
monomer
developer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61245320A
Other languages
Japanese (ja)
Other versions
JPH0644151B2 (en
Inventor
Matsuo Hashimoto
橋本 松男
Nobuyuki Futamura
二村 信之
Sumio Yoda
依田 澄雄
Yoshifumi Saiki
斉木 由文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Kayaku Co Ltd
Original Assignee
Nippon Kayaku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kayaku Co Ltd filed Critical Nippon Kayaku Co Ltd
Priority to JP24532086A priority Critical patent/JPH0644151B2/en
Publication of JPS63100443A publication Critical patent/JPS63100443A/en
Publication of JPH0644151B2 publication Critical patent/JPH0644151B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/30Imagewise removal using liquid means
    • G03F7/32Liquid compositions therefor, e.g. developers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Coloring (AREA)
  • Optical Filters (AREA)
  • Surface Treatment Of Glass (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

PURPOSE:To reduce a processing period of the titled film by processing the dyeable photosensitive resin film with the aqueous solution containing A a non-ionic surfactant. CONSTITUTION:The film of the dyeable photosensitive resin composition composed of a copolymer comprising a dyeable photosensitive resin composition composed of a copolymer comprising a dyeable monomer, a hydrophilic monomer except said dyeable monomer, and a hydrophobic monomer as a constituting component, is mounted on the surface of a substrate such as a glass plate, and the obtd. film is exposed through a mask. At the time of processing the obtd. film with the developer, the aqueous solution of the nonionic surfactant is used for the developer. By incorporating the aqueous solution of the non-ionic surfactant to the developer, the processing period is reduced, and the resticking of the resin which exists in an unexposed part and is removed in the processing, is reduced, comparing with no addition of the surfactant to the developer. Thus, the rationalization of the processing step, and the improvements in quality and yield are attained. In this case, the non-ionic surfactant has the effects of promoting the wetting with water at the unexposed part, and an infiltration accelator,and the restocking of the removed resin is prevented, thereby enabling to processing for a short period.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明はガラス等の透明な基材を染料によりストライプ
又はモザイク状又はその他の形状に染色する為の可染性
樹脂膜のパターン形成法に関するものである。
Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a method for forming a pattern of a dyeable resin film for dyeing a transparent substrate such as glass into a stripe, mosaic, or other shape with a dye. It is something.

近年ガラス等の透明基材をストライプ又はモザイク状等
に着色したものが色分鱗用フィルターとして液晶カラー
TV又はカラーTV用カメラのカラー化の為に増々需要
が増大しつつある。
In recent years, the demand for transparent substrates such as glass colored in stripes or mosaic shapes has been increasing as color separation filters for colorizing liquid crystal color TVs or cameras for color TVs.

本発明はかかる需要等を満たす為になされたガラス等の
透明基材にストライプ又はモザイク状等に又はその他の
形状に染色する為の可染性樹脂膜のパターン形成法に関
するものである。
The present invention relates to a method for forming a pattern of a dyeable resin film for dyeing a transparent substrate such as glass in stripes, mosaics, or other shapes, which has been developed to meet such demands.

(従来の技術) 従来この分野に於いては可染性感光性樹脂組成物が用い
られているが、これら可染性感光性樹脂の用いられ方は
先ず適当な濃度に希釈した溶液をガラス板等に塗布し、
次にマスクを介して露光したのち現像してストライプ又
はモザイク状の可染性樹脂膜を形成させ、これを所定の
分光特性を有する染料により染色する等の操作を繰返す
ことにより色分解用フィルターを作成しているが、この
樹脂膜の現像時に於いては20〜70℃の中性〜酸性水
溶液を使用して現像を行っている。
(Prior Art) Conventionally, dyeable photosensitive resin compositions have been used in this field, but the method for using these dyeable photosensitive resins is to first dilute a solution to a suitable concentration and apply it to a glass plate. etc.,
Next, a color separation filter is created by repeating operations such as exposing to light through a mask, developing it to form a striped or mosaic dyeable resin film, and dyeing this with a dye having predetermined spectral characteristics. When developing this resin film, a neutral to acidic aqueous solution at 20 to 70° C. is used.

