JPS6294974A - Semiconductor integrated circuit device - Google Patents

Semiconductor integrated circuit device

Info

Publication number
JPS6294974A
JPS6294974A JP60235938A JP23593885A JPS6294974A JP S6294974 A JPS6294974 A JP S6294974A JP 60235938 A JP60235938 A JP 60235938A JP 23593885 A JP23593885 A JP 23593885A JP S6294974 A JPS6294974 A JP S6294974A
Authority
JP
Japan
Prior art keywords
transistor
stage transistor
aluminum wiring
collector
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60235938A
Other languages
Japanese (ja)
Inventor
Kenshiro Okamura
岡村 健史郎
Seiichiro Kikuyama
菊山 誠一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP60235938A priority Critical patent/JPS6294974A/en
Publication of JPS6294974A publication Critical patent/JPS6294974A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/08Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/082Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including bipolar components only
    • H01L27/0823Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including bipolar components only including vertical bipolar transistors only
    • H01L27/0825Combination of vertical direct transistors of the same conductivity type having different characteristics,(e.g. Darlington transistors)

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Bipolar Integrated Circuits (AREA)

Abstract

PURPOSE:To improve the saturation characteristics of a transistor without increasing its circuit area, by extending an aluminum wiring of the common collector of a pre-stage transistor and a post-stage transistor to the vicinity of the base region of the pre-stage transistor to make a current pass via the aluminum wiring of low resistance. CONSTITUTION:The electric resistance of N<+> type buried layer 14 from a post- stage transistor 2 to a pre-stage transistor 1 becomes apparently small, because the resistance of an extended aluminum wiring of a collector part is connected in parallel. Generally, the resistance of the aluminum wiring of the collector part is sufficiently small as compared with that of the buried layer, so that only the resistance R1 of the buried layer 14 is dominant. That is, the saturation voltage of transistor 2 V CE2' is given by the relation V CE2'=I3R1+I4R2+VBE 2. The aluminum wiring of collector is extended to the vicinity of base region of the pre-stage transistor 1, so I4R2-0 and V CE2>V CE2' where V CE2' is the saturation voltage. Saturation characteristics of the post-stage transistor 2 can be improved, thereby.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発゛明は、半導体集積回路装置に関し、特にnp n
、 )ランジスタにより構成されるダーリントン回路に
おいて回路面積を増大させることなく、トランジスタの
飽和特性を改善したものに関するものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a semiconductor integrated circuit device, and particularly to an np n
, ) This relates to a Darlington circuit composed of transistors in which the saturation characteristics of the transistors are improved without increasing the circuit area.

〔従来の技術〕[Conventional technology]

従来から電気回路において、高電流利得を得るためにn
pn)ランジスタ2(固からなるダーリントン回路が多
く用いられており、その−例を第2図に示す。この回路
では、前、後段のトランジスタ1.2のコレクタが共通
となり、前段トランジスタ1のエミッタが後段l・フン
ジスタ2のベースに接続されている。
Conventionally, in electrical circuits, n is used to obtain high current gain.
A Darlington circuit consisting of transistor 2 (hard pn) is often used, an example of which is shown in Figure 2. In this circuit, the collectors of the front and rear transistors 1.2 are common, and the emitter of the front transistor 1 is is connected to the base of the rear stage l fungistar 2.

この様な回路のパターンレイアウトはその面積的な制約
から、2つのトランジスタが同一の分離島に作られてい
る。その配置の一例を第3図に示す。図において、5は
前、後段トランジスタに共通なコレクタ、6は前段トラ
ンジスタ1のベース、7はそのエミッタ、9は後段トラ
ンジスタ2のベース、10はそのエミッタ、8はエミッ
タIOの引き出し用アルミ配線、11は前9後段トラン
ジスタ1.2に共通なコレクタ部のアルミ配線、17は
コレクタウオールである。
Due to area constraints in the pattern layout of such a circuit, two transistors are formed on the same isolated island. An example of the arrangement is shown in FIG. In the figure, 5 is a collector common to the front and rear transistors, 6 is the base of the front transistor 1, 7 is its emitter, 9 is the base of the rear transistor 2, 10 is its emitter, 8 is an aluminum wiring for drawing out the emitter IO, Reference numeral 11 indicates aluminum wiring at the collector portion common to the front nine rear-stage transistors 1.2, and 17 indicates a collector all.

