JPS6297168U - - Google Patents
Info
- Publication number
- JPS6297168U JPS6297168U JP18801685U JP18801685U JPS6297168U JP S6297168 U JPS6297168 U JP S6297168U JP 18801685 U JP18801685 U JP 18801685U JP 18801685 U JP18801685 U JP 18801685U JP S6297168 U JPS6297168 U JP S6297168U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- electromagnetic coil
- alternating current
- evaporation apparatus
- beam evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005566 electron beam evaporation Methods 0.000 claims description 3
- 239000003990 capacitor Substances 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18801685U JPH027869Y2 (pt) | 1985-12-06 | 1985-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18801685U JPH027869Y2 (pt) | 1985-12-06 | 1985-12-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6297168U true JPS6297168U (pt) | 1987-06-20 |
| JPH027869Y2 JPH027869Y2 (pt) | 1990-02-26 |
Family
ID=31138994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18801685U Expired JPH027869Y2 (pt) | 1985-12-06 | 1985-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH027869Y2 (pt) |
-
1985
- 1985-12-06 JP JP18801685U patent/JPH027869Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH027869Y2 (pt) | 1990-02-26 |