JPS6298616A - Processing device - Google Patents

Abstract

PURPOSE:To allow the use of a soft landing type boat loader even under the state in which a jig is adhered to a processing tube by a reaction product by a method wherein an exfoliation device with which a jig will be moved is provided on a fork. CONSTITUTION:An exfoliation device 16, to be used to exfoliate the boat 7 adhered to the bottom face of a processing tube 1 with a reaction product by tremoring the boat 7, is provided on a fork 14. The exfoliation device 16 consists of a motor 17 used as an actuator, a slidably supported can shaft 18 arranged almost in parallel with the center line of the fork 14 and connected to a motor shaft fixed to the tip of the cam shaft 18 and arranged in such a manner that the engaging part 7c located at the front end of the boat 7 can be engaged to the tip of the cam shaft 18, and a pair of support posts located on the left and the right sides which are fixed almost vertically at the intermediate part of the fork 14 on both left and right sides of the cam shaft 18 in such a manner that the traverse deflection can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to processing technology, particularly to technology for loading and unloading objects into and out of process tubes using a soft land ink type boat loader, for example, in the manufacture of semiconductor devices.
The present invention relates to a technology that is used to diffuse impurities such as phosphorus into wafers.

[Background technology]

In the manufacture of semiconductor devices, a diffusion device is used to diffuse impurities into wafers. Multiple wafers are held in a jig called a boat, and the boat is placed on a fork so that it does not come in contact with the process tube. Some products are configured to prevent dust generation by conveying the material using a soft land ink.

However, in such a diffusion device, when performing phosphorus diffusion treatment, the port is glued to the process tube due to reaction products, and the fork is easily bent due to the high treatment temperature. The inventor of the present invention has revealed that there is a problem in that it cannot be used for processing.

Incidentally, as an example of the diffusion technique, a stock percentage formula % is used. [Object of the Invention] An object of the present invention is to provide a processing technique that can perform soft land ink in any case.

The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

[Summary of the invention]

To briefly explain the outline of a typical invention disclosed in this application, a peeling device for moving a workpiece holding jig is provided on a fork of a soft land ink type boat loader as follows. The bonded portion is peeled off by not moving the jig bonded to the tube, thereby making it possible to use a soft land ink type boat loader.

〔Example〕

FIG. 1 is a longitudinal sectional view showing a diffusion device which is an embodiment of the present invention, FIGS. 2, 3 and 4 are longitudinal sectional views for explaining its operation, and FIGS. The figures are similarly enlarged partial cross-sectional views with some parts omitted, and FIGS. 7, 8, and 9 are line diagrams.

In this embodiment, this diffusion device includes a process tube l formed of quartz glass or the like into a substantially cylindrical shape, and an internal chamber of this process tube l substantially forms a processing chamber 2. A heater 3 is installed outside the process tube 1, and the heater 3 is connected to a controller (
(not shown) to heat the processing chamber 2. A supply port 4 for introducing a processing gas such as phosphorus, poron, oxygen, nitrogen, etc. is provided at one end of the process tube 1, and a wafer as a processing object is provided at the other end of the process tube 1. A furnace mouth 5 is provided as an opening for taking in and taking out the furnace. A plurality of wafers 6 are held in a port 7 that is assembled using quartz glass or the like and are held in a substantially perpendicular manner so as to be lined up parallel to each other.

In front of the process tube l is a soft land ink type boat loader 10 (hereinafter referred to as a loader).

), and this loader 10 is equipped with an elevating mechanism II, a guide stand I2 that is raised and lowered approximately horizontally by the elevating mechanism, and an appropriate drive device (not shown) that is supported by the guide stand so as to be slidable in the front and back direction. The moving table 13 is configured to be driven by a moving table 13, and a fork 14 is cantilevered by one moving table. The fork 14 is formed of quartz glass or the like into a substantially cylindrical shape with a diameter smaller than that of the process tube l, and at the tip of the fork 14, a holding part 15 formed by cutting off the upper side of the cylinder holds the wafer 6. The port 7 is formed so as to be able to support the port 7 in a placed state.