この回路配置においては、後段トランジスタ2のエミッ
タ10の引き出しアルミ配線8は、アルミの電流密度を
考慮し大きくする必要がある。そのため、コレクタ部の
アルミ配線8は回路配置面積上の制約により、後段トラ
ンジスタ2のベース9側にこれに近接して配置されてい
る。また、第4図は第3図のIV−IV線断面を示し、
図中14はn十型埋込層、15は前段トランジスタ1の
ベース6からn串型埋込層14までのエピタキシャル抵
抗、16は前段トランジスタ1から後段トランジスタ2
までのn串型埋込層14の抵抗である。
In this circuit arrangement, the aluminum wire 8 drawn out from the emitter 10 of the subsequent transistor 2 needs to be made large in consideration of the current density of aluminum. Therefore, the aluminum wiring 8 in the collector portion is placed close to the base 9 side of the subsequent transistor 2 due to restrictions on the circuit layout area. In addition, FIG. 4 shows a cross section along the line IV-IV in FIG. 3,
In the figure, 14 is an n-shaped buried layer, 15 is an epitaxial resistor from the base 6 of the front-stage transistor 1 to the n-shaped buried layer 14, and 16 is an epitaxial resistor from the front-stage transistor 1 to the rear-stage transistor 2.
This is the resistance of the n-shaped buried layer 14 up to .

このような回路において、後段トランジスタ2の飽和電
圧V CF2は、前段トランジスタ1の飽和電圧VCE
Iと該後段トランジスタ2のベース9・エミッタ10間
電圧V BF2の和となる。すなわちVCE2−VCE
I +VBE2       −(1)である。また、
第3図に示すように後段トランジスタ2のベース9側に
コレクタの引き出し用アルミ配線11を配置したとき、
前段トランジスタ1の飽和電圧V CEIは、該トラン
ジスタ1のベース6からn串型埋込層14までのエピタ
キシャル抵抗R1を流れる電流I3及び上記前段トラン
ジスタ1から後段トランジスタ2までのn串型埋込層1
4の抵抗R2を流れる電流I4を用いてVCEI  −
I3  R1+T4  R2・・・(2)と表わせる。
In such a circuit, the saturation voltage VCF2 of the subsequent transistor 2 is equal to the saturation voltage VCE of the preceding transistor 1.
It is the sum of I and the voltage VBF2 between the base 9 and the emitter 10 of the subsequent transistor 2. i.e. VCE2-VCE
I+VBE2-(1). Also,
As shown in FIG. 3, when the aluminum wiring 11 for extracting the collector is placed on the base 9 side of the rear-stage transistor 2,
The saturation voltage V CEI of the front transistor 1 is determined by the current I3 flowing through the epitaxial resistor R1 from the base 6 of the transistor 1 to the n-shaped buried layer 14 and the n-shaped buried layer from the front transistor 1 to the rear transistor 2. 1
Using the current I4 flowing through the resistor R2 of 4, VCEI −
It can be expressed as I3 R1+T4 R2...(2).

従って、(1)式及び(2)式より後段トランジスタ2
の飽和電圧V CF2は VCE2 = 13 R1+ I4 R2+VBE2 
 ・・・(3)となる。
Therefore, from equations (1) and (2), the latter transistor 2
The saturation voltage V CF2 is VCE2 = 13 R1+ I4 R2+VBE2
...(3).

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

従来の半導体集積回路装置は以上のように構成されてい
るので、後段トランジスタ2の飽和電圧は、n串型埋込
層14.の抵抗に依存し、前段トランジスタ1のコレク
タ電流が大きくなればなる程大きくなるという欠点があ
った。
Since the conventional semiconductor integrated circuit device is configured as described above, the saturation voltage of the latter-stage transistor 2 is determined by the n-shaped buried layer 14. The disadvantage is that the collector current of the preceding stage transistor 1 increases as the collector current increases.

本発明は上記のような問題点を解決するためになされた
もので、回路面積を増大させることなくトランジスタの
飽和特性を改善できる半導体集積回路装置を提供するこ
とを目的とする。
The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a semiconductor integrated circuit device that can improve the saturation characteristics of a transistor without increasing the circuit area.

〔問題点を解決するための手段〕[Means for solving problems]

本発明に係る半導体集積回路装置は、前段トランジスタ
のベース部を小さくし、後段のトランジスタのエミッタ
部の引き出しアルミ配線を上記前段のトランジスタのベ
ース部に配置し、これにより生じたスペースを利用して
前、後段のトランジスタの共通コ・レクタのアルミ配線
を上記前段のトランジスタのベース領域付近まで延ばし
たものである。
In the semiconductor integrated circuit device according to the present invention, the base portion of the front-stage transistor is made small, the lead-out aluminum wiring for the emitter portion of the rear-stage transistor is placed in the base portion of the front-stage transistor, and the space created by this is utilized. The common collector aluminum wiring of the front and rear transistors is extended to near the base region of the front transistor.

〔作用〕[Effect]

本発明においては、前、後段のトランジスタの共通コレ
クタのアルミ配線を前段のトランジスタのベース領域付
近まで延ばしたから、前段のトランジスタから後段のト
ランジスタまでの埋込層を流れていた電流は埋込層より
十分抵抗の小さい上記アルミ配線を流れるようになり、
埋込層の抵抗はR1のみとなる。
In the present invention, since the aluminum wiring of the common collector of the front and rear transistors is extended to the vicinity of the base region of the front transistor, the current flowing through the buried layer from the front transistor to the rear transistor is reduced from the buried layer. The current flows through the aluminum wiring, which has a sufficiently low resistance.
The resistance of the buried layer is only R1.

〔実施例〕〔Example〕

以下、本発明の一実施例を図について説明する。 An embodiment of the present invention will be described below with reference to the drawings.

第1図は本発明の一実施例による半導体S積回路装置の
平面図を示し、図において、6,7,9゜10は第3図
と同一のものである。8は後段トランジスタ2のエミッ
タ引き出しアルミ配線、5は前、後段トランジスタ1.
2に共通なコレクタ、17はコレクタウオール、11は
これをカバーして設けられたアルミ配線であり、前段ト
ランジスタ1のベース6付近まで延びている。
FIG. 1 shows a plan view of a semiconductor S integrated circuit device according to an embodiment of the present invention, and in the figure, 6, 7, 9° 10 are the same as those in FIG. 3. 8 is the emitter lead-out aluminum wiring of the rear stage transistor 2, and 5 is the front and rear stage transistor 1.
2, 17 is a collector all, 11 is an aluminum wiring provided to cover this, and extends to the vicinity of the base 6 of the front stage transistor 1.

次に作用効果について説明する。Next, the effects will be explained.

本実施例では後段トランジスタ2から前段トランジスタ
1までのn十型埋込み層14の抵抗は、長くしたコレク
タ部のアルミ配線の抵抗がこれに並列に入るため見かけ
上小さくなり、一般にコレクタ部のアルミ配線の抵抗は
埋込層の抵抗に比べ十分小さいので、該埋込み層14の
抵抗R1のみとなる。
In this embodiment, the resistance of the n-type buried layer 14 from the rear-stage transistor 2 to the front-stage transistor 1 is apparently small because the resistance of the elongated aluminum wiring in the collector part is entered in parallel with this, and generally the resistance of the aluminum wiring in the collector part is Since the resistance of the buried layer 14 is sufficiently smaller than the resistance of the buried layer 14, only the resistance R1 of the buried layer 14 exists.

すなわち、第(3)式により導かれるトランジスタ2の
飽和電圧VCE2’は V CE2’ −13R1+ 14 R2+VBE2・
・・(4)であって、ここでコレクタのアルミ配線を前
段トランジスタ1のベース領域付近まで延ばしたことに
より、I4R2菱0となり、その飽和電圧V CE2’
は第(4)式により V CE2’ −13R1+VBE2      川(
5)となる。
That is, the saturation voltage VCE2' of the transistor 2 derived from equation (3) is V CE2' -13R1+ 14 R2+VBE2・
... (4), and by extending the aluminum wiring of the collector to the vicinity of the base region of the front-stage transistor 1, I4R2 becomes 0, and its saturation voltage V CE2'
According to equation (4), V CE2' -13R1+VBE2 river (
5).