(発明が解決しようとする問題点ン 前述のように可染性感光性樹脂組成物をガラス板等に塗
布しマスクを介して露光したのち20〜70℃の水を使
用して現像を行うと現像時間が長かつたり、一度現像に
より脱落した可染性感光性樹脂組成物の粘状物がガラス
板等に再付着する為に不良品が発生し易いとか、又酸性
溶液で現像を行うと、現像時間は短縮出来るが露光部皮
膜の膜荒れが生じるとかの問題があり、工程の合理化、
収率の点で更に改善が望まれていた。
(Problems to be Solved by the Invention) As mentioned above, if a dyeable photosensitive resin composition is applied to a glass plate, etc., exposed to light through a mask, and then developed using water at 20 to 70°C. The development time is long, the sticky material of the dyeable photosensitive resin composition that once falls off during development re-adheres to the glass plate, etc., resulting in defective products, and if the development is performed with an acidic solution, Although the development time can be shortened, there are problems such as roughening of the film in the exposed area, so it is necessary to streamline the process.
Further improvement in yield was desired.

(問題点を解決する為の手段) 本発明者等はこれらの問題点を解決すべく検討を行った
結果、可染性感光性樹脂液をガラス板等に塗布しマスク
を介して露光したのち非イオン界面活性剤を含有する″
水溶液を用いて現像を行うことにより目的を達成するこ
とがわかり本発明を完成するに至った。
(Means for Solving the Problems) As a result of studies to solve these problems, the present inventors applied a dyeable photosensitive resin liquid to a glass plate, etc., exposed it to light through a mask, and then Contains non-ionic surfactants”
It was found that the object could be achieved by performing development using an aqueous solution, leading to the completion of the present invention.

即ち、本発明は、 a)可染性モノマーfAl b)  可染性モノマー囚以外の親水性モノマーfB)
C)疎水性モノマー(q より成る共重合体(Dを構成成分とする可染性感光性樹
脂組成物を用いてガラス板等の基材表面に皮膜を設け、
マスクを用いて露光し、現像液にて現像する際に、現像
液として非イオン界面活性剤を含有する水溶液を用いる
ことを特徴とする可染性樹脂膜のパターン形成法に関す
る。
That is, the present invention comprises a) a dyeable monomer fAl b) a hydrophilic monomer other than the dyeable monomer fB)
C) Providing a film on the surface of a substrate such as a glass plate using a dyeable photosensitive resin composition containing a copolymer (D) consisting of a hydrophobic monomer (q),
The present invention relates to a pattern forming method for a dyeable resin film, which is characterized by using an aqueous solution containing a nonionic surfactant as the developing solution when exposing using a mask and developing with a developing solution.

本発明の非イオン界面活性剤含有水溶液を用いると現像
時間が無添加の場合に比して短縮出来る上に現像により
脱落した未露光部の樹脂の再付着も減少し、工程の合理
化と品質の向上及び収率の向上に役立つ。この場合非イ
オン界面活性剤は未露光部への水の濡れと浸透促進剤、
脱落樹脂の再付着防止剤として作用し、短時間に現像を
可能にするものと推定される。
By using the nonionic surfactant-containing aqueous solution of the present invention, the development time can be shortened compared to when no additive is used, and the redeposition of resin in unexposed areas that has fallen off during development is also reduced, streamlining the process and improving quality. Useful for improving production and yield. In this case, the nonionic surfactant is a water wetting and penetration enhancer in the unexposed area.
It is presumed that it acts as a re-deposition preventive agent for the fallen resin and enables development in a short time.

界面活性剤の中でもアニオン界面活性剤は可染性感光性
樹脂とイオン的に結合する為に、現像液にアニオン界面
活性剤を添加することにより現像性が悪くなる。又、カ
チオン界面活性剤を用いると現像時間の短縮及び未露光
樹脂組成物の再付着がなくなるが、これを染料で染色し
た場合、染色された露光部の透明性が失われ商品価値が
なくなってしまうので不適当であった。
Among surfactants, anionic surfactants are ionically bonded to the dyeable photosensitive resin, so adding anionic surfactants to the developer deteriorates the developability. In addition, using a cationic surfactant shortens the development time and eliminates the redeposition of unexposed resin compositions, but when this is dyed with dyes, the dyed exposed areas lose transparency and have no commercial value. It was inappropriate because it would be stored away.

