JPS6294988A - 電界効果型圧力センサ - Google Patents

電界効果型圧力センサ

Info

Publication number
JPS6294988A
JPS6294988A JP23594585A JP23594585A JPS6294988A JP S6294988 A JPS6294988 A JP S6294988A JP 23594585 A JP23594585 A JP 23594585A JP 23594585 A JP23594585 A JP 23594585A JP S6294988 A JPS6294988 A JP S6294988A
Authority
JP
Japan
Prior art keywords
pressure
gate electrode
pressure sensor
insulating film
field effect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23594585A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0587032B2 (enrdf_load_html_response
Inventor
Hideji Saneyoshi
実吉　秀治
Masaya Hijikigawa
正也 枅川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP23594585A priority Critical patent/JPS6294988A/ja
Priority to DE19863635462 priority patent/DE3635462A1/de
Priority to GB8625084A priority patent/GB2183906B/en
Publication of JPS6294988A publication Critical patent/JPS6294988A/ja
Priority to US07/338,545 priority patent/US4894698A/en
Publication of JPH0587032B2 publication Critical patent/JPH0587032B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP23594585A 1985-10-21 1985-10-21 電界効果型圧力センサ Granted JPS6294988A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP23594585A JPS6294988A (ja) 1985-10-21 1985-10-21 電界効果型圧力センサ
DE19863635462 DE3635462A1 (de) 1985-10-21 1986-10-18 Feldeffekt-drucksensor
GB8625084A GB2183906B (en) 1985-10-21 1986-10-20 Pressure sensor
US07/338,545 US4894698A (en) 1985-10-21 1989-04-17 Field effect pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23594585A JPS6294988A (ja) 1985-10-21 1985-10-21 電界効果型圧力センサ

Publications (2)

Publication Number Publication Date
JPS6294988A true JPS6294988A (ja) 1987-05-01
JPH0587032B2 JPH0587032B2 (enrdf_load_html_response) 1993-12-15

Family

ID=16993546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23594585A Granted JPS6294988A (ja) 1985-10-21 1985-10-21 電界効果型圧力センサ

Country Status (1)

Country Link
JP (1) JPS6294988A (enrdf_load_html_response)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS645075A (en) * 1987-06-26 1989-01-10 Nippon Denso Co Semiconductor pressure sensor and manufacture of the same
JPH0310164A (ja) * 1989-06-08 1991-01-17 Honda Motor Co Ltd 半導体センサ
JP2013072712A (ja) * 2011-09-27 2013-04-22 Toshiba Corp 歪検知装置及びその製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102044627B1 (ko) * 2018-04-30 2019-11-13 주식회사 이너센서 전계 효과를 이용한 압력 센서 및 이의 제조 방법

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS645075A (en) * 1987-06-26 1989-01-10 Nippon Denso Co Semiconductor pressure sensor and manufacture of the same
JPH0310164A (ja) * 1989-06-08 1991-01-17 Honda Motor Co Ltd 半導体センサ
JP2013072712A (ja) * 2011-09-27 2013-04-22 Toshiba Corp 歪検知装置及びその製造方法

Also Published As

Publication number Publication date
JPH0587032B2 (enrdf_load_html_response) 1993-12-15

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