JPS6297168U - - Google Patents

Info

Publication number
JPS6297168U
JPS6297168U JP18801685U JP18801685U JPS6297168U JP S6297168 U JPS6297168 U JP S6297168U JP 18801685 U JP18801685 U JP 18801685U JP 18801685 U JP18801685 U JP 18801685U JP S6297168 U JPS6297168 U JP S6297168U
Authority
JP
Japan
Prior art keywords
electron beam
electromagnetic coil
alternating current
evaporation apparatus
beam evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18801685U
Other languages
English (en)
Japanese (ja)
Other versions
JPH027869Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18801685U priority Critical patent/JPH027869Y2/ja
Publication of JPS6297168U publication Critical patent/JPS6297168U/ja
Application granted granted Critical
Publication of JPH027869Y2 publication Critical patent/JPH027869Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP18801685U 1985-12-06 1985-12-06 Expired JPH027869Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18801685U JPH027869Y2 (enrdf_load_stackoverflow) 1985-12-06 1985-12-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18801685U JPH027869Y2 (enrdf_load_stackoverflow) 1985-12-06 1985-12-06

Publications (2)

Publication Number Publication Date
JPS6297168U true JPS6297168U (enrdf_load_stackoverflow) 1987-06-20
JPH027869Y2 JPH027869Y2 (enrdf_load_stackoverflow) 1990-02-26

Family

ID=31138994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18801685U Expired JPH027869Y2 (enrdf_load_stackoverflow) 1985-12-06 1985-12-06

Country Status (1)

Country Link
JP (1) JPH027869Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH027869Y2 (enrdf_load_stackoverflow) 1990-02-26

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