JPS6293625U - - Google Patents
Info
- Publication number
- JPS6293625U JPS6293625U JP18570385U JP18570385U JPS6293625U JP S6293625 U JPS6293625 U JP S6293625U JP 18570385 U JP18570385 U JP 18570385U JP 18570385 U JP18570385 U JP 18570385U JP S6293625 U JPS6293625 U JP S6293625U
- Authority
- JP
- Japan
- Prior art keywords
- air
- outside air
- conditioning unit
- regulating
- clean component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004378 air conditioning Methods 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims 3
- 230000001143 conditioned effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000004080 punching Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
Landscapes
- Central Air Conditioning (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985185703U JPH0533856Y2 (enExample) | 1985-12-02 | 1985-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985185703U JPH0533856Y2 (enExample) | 1985-12-02 | 1985-12-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6293625U true JPS6293625U (enExample) | 1987-06-15 |
| JPH0533856Y2 JPH0533856Y2 (enExample) | 1993-08-27 |
Family
ID=31134580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985185703U Expired - Lifetime JPH0533856Y2 (enExample) | 1985-12-02 | 1985-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0533856Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5795536A (en) * | 1980-12-05 | 1982-06-14 | Takasago Thermal Eng Co Lts | Apparatus for preparing work environment for manufacturing integrated circuits or the like |
-
1985
- 1985-12-02 JP JP1985185703U patent/JPH0533856Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5795536A (en) * | 1980-12-05 | 1982-06-14 | Takasago Thermal Eng Co Lts | Apparatus for preparing work environment for manufacturing integrated circuits or the like |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0533856Y2 (enExample) | 1993-08-27 |