JPS629858B2 - - Google Patents
Info
- Publication number
- JPS629858B2 JPS629858B2 JP17614882A JP17614882A JPS629858B2 JP S629858 B2 JPS629858 B2 JP S629858B2 JP 17614882 A JP17614882 A JP 17614882A JP 17614882 A JP17614882 A JP 17614882A JP S629858 B2 JPS629858 B2 JP S629858B2
- Authority
- JP
- Japan
- Prior art keywords
- surface acoustic
- oscillation
- acoustic wave
- sno
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010897 surface acoustic wave method Methods 0.000 claims description 18
- 230000010355 oscillation Effects 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 6
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 150000004706 metal oxides Chemical class 0.000 claims description 3
- 238000001179 sorption measurement Methods 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 22
- 229910006404 SnO 2 Inorganic materials 0.000 description 14
- 239000010408 film Substances 0.000 description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 240000004050 Pentaglottis sempervirens Species 0.000 description 1
- 235000004522 Pentaglottis sempervirens Nutrition 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/11—Analysing solids by measuring attenuation of acoustic waves
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17614882A JPS5873851A (ja) | 1982-10-08 | 1982-10-08 | ガス検知器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17614882A JPS5873851A (ja) | 1982-10-08 | 1982-10-08 | ガス検知器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5873851A JPS5873851A (ja) | 1983-05-04 |
| JPS629858B2 true JPS629858B2 (zh) | 1987-03-03 |
Family
ID=16008495
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17614882A Granted JPS5873851A (ja) | 1982-10-08 | 1982-10-08 | ガス検知器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5873851A (zh) |
-
1982
- 1982-10-08 JP JP17614882A patent/JPS5873851A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5873851A (ja) | 1983-05-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Collins et al. | Amplification of acoustic surface waves with adjacent semiconductor and piezoelectric crystals | |
| Kino et al. | A normal mode theory for the Rayleigh wave amplifier | |
| US5003822A (en) | Acoustic wave microsensors for measuring fluid flow | |
| CA1322468C (en) | Constant temperature hygrometer | |
| JPH0218614B2 (zh) | ||
| US4726225A (en) | Surface acoustic wave gas flow rate sensor with self-heating feature | |
| US4342012A (en) | Surface acoustic wave device | |
| US4634913A (en) | Application of lithium tetraborate to electronic devices | |
| JPH057124A (ja) | 弾性表面波装置 | |
| Ippolito et al. | Comparison between conductometric and layered surface acoustic wave hydrogen gas sensors | |
| JPS629858B2 (zh) | ||
| Nomura et al. | SAW humidity sensor using dielectric hygroscopic polymer film | |
| US4065734A (en) | Elastic surface wave devices | |
| Coldren et al. | cw monolithic acoustic surface wave amplifier incorporated in a Δ v/v waveguide | |
| US3809931A (en) | Temperature-stabilized transducer device | |
| Kalantar-Zadeh et al. | A novel Love mode SAW sensor with ZnO layer operating in gas and liquid media | |
| Hejczyk et al. | WO_3-Pd Structure in SAW Sensor for Hydrogen Detection | |
| Kalantar-Zadeh et al. | A novel love mode device with nanocrystalline ZnO film for gas sensing applications | |
| JPH0247889B2 (ja) | Sutonriihasoshi | |
| Ippolito et al. | Comparison between conductometric and layered SAW hydrogen gas sensor | |
| JP2018155723A (ja) | 弾性波センサ | |
| US3873858A (en) | Acoustic surface wave phase shifter | |
| Ippolito et al. | Layered SAW nitrogen dioxide sensor with WO3 selective layer | |
| Solie | Acoustic surface wave convolver with bidirectional amplification | |
| JP2005189213A (ja) | 水素センサ |