本発明で用いられる非イオン界面活性剤としてはポリオ
キシエチレンアルキルエーテル及ヒポリオキシエチレン
アルキルフェノールエーテル系、ソルビタン脂肪酸エス
テル系、ポリオキシエチレンソルビタン脂肪酸エステル
糸、ポリオキシエチレンア、シルエステル系、オキシエ
チレンオキシプロピレンブロックボリマー、脂肪酸モノ
グリセライド、等が挙げられる。これらは1種又は2種
以上の混合系でも良い。これら非イオン界面活性剤の使
用量は水1000部に対して0.1〜50部が好ましく
、特に0.5〜10部が好ましい。又現像温度は15〜
80℃が好ましい。
Nonionic surfactants used in the present invention include polyoxyethylene alkyl ether and hypopolyoxyethylene alkylphenol ether, sorbitan fatty acid ester, polyoxyethylene sorbitan fatty acid ester thread, polyoxyethylene alkyl ester, oxyethylene Examples include oxypropylene block polymers, fatty acid monoglycerides, and the like. These may be used alone or in a mixed system of two or more. The amount of these nonionic surfactants used is preferably 0.1 to 50 parts, particularly preferably 0.5 to 10 parts, per 1000 parts of water. Also, the developing temperature is 15~
80°C is preferred.

本発明で用いられる可染性感光性樹脂組成物としては例
えば次のようなものが挙げられる。
Examples of the dyeable photosensitive resin composition used in the present invention include the following.

即ち、可染性モノマー(A)、親水性モノマー(刑、疎
水性モノマー(C)より成る共重合体(D又はこれに感
光剤、例えば4.4′−ジアジドカルコン、2゜6−ビ
ス(4−アジドペンザルノシクロヘキサノン、2.6−
ビス(4−アジドベンザルノシクロヘキサノン、2.6
−ビス(4−アジドベンザル)4−メチルシクロヘキサ
ノン、1.3−ビス(4−アジドベンザル)−2−プロ
パノン等ヲ組合せて可染性感光性樹脂組成物としたもの
、又はこの共重合体(口に感光性基例えばシンナモイル
基、アジド基、アクリル基、スチリルピリジニウム塩構
造又はスチリルキノリウム塩構造等を有する化合物を反
応させて可染性感光性樹脂組成物としたもの等がある。
That is, a copolymer (D) consisting of a dyeable monomer (A), a hydrophilic monomer (C), a hydrophobic monomer (C), or a photosensitive agent such as 4,4'-diazide chalcone, 2°6-bis (4-azidopenzalnocyclohexanone, 2.6-
Bis(4-azidobenzalnocyclohexanone, 2.6
- A dyeable photosensitive resin composition made by combining bis(4-azidobenzal)4-methylcyclohexanone, 1,3-bis(4-azidobenzal)-2-propanone, etc., or a copolymer of this There are dyeable photosensitive resin compositions prepared by reacting compounds having a photosensitive group such as a cinnamoyl group, an azide group, an acrylic group, a styrylpyridinium salt structure, or a styrylquinolium salt structure.

可染性モノマー(A)、親水性モノマー(B、疎水性モ
ノマー(C)よりなる共重合体aそれ自体を可染性感光
性樹脂組成物として用いる場合、モノマーとしてシンナ
モイル基、アジド基、アクリル基、スチリルピリジニウ
ム塩構造又はスチリルキノリウム塩構造等を有するモノ
マーを共重合させて得た可染性感光性樹脂組成物が好ま
しい。
When copolymer a itself consisting of a dyeable monomer (A), a hydrophilic monomer (B, and a hydrophobic monomer (C)) is used as a dyeable photosensitive resin composition, the monomers may include a cinnamoyl group, an azide group, and an acrylic group. A dyeable photosensitive resin composition obtained by copolymerizing a monomer having a styrylpyridinium salt structure, a styrylquinolium salt structure, or the like is preferred.

本発明で用いられる可染性モノマー(A)としては例え
ば次のものが挙げられる。
Examples of the dyeable monomer (A) used in the present invention include the following.