よって後段のトランジスタ2のベース9・エミッタ10
間の電圧は、本実施例によるレイアウトでも変化せず、
エピタキシャル抵抗R1も同じであるから第(3)式、
(5)式より VCE2 >V CE2’           ・・
・(6)となり、後段のトランジスタ2の飽和特性が改
善できる。
Therefore, the base 9 and emitter 10 of the transistor 2 in the subsequent stage
The voltage between them does not change even in the layout according to this example,
Since the epitaxial resistance R1 is also the same, Equation (3),
From formula (5), VCE2 > V CE2'...
- (6) is obtained, and the saturation characteristics of the transistor 2 in the subsequent stage can be improved.

〔発明の効果〕〔Effect of the invention〕

以上のように本発明にかかる半導体集積回路装置によれ
ば、前、後段のトランジスタの共通コレクタのアルミ配
線を上記前段のトランジスタのベース領域付近まで延ば
したので、回路レイアウト面積を増大させることなく、
トランジスタの飽和特性を改善することができる効果が
ある。
As described above, according to the semiconductor integrated circuit device according to the present invention, the aluminum wiring of the common collector of the front and rear transistors is extended to the vicinity of the base region of the transistor at the front stage, so that the circuit layout area is not increased.
This has the effect of improving the saturation characteristics of the transistor.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例による半導体集積回路装置の
平面図、第2図はダーリントン回路の一例を示す回路図
、第3図はその回路を構成する従来装置の構造を示す平
面図、第4図はそのIt/−IV線断面を示す図である
。 1・・・前段トランジスタ、2・・・後段トランジスタ
、5・・・前、後段トランジスタの共通コレクタ、6・
・・前段トランジスタのベース、7・・・前段トランジ
スタのエミッタ、8・・・後段トランジスタのエミッタ
のアルミ配線、9・・・後段トランジスタのベース、1
0・・・後段トランジスタのエミッタ、11・・・共通
コレクタのアルミ配線、17・・・コレクタウオール。
FIG. 1 is a plan view of a semiconductor integrated circuit device according to an embodiment of the present invention, FIG. 2 is a circuit diagram showing an example of a Darlington circuit, and FIG. 3 is a plan view showing the structure of a conventional device constituting the circuit. FIG. 4 is a diagram showing a cross section taken along the line It/-IV. DESCRIPTION OF SYMBOLS 1... Front stage transistor, 2... Back stage transistor, 5... Common collector of front and rear stage transistors, 6...
...Base of front stage transistor, 7...Emitter of front stage transistor, 8...Aluminum wiring of emitter of rear stage transistor, 9...Base of rear stage transistor, 1
0... Emitter of subsequent stage transistor, 11... Aluminum wiring of common collector, 17... Collector all.

Claims (1)

【特許請求の範囲】[Claims] (1)前、後段のトランジスタのコレクタが共通して設
けられ、前段トランジスタのエミッタが後段トランジス
タのベースに接続されてなる半導体集積回路装置におい
て、 上記共通コレクタのアルミ配線を上記前、後段の両トラ
ンジスタのベース領域に近接するよう配置したことを特
徴とする半導体集積回路装置。
(1) In a semiconductor integrated circuit device in which the collectors of the front and rear stage transistors are provided in common and the emitter of the front stage transistor is connected to the base of the rear stage transistor, the aluminum wiring of the common collector is connected to both the front and rear stage transistors. A semiconductor integrated circuit device characterized in that the device is arranged close to a base region of a transistor.
JP60235938A 1985-10-21 1985-10-21 Semiconductor integrated circuit device Pending JPS6294974A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60235938A JPS6294974A (en) 1985-10-21 1985-10-21 Semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60235938A JPS6294974A (en) 1985-10-21 1985-10-21 Semiconductor integrated circuit device

Publications (1)

Publication Number Publication Date
JPS6294974A true JPS6294974A (en) 1987-05-01

Family

ID=16993447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60235938A Pending JPS6294974A (en) 1985-10-21 1985-10-21 Semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS6294974A (en)

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