JPS6293686U - - Google Patents

Info

Publication number
JPS6293686U
JPS6293686U JP18401786U JP18401786U JPS6293686U JP S6293686 U JPS6293686 U JP S6293686U JP 18401786 U JP18401786 U JP 18401786U JP 18401786 U JP18401786 U JP 18401786U JP S6293686 U JPS6293686 U JP S6293686U
Authority
JP
Japan
Prior art keywords
furnace
preheating tower
furnace body
pressure detector
exhaust gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18401786U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6236058Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18401786U priority Critical patent/JPS6236058Y2/ja
Publication of JPS6293686U publication Critical patent/JPS6293686U/ja
Application granted granted Critical
Publication of JPS6236058Y2 publication Critical patent/JPS6236058Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
  • Vertical, Hearth, Or Arc Furnaces (AREA)
JP18401786U 1986-11-29 1986-11-29 Expired JPS6236058Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18401786U JPS6236058Y2 (https=) 1986-11-29 1986-11-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18401786U JPS6236058Y2 (https=) 1986-11-29 1986-11-29

Publications (2)

Publication Number Publication Date
JPS6293686U true JPS6293686U (https=) 1987-06-15
JPS6236058Y2 JPS6236058Y2 (https=) 1987-09-12

Family

ID=31131292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18401786U Expired JPS6236058Y2 (https=) 1986-11-29 1986-11-29

Country Status (1)

Country Link
JP (1) JPS6236058Y2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024020968A (ja) 2022-08-02 2024-02-15 ギガフォトン株式会社 極端紫外光生成装置、及び電子デバイスの製造方法

Also Published As

Publication number Publication date
JPS6236058Y2 (https=) 1987-09-12

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