(N、N−ジメチルアミツノエチルアクリレート、(N
、N−ジメチルアミノ)エチルメタクリレート、(N、
N−ジエチルアミノ)エチルアクリレート、(N、N−
ジエチルアミツノエチルメタクリレート、(N、N−ジ
メチルアミノプロピルアクリルアミド、(N、N−ジメ
チルアミツノプロビルメタクリルアミド、(N、N−ジ
メチルアミツノエチルビニルエーテル、(N、N−ジメ
チルアミノ)プロピルアクリレート、(N、N−ジメチ
ルアミノンプロピルメタクリレート、4−ビニルピリジ
ン、ジアリルアミン、2−ヒドロキシ−3−メタクリロ
イルオキシプロピル、トリメチルアンモニウムクロライ
ド、メタクリロイルオキシエチルトリメチルアンモニウ
ムクロライド。
(N,N-dimethylaminoethyl acrylate, (N
, N-dimethylamino)ethyl methacrylate, (N,
N-diethylamino)ethyl acrylate, (N,N-
Diethylamitunoethyl methacrylate, (N,N-dimethylaminopropylacrylamide, (N,N-dimethylaminopropyl methacrylamide), (N,N-dimethylamitunoethyl vinyl ether, (N,N-dimethylamino)propyl acrylate) , (N,N-dimethylaminonepropyl methacrylate, 4-vinylpyridine, diallylamine, 2-hydroxy-3-methacryloyloxypropyl, trimethylammonium chloride, methacryloyloxyethyltrimethylammonium chloride.

又本発明で用いられる親水性モノマー(Bとしては次の
ものが挙げられる。
Further, examples of the hydrophilic monomer (B) used in the present invention include the following.

ヒドロキシエチルアクリレート、ヒドロキシエチルメタ
クリレート、アクリルアミド、メタクリルアミド、ビニ
ルピロリドン、N、N −ジメチルアクリルアミド。
Hydroxyethyl acrylate, hydroxyethyl methacrylate, acrylamide, methacrylamide, vinylpyrrolidone, N,N-dimethylacrylamide.

又本発明で用いられる疎水性モノマー(C)としてはメ
チルアクリレート、メチルメタクリレート、エチルアク
リレート、スチレン、p−メチルスチレン、ブチルアク
リレート、ブチルメタクリレート等が挙げられる。
Examples of the hydrophobic monomer (C) used in the present invention include methyl acrylate, methyl methacrylate, ethyl acrylate, styrene, p-methylstyrene, butyl acrylate, and butyl methacrylate.

これら可染性モノマー(A)、親水性モノマーfBl、
疎水性モノマー(Qの配合割合は可染性モノマー(A)
10〜80重量%、親水性モノマー(T32〜60重量
%、疎水性モノマーfQ s〜50重景%であるものが
好ましい。これらのモノマーは従来技術により重合出来
る。
These dyeable monomers (A), hydrophilic monomer fBl,
Hydrophobic monomer (the blending ratio of Q is the dyeable monomer (A)
10 to 80% by weight of hydrophilic monomers (T32 to 60% by weight) and hydrophobic monomers fQs to 50% by weight. These monomers can be polymerized by conventional techniques.

又本発明で用いられる可染性感光性樹脂組成物はガラス
板等に塗布し易くする為に有機溶剤に希釈されて用いら
れる。有機溶剤としては例えばメチルセロソルブ、エチ
ルセロソルブ、エチレングリコールモノエチルエーテル
アセf −ト、ジグライム、メチルイソブチルケトン、
トルエン、キシレン等が挙げられる。
Further, the dyeable photosensitive resin composition used in the present invention is diluted with an organic solvent to make it easier to apply to glass plates and the like. Examples of organic solvents include methyl cellosolve, ethyl cellosolve, ethylene glycol monoethyl ether acetate, diglyme, methyl isobutyl ketone,
Examples include toluene and xylene.

この可染性感光性樹脂組成物を塗布したガラス等の基材
はマスクを介して紫外線等により露光される。未露光部
は非イオン界面活性剤を含有する水溶液により現像され
る。
A base material such as glass coated with this dyeable photosensitive resin composition is exposed to ultraviolet light or the like through a mask. The unexposed areas are developed with an aqueous solution containing a nonionic surfactant.

このように現像された樹脂の膜厚は例えば0.2〜10
μの任意の厚さに膜を作成出来る。
The film thickness of the resin developed in this way is, for example, 0.2 to 10
A film can be created with any thickness of μ.

現像された所定のパターンを有するガラス、プラスチッ
ク等の基材はアニオン染料により染色される。
A substrate such as glass or plastic having a developed predetermined pattern is dyed with an anionic dye.

アニオン性染料としてはカラーインデックス(5oci
ety of Dyers and Colourls
ts発行)にC,lAc1dとして記載されている酸性
染料、同じくC0I Directとして記載されてい
る直接染料及び同じ< C−I Reactiveとし
て記載されている反応性染料等が挙げられるが、特に酸
性染料が好ましい。
Color index (5oci) is an anionic dye.
ety of Dyers and Colors
Examples include acid dyes listed as C, lAc1d in the same C0I Direct, reactive dyes listed as C-I Reactive, etc., but especially acidic dyes. preferable.

