JPS6297166U - - Google Patents
Info
- Publication number
- JPS6297166U JPS6297166U JP18713985U JP18713985U JPS6297166U JP S6297166 U JPS6297166 U JP S6297166U JP 18713985 U JP18713985 U JP 18713985U JP 18713985 U JP18713985 U JP 18713985U JP S6297166 U JPS6297166 U JP S6297166U
- Authority
- JP
- Japan
- Prior art keywords
- thickness adjustment
- film
- substrate surface
- evaporation source
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18713985U JPS6297166U (en:Method) | 1985-12-04 | 1985-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18713985U JPS6297166U (en:Method) | 1985-12-04 | 1985-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6297166U true JPS6297166U (en:Method) | 1987-06-20 |
Family
ID=31137336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18713985U Pending JPS6297166U (en:Method) | 1985-12-04 | 1985-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6297166U (en:Method) |
-
1985
- 1985-12-04 JP JP18713985U patent/JPS6297166U/ja active Pending