JPS6296558U - - Google Patents

Info

Publication number
JPS6296558U
JPS6296558U JP17271086U JP17271086U JPS6296558U JP S6296558 U JPS6296558 U JP S6296558U JP 17271086 U JP17271086 U JP 17271086U JP 17271086 U JP17271086 U JP 17271086U JP S6296558 U JPS6296558 U JP S6296558U
Authority
JP
Japan
Prior art keywords
diffusion layer
moisture
atmosphere
humidity
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17271086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0313721Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986172710U priority Critical patent/JPH0313721Y2/ja
Publication of JPS6296558U publication Critical patent/JPS6296558U/ja
Application granted granted Critical
Publication of JPH0313721Y2 publication Critical patent/JPH0313721Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Non-Adjustable Resistors (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP1986172710U 1986-11-12 1986-11-12 Expired JPH0313721Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986172710U JPH0313721Y2 (en:Method) 1986-11-12 1986-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986172710U JPH0313721Y2 (en:Method) 1986-11-12 1986-11-12

Publications (2)

Publication Number Publication Date
JPS6296558U true JPS6296558U (en:Method) 1987-06-19
JPH0313721Y2 JPH0313721Y2 (en:Method) 1991-03-28

Family

ID=31109498

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986172710U Expired JPH0313721Y2 (en:Method) 1986-11-12 1986-11-12

Country Status (1)

Country Link
JP (1) JPH0313721Y2 (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0210146A (ja) * 1988-06-28 1990-01-12 Nok Corp 感湿素子およびその動作回路

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53132981A (en) * 1977-04-25 1978-11-20 Massachusetts Inst Technology Charge flow transistor and machine using same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53132981A (en) * 1977-04-25 1978-11-20 Massachusetts Inst Technology Charge flow transistor and machine using same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0210146A (ja) * 1988-06-28 1990-01-12 Nok Corp 感湿素子およびその動作回路

Also Published As

Publication number Publication date
JPH0313721Y2 (en:Method) 1991-03-28

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