The fork 14 is equipped with a peeling device 16 for slightly moving and peeling off the port 7 adhered to the bottom surface of the process tube 1 by a reaction product, and the peeling device 16 includes a motor 17 as an actuator and a A camshaft 18 is disposed substantially parallel to the line and is connected to the motor shaft and supported so as to be rotatable. The cam 19 is arranged and fixed, and a pair of left and right supports 20 are fixed to the left and right sides of the camshaft 18 at the middle part of the fork 14 to prevent the camshaft from swinging. ing.

Next, the effect will be explained.

As shown in FIG. 1, the port 7 holding a plurality of wafers 6 as objects to be processed is connected to a holding portion formed at the tip of the fork 14 when it is pulled out from the process tube l. 15.

When the port 7 is placed, the fork 14 is moved from the furnace opening 5 of the process tube 1 to the processing chamber 2 by the advancement of the moving table 13.
It is inserted inside. At this time, as shown in FIG. 2, the fork 14 is inserted and moved so that its lower surface does not contact the bottom surface of the processing chamber 2, so that the reaction products deposited on the bottom surface of the processing chamber 2 are removed. No dust will be generated by peeling off the material.

When the port 7 on the holding part 15 reaches a predetermined position in the approximate center of the processing chamber 2, the fork I4 stops its insertion movement and is slightly lowered by the lifting mechanism 11, so that the boat 7 is moved into the processing chamber 2. It is transferred onto the bottom of the inside. Subsequently, the fork 14 is pulled out from the furnace opening 5 of the process tube 1 to the outside of the processing chamber 2 as the moving table 13 retreats.

Thereafter, as shown in FIG. 3, the furnace port 5 of the process tube 1 is closed by the camp 8, and
When the processing chamber 2 is heated to a predetermined temperature, a processing gas such as phosphorus is introduced into the processing chamber 2 through the supply port 4 . The introduced processing gas contacts the group of wafers 6 held in the boat 7 to perform a predetermined diffusion process.

When the predetermined process is completed, the fork 14 is inserted into the process tube 1 through the furnace mouth 5, which is opened by removing the cap 8, as the moving stage 13 moves forward. At this time, the fork 14 is inserted directly under the boat 7 so as not to contact the bottom surface of the processing chamber 2 of the process tube 1, and as shown in FIG. An engaging portion 7 protruding from the front end of the
It is arranged so as to face the lower surface of C.

Next, when the motor 17 is activated and the cam 19 is erected via the camshaft 18 as shown in FIG. 6, the boat 7 is moved by the cam 19 as shown in FIG. The front end engaging portion 7C can be lifted up. Once lifted, the boat 7 is returned to its original horizontal transfer state as the cam 19 is lowered.

When the boat 7 is returned to its original position, the fork 14 is raised slightly, and then the process tube 1 is moved back by the movement number 13.
It is pulled out from the furnace mouth 5.

At this time, as in the above case, a soft landing will be applied, so the seat will be prevented.

Thereafter, the boat 7 is lowered from the holding part 15 of the fork 4 outside the process tube 1.

By the way, when phosphorus is used as the processing gas, if the boat is supported on the bottom of the processing chamber, reaction products will adhere to the contact area between the boat and the bottom of the processing chamber, causing the two to adhere. It will be done. Then, it becomes difficult to scoop up the bonded boat with the fork of the soft land ink type boat loader, and if you lift it forcibly, the fork may bend due to the adhesive force and the high temperature of the baking process, and the boat or process tube may become damaged. damage may occur.

For this reason, it is considered inappropriate to use a soft land ink type boat loader in processes where reactants are generated, such as phosphorus diffusion treatment, or in high-temperature processes.

However, in this embodiment, the use of a soft land ink type boat loader is realized by moving the glued boat and then scooping it up with a fork.

That is, when one side of the boat 7 is lifted by the cam 19 when the boat 7 is carried out from the processing chamber 2 of the process tube 1 by the fork 14, the leg 7a of the lifted side of the boat 7 touches the bottom surface of the processing chamber 2. peeled off from. At this time, since only one side of the boat is lifted, the bonded portion caused by the reaction product is easily peeled off.

On the other hand, the leg 7b, which remains seated on the bottom surface of the processing chamber 2, moves slightly when the boat 7 is lifted on one side and tilted, so that the bonded portion caused by the reaction product here is also easily peeled off. Become.