(実施例) 実施例1゜ ジメチルアミノプロピルアクリルアミド   30部2
−ヒドロキシエチルメタクリレート     15部ビ
ニルピロリドン              34’メ
チルメタクリレート            30#ジ
メチルアミノアクリルアミド        91より
成る共重合体16部に4,4−ジアジドカルコン0.6
5部、エチルセロソルブ84部を混合溶解させた溶液を
可染性感光性樹脂液とした。
(Example) Example 1゜Dimethylaminopropylacrylamide 30 parts 2
-Hydroxyethyl methacrylate 15 parts Vinylpyrrolidone 34' Methyl methacrylate 30# Dimethylaminoacrylamide 16 parts of a copolymer consisting of 91 and 0.6 parts of 4,4-diazide chalcone
A dyeable photosensitive resin liquid was prepared by mixing and dissolving 5 parts of ethyl cellosolve and 84 parts of ethyl cellosolve.

次にガラス基板にシランカップリング剤KBM503(
信越化学工業■ン10%エタノール溶液を塗布し風乾後
110℃、5分間加熱乾燥したものを塗布用基材とした
Next, silane coupling agent KBM503 (
A 10% ethanol solution of Shin-Etsu Chemical Co., Ltd. was applied, air-dried, and then heated at 110° C. for 5 minutes to prepare a coating substrate.

この塗布用基材表面にロールコータ−法により前記可染
性感光性樹脂液を塗布し、これを100℃、30分乾燥
後、所定のパターンを有するマスクを介して面照度8 
mW/ cm2のUV照射を15秒間行い、エマルゲン
913(花王石鹸■製、ポリオキシエチレンノニルフェ
ノールエーテル型非イオン界面活性剤〕を水1000部
に対して2部、含有する60℃の現像液にて撹拌下、5
分間現像を行うと照射部のみ可染膜を有するガラス基板
が得られた。この可染性膜は0.7μの膜厚であった。
The dyeable photosensitive resin liquid was applied to the surface of the coating base material by a roll coater method, and after drying at 100°C for 30 minutes, the surface illuminance was 8.
UV irradiation was carried out at mW/cm2 for 15 seconds, and a developer solution at 60°C containing 2 parts of Emulgen 913 (polyoxyethylene nonylphenol ether type nonionic surfactant manufactured by Kao Soap ■) per 1000 parts of water was used. under stirring, 5
When development was carried out for a minute, a glass substrate having a dyeable film only in the irradiated area was obtained. This dyeable film had a thickness of 0.7μ.

このガラス基板を350℃、30分間乾燥後、レッド2
】P(日本化薬■裂、カラーフィルター用色素)を0.
2%となるように水に溶解させ、60℃、】0分間染色
を行うと濃厚赤色のパターンに染色されたガラス板が得
られた。このガラス板は未露光部への現像による脱落樹
脂の再付着も極めて少く画像は極めて鮮明であった。
After drying this glass substrate at 350°C for 30 minutes, Red 2
] P (Nippon Kayaku, color filter dye) was 0.
When it was dissolved in water to a concentration of 2% and dyed at 60°C for 0 minutes, a glass plate dyed in a deep red pattern was obtained. In this glass plate, there was very little re-adhesion of the resin that had fallen off during development to the unexposed areas, and the image was extremely clear.

参考例1゜ 実施例】に於いてエマルゲン913を含まない60℃の
現像液を用いて同様の操作を行った所、未露光部ガラス
板への脱落樹脂の再付着は実施例1に比して多く、実施
例1と同様の鮮明な画像を得るに要する現像時間は13
分を要した。この場合でも未露光部ガラス板への脱落樹
脂の再付着の防止は不充分であった。
In Reference Example 1゜Example, when the same operation was carried out using a 60°C developing solution that did not contain Emulgen 913, the re-adhesion of the fallen resin to the unexposed glass plate was different from that in Example 1. The development time required to obtain a clear image similar to that in Example 1 was 13
It took several minutes. Even in this case, prevention of re-adhesion of the fallen resin to the unexposed glass plate was insufficient.

