JPS6292318A - 目合せ装置 - Google Patents

目合せ装置

Info

Publication number
JPS6292318A
JPS6292318A JP60232698A JP23269885A JPS6292318A JP S6292318 A JPS6292318 A JP S6292318A JP 60232698 A JP60232698 A JP 60232698A JP 23269885 A JP23269885 A JP 23269885A JP S6292318 A JPS6292318 A JP S6292318A
Authority
JP
Japan
Prior art keywords
rotating mirror
microