JPS6294635U - - Google Patents
Info
- Publication number
- JPS6294635U JPS6294635U JP18681285U JP18681285U JPS6294635U JP S6294635 U JPS6294635 U JP S6294635U JP 18681285 U JP18681285 U JP 18681285U JP 18681285 U JP18681285 U JP 18681285U JP S6294635 U JPS6294635 U JP S6294635U
- Authority
- JP
- Japan
- Prior art keywords
- card
- fixing jig
- probe card
- mounting device
- clamper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 10
- 230000001105 regulatory effect Effects 0.000 claims 2
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985186812U JPH0338833Y2 (US06373033-20020416-M00071.png) | 1985-12-04 | 1985-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985186812U JPH0338833Y2 (US06373033-20020416-M00071.png) | 1985-12-04 | 1985-12-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6294635U true JPS6294635U (US06373033-20020416-M00071.png) | 1987-06-17 |
| JPH0338833Y2 JPH0338833Y2 (US06373033-20020416-M00071.png) | 1991-08-15 |
Family
ID=31136710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985186812U Expired JPH0338833Y2 (US06373033-20020416-M00071.png) | 1985-12-04 | 1985-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0338833Y2 (US06373033-20020416-M00071.png) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007155735A (ja) * | 2005-12-05 | 2007-06-21 | Feinmetall Gmbh | 被験電気部品を検査するための電気的接触装置および電気的検査装置 |
| WO2007077743A1 (ja) * | 2005-12-28 | 2007-07-12 | Nhk Spring Co., Ltd. | プローブカード |
| EP2128630A1 (en) * | 2007-03-14 | 2009-12-02 | NHK Spring CO., LTD. | Probe card |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4849958U (US06373033-20020416-M00071.png) * | 1971-10-14 | 1973-06-30 | ||
| JPS55125639A (en) * | 1979-03-23 | 1980-09-27 | Hitachi Ltd | Inspection apparatus |
| JPS601840A (ja) * | 1983-06-20 | 1985-01-08 | Nec Corp | プロ−ブカ−ドの固定装置 |
| JPS60143372U (ja) * | 1984-03-06 | 1985-09-24 | 株式会社東芝 | 半導体素子の電気特性測定装置 |
| JPS60206149A (ja) * | 1984-03-30 | 1985-10-17 | Toshiba Corp | ウエハの試験装置 |
-
1985
- 1985-12-04 JP JP1985186812U patent/JPH0338833Y2/ja not_active Expired
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4849958U (US06373033-20020416-M00071.png) * | 1971-10-14 | 1973-06-30 | ||
| JPS55125639A (en) * | 1979-03-23 | 1980-09-27 | Hitachi Ltd | Inspection apparatus |
| JPS601840A (ja) * | 1983-06-20 | 1985-01-08 | Nec Corp | プロ−ブカ−ドの固定装置 |
| JPS60143372U (ja) * | 1984-03-06 | 1985-09-24 | 株式会社東芝 | 半導体素子の電気特性測定装置 |
| JPS60206149A (ja) * | 1984-03-30 | 1985-10-17 | Toshiba Corp | ウエハの試験装置 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007155735A (ja) * | 2005-12-05 | 2007-06-21 | Feinmetall Gmbh | 被験電気部品を検査するための電気的接触装置および電気的検査装置 |
| WO2007077743A1 (ja) * | 2005-12-28 | 2007-07-12 | Nhk Spring Co., Ltd. | プローブカード |
| EP2128630A1 (en) * | 2007-03-14 | 2009-12-02 | NHK Spring CO., LTD. | Probe card |
| EP2128630A4 (en) * | 2007-03-14 | 2014-05-14 | Nhk Spring Co Ltd | PROBE CARD |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0338833Y2 (US06373033-20020416-M00071.png) | 1991-08-15 |