実施例2゜ 実施例】に於いてエマルゲン9J3の代りにエマルゲン
930(花王石鹸■製、ポリオキシエチレンノニルフェ
ノールエーテル型非イオン界面活性剤)を水1000部
に対して1.8部含有する現像液を用いて実施例1と同
様の操作を行った所、実施例】と同様の結果が得られた
Example 2 In Example 2, a developer containing 1.8 parts of Emulgen 930 (manufactured by Kao Soap, polyoxyethylene nonylphenol ether type nonionic surfactant) per 1000 parts of water was used instead of Emulgen 9J3. When the same operation as in Example 1 was carried out using , the same results as in Example were obtained.

実施例3゜ ジメチルアミノプロピルアクリルアミド   32部2
−ヒドロキシエチルメタクリレート     」21ビ
ニルピロリドン              161ジ
メチル了ミノアクリルアミド       131ブチ
ル了クリレート             1】#メチ
ルメタクリレート            J4Iより
成る共重合体17部に2.6−ビス(4−アジドヘンザ
ル)4−メチルシクロヘキサノン0.78部、エチルセ
ロノル183部を混合溶解させた溶液な可染性感光性樹
脂液とした。
Example 3゜Dimethylaminopropylacrylamide 32 parts 2
-Hydroxyethyl methacrylate 21 Vinyl pyrrolidone 161 Dimethyl minoacrylamide 131 Butyl acrylate 1] #Methyl methacrylate 17 parts of a copolymer consisting of J4I, 0.78 part of 2,6-bis(4-azidohenzal)4-methylcyclohexanone, A dyeable photosensitive resin liquid was prepared by mixing and dissolving 183 parts of ethylcelonol.

この可染性感光性樹脂液を実施例1と同様の操作により
ガラス板に塗布、乾燥、パターンを有するマスクを介し
てのUV照射を行った。
This dyeable photosensitive resin liquid was applied to a glass plate in the same manner as in Example 1, dried, and irradiated with UV through a patterned mask.

次にエマルゲン430(花王石鹸■製、ポリオキシエチ
レンオレイルエーテル)を水1000部に対して2.5
部含有する58℃の現像液にて8分間現像を行うと照射
部のみ可染膜を有するガラス基板が得られた。この可染
性膜の膜厚は0.8μであった。このガラス基板を15
0℃、30分間乾燥後、グリーンIF(日本化薬■製、
カラーフィルター用色素)を0.1%となるように水に
溶解させ、62℃、12分間染色を行うと濃厚緑色のパ
ターンに染色されたガラス板が得られた。このガラス板
は未露光部への現像による脱落樹脂の再付着もなく、画
像は極めて鮮明であった。
Next, add 2.5 parts of Emulgen 430 (manufactured by Kao Soap ■, polyoxyethylene oleyl ether) to 1000 parts of water.
When development was carried out for 8 minutes using a developer at 58.degree. The thickness of this dyeable film was 0.8μ. 15 pieces of this glass substrate
After drying at 0℃ for 30 minutes, Green IF (manufactured by Nippon Kayaku ■,
Color filter dye) was dissolved in water to a concentration of 0.1% and dyed at 62° C. for 12 minutes to obtain a glass plate dyed in a deep green pattern. In this glass plate, there was no redeposition of the resin that had fallen off during development to the unexposed areas, and the image was extremely clear.

参考例2゜ 実施例3に於いてエマルゲン430を含まない58℃の
現像液を用いて同様の操作を行った所、未露光部ガラス
板への脱落樹脂の再付着は実施例3に比して多く、又実
施例3と同様の鮮明な画像を得るに要する現像時間は1
5分を豊した。この場合でも未露光部ガラス板への脱落
樹脂の再付着の防止は不充分であった。
Reference Example 2゜When the same operation as in Example 3 was performed using a developer at 58°C that did not contain Emulgen 430, the redeposition of the fallen resin to the unexposed glass plate was compared to that in Example 3. In addition, the developing time required to obtain a clear image similar to that in Example 3 is 1
I enriched my 5 minutes. Even in this case, prevention of re-adhesion of the fallen resin to the unexposed glass plate was insufficient.

実施例4゜ 実施例3に於いてエマルゲン430の代りにエマルゲン
9】3を水1000部に対して2.3部含有する現像液
を用いて実施例3と同様の操作を行った所、実施例3と
同様の結果が得られた。
Example 4 The same operation as in Example 3 was carried out using a developer containing 2.3 parts of Emulgen 9]3 per 1000 parts of water instead of Emulgen 430. Similar results to Example 3 were obtained.

(発明の効果) 本発明は可染性感光性樹脂膜の現像に非イオン界面活性
剤含有水溶液を使用するので現像時間が短縮出来るから
工程の合理化に役立つ。更に又未露光部への脱落樹脂の
再付着が防止出来るからより高品質のものが得られると
共に収率の向上に役立つ。従って本性は色分解用フィル
ターの品質向上が計れる上に工程の合理化によるコスト
ダウンに役立つ。
(Effects of the Invention) Since the present invention uses an aqueous solution containing a nonionic surfactant for developing the dyeable photosensitive resin film, the developing time can be shortened, which is useful for streamlining the process. Furthermore, since redeposition of the fallen resin to unexposed areas can be prevented, higher quality products can be obtained and the yield can be improved. Therefore, this property can not only improve the quality of color separation filters, but also help reduce costs by streamlining the process.

Claims (1)

【特許請求の範囲】 a)可染性モノマー(A) b)可染性モノマー(A)以外の親水性モノマー(B)
c)疎水性モノマー(C) より成る共重合体(D)を構成成分とする可染性感光性
樹脂組成物を用いて基材表面に皮膜を設けマスクを用い
て露光し、現像液にて現像する際に、現像液として非イ
オン界面活性剤を含有する水溶液を用いることを特徴と
する可染性樹脂膜のパターン形成法。
[Claims] a) Dyeable monomer (A) b) Hydrophilic monomer (B) other than the dyeable monomer (A)
c) A film is formed on the surface of the substrate using a dyeable photosensitive resin composition containing a copolymer (D) consisting of a hydrophobic monomer (C), and exposed using a mask, and then processed with a developer. A pattern forming method for a dyeable resin film, characterized in that during development, an aqueous solution containing a nonionic surfactant is used as a developer.
JP24532086A 1986-10-17 1986-10-17 Pattern forming method for dyeable resin film Expired - Lifetime JPH0644151B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24532086A JPH0644151B2 (en) 1986-10-17 1986-10-17 Pattern forming method for dyeable resin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24532086A JPH0644151B2 (en) 1986-10-17 1986-10-17 Pattern forming method for dyeable resin film

Publications (2)

Publication Number Publication Date
JPS63100443A true JPS63100443A (en) 1988-05-02
JPH0644151B2 JPH0644151B2 (en) 1994-06-08

Family

ID=17131905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24532086A Expired - Lifetime JPH0644151B2 (en) 1986-10-17 1986-10-17 Pattern forming method for dyeable resin film

Country Status (1)

Country Link
JP (1) JPH0644151B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5332607B2 (en) * 2006-02-22 2013-11-06 コニカミノルタ株式会社 Antireflection film, method for producing antireflection film, hard coat film, polarizing plate and display device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5026601A (en) * 1973-07-09 1975-03-19
JPS5611906A (en) * 1979-07-11 1981-02-05 Agency Of Ind Science & Technol Photo-insolubilizable polyvinyl alcohol derivative and its preparation
JPS6079349A (en) * 1983-10-06 1985-05-07 Mitsubishi Chem Ind Ltd Water-soluble photosensitive composition and organic color filter
JPS60129742A (en) * 1983-12-16 1985-07-11 Agency Of Ind Science & Technol Colored image
JPS60129743A (en) * 1983-12-16 1985-07-11 Agency Of Ind Science & Technol Polyvinyl alcohol type copolymer

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5026601A (en) * 1973-07-09 1975-03-19
JPS5611906A (en) * 1979-07-11 1981-02-05 Agency Of Ind Science & Technol Photo-insolubilizable polyvinyl alcohol derivative and its preparation
JPS6079349A (en) * 1983-10-06 1985-05-07 Mitsubishi Chem Ind Ltd Water-soluble photosensitive composition and organic color filter
JPS60129742A (en) * 1983-12-16 1985-07-11 Agency Of Ind Science & Technol Colored image
JPS60129743A (en) * 1983-12-16 1985-07-11 Agency Of Ind Science & Technol Polyvinyl alcohol type copolymer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5332607B2 (en) * 2006-02-22 2013-11-06 コニカミノルタ株式会社 Antireflection film, method for producing antireflection film, hard coat film, polarizing plate and display device

Also Published As

Publication number Publication date
JPH0644151B2 (en) 1994-06-08

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