In this way, by lifting and moving the boat 7 on one side, the boat 7 is previously peeled off from the bottom surface of the processing chamber 2 in the process tube 1, so that the boat 7 can be easily scooped up by the fork 14.

By the way, Fig. 7, Fig. 8, and Fig. 9 are diagrams showing the temperature change over time in the process tube. When a soft land ink type boat loader is used, FIG. 9 shows a case where the soft land ink type boat loader according to this embodiment is used and the heating control of the heater is modified. As is clear from the comparison of Figures 7 and 8, where the solid line shows the temperature change at the furnace mouth, the broken line shows the temperature change at the center, and the chain line shows the temperature change at the back, sliding Temperature changes are larger than when using a dynamic boat loader.

Therefore, in this embodiment, the heating control pattern of the tweeter heater 3 is determined based on the temperature change in the soft land ink type boat loader, and the temperature change is suppressed as much as possible as shown in FIG. That is, fork 14
The fork 14 into the process tube 1 depends on the time from the start of the process and the heating capacity of the heater 3.
The temperature change inside the process tube 1 is controlled so as to compensate for the temperature drop caused by the increase in heat capacity due to the insertion of the tube and shorten the recovery time.

Although the invention made by the present inventor has been specifically explained above based on Examples, it goes without saying that the present invention is not limited to the Examples and can be modified in various ways without departing from the gist thereof. Nor.

For example, the peeling device is not limited to using a cam, a camshaft, and an actuator, but may also be configured using a link mechanism, a jack, or the like, or may be configured to rotate a fork itself.

The structure is not limited to lifting the port side end of the boat, but may be configured to lift the back end and both sides, or may be configured to lift the left or right side.

[Effects] (1) By providing the fork with a peeling device that moves the jig, the bond between the jig and the process tube can be peeled off before the jig is scooped up with the fork. A soft land ink type boat loader can also be used in conditions where the process tube is glued to the process tube.

(2) By using a soft land ink type boat loader, it is possible to prevent dust from being generated during the IIQ manual transport of objects to be processed, thereby improving yield and promoting automation. .

(3) By installing a peeling device on the fork, there is no need for a person to open the furnace mouth and apply impact to the boat to peel off the bonded parts of the boat, reducing work man-hours and improving throughput. 4. It is possible to improve work safety by eliminating dangerous work under high heat, and 4. It is possible to avoid harmful effects such as damage to the boat or process tube due to the application of impact.

+4+:'x+I ge1 By configuring the device to lift one side of the boat, the force required for peeling can be suppressed to a small level, so the device can be made smaller and lighter.

(5) By controlling the heating of the heater to suppress temperature changes caused by the use of a soft land ink type boat loader, the soft land ink type boat loader can be used even in the diffusion process where temperature accuracy and temperature cycles are limited by 19 hours. can be used.

[Application field]

The above explanation has mainly been about the case where the invention made by the present inventor is applied to a diffusion device, which is the field in which the invention has become popular. It can be applied to all processing equipment.

[Brief explanation of drawings]

Fig. 1 is a gentle sectional view showing a diffusion device which is an embodiment of the present invention; Figs. 2, 3 and 4 are longitudinal sectional views for explaining its operation; Figs. 5 and 6 The figures are enlarged partial cross-sectional views with some parts omitted, and FIGS. 7, 8, and 9 are line diagrams. l...process tube, 2...processing chamber, 3...
Heater, 4... Gas supply port, 5... Furnace port, 6...
Wafer (workpiece), 7...Boat (jig), 8...
- Cap, 10...Soft land ink type boat loader, 11... Lifting mechanism, 12... Guide stand, 13
...Moving table, 14...Fork, 15... Holding part, 16... Peeling device, 17... Motor (actuator), 18... Camshaft, 19... Cam, 20...・
・Strut. Figure A Figure B

Claims (1)

[Scope of Claims] 1. A processing device in which a fork of a soft land ink type boat loader is provided with a peeling device that moves a jig holding an object to be processed. 2. The processing device according to claim 1, wherein the peeling device is configured to lift one side of the jig. 3. The processing device according to claim 1, wherein the peeling device includes a cam that engages one side of the jig.