JPS6294638U - - Google Patents
Info
- Publication number
- JPS6294638U JPS6294638U JP18742185U JP18742185U JPS6294638U JP S6294638 U JPS6294638 U JP S6294638U JP 18742185 U JP18742185 U JP 18742185U JP 18742185 U JP18742185 U JP 18742185U JP S6294638 U JPS6294638 U JP S6294638U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- function
- jig
- transferring
- clean air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18742185U JPS6294638U (id) | 1985-12-04 | 1985-12-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18742185U JPS6294638U (id) | 1985-12-04 | 1985-12-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6294638U true JPS6294638U (id) | 1987-06-17 |
Family
ID=31137882
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18742185U Pending JPS6294638U (id) | 1985-12-04 | 1985-12-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6294638U (id) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109230898A (zh) * | 2018-09-18 | 2019-01-18 | 山西煤炭运销集团晋城有限公司 | 立体式矿用电缆收集装置 |
-
1985
- 1985-12-04 JP JP18742185U patent/JPS6294638U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109230898A (zh) * | 2018-09-18 | 2019-01-18 | 山西煤炭运销集团晋城有限公司 | 立体式矿用电缆收集装置 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0247046U (id) | ||
JPH01104022U (id) | ||
JPS6294638U (id) | ||
JPS62106867U (id) | ||
CN217485417U (zh) | 一种上下料机构 | |
JPS61123460U (id) | ||
JPH064586Y2 (ja) | ウエハー移し替え装置 | |
JPH02104921U (id) | ||
JPS63170464U (id) | ||
JPS62199951U (id) | ||
JPH04748U (id) | ||
JPS61172625U (id) | ||
JPS6219740U (id) | ||
JPS5830124A (ja) | 気相成長装置用ウエハ−立替装置 | |
JPS6332847U (id) | ||
JPH02132942U (id) | ||
JPH0180934U (id) | ||
JPH0336131U (id) | ||
JPH03156952A (ja) | ウエハキャリヤの格納装置兼輸送装置 | |
JPS63142831U (id) | ||
JPH01118918U (id) | ||
JPH01130536U (id) | ||
JPH02307241A (ja) | ウェハー搬送装置 | |
JPS62193732U (id) | ||
JPS63178330U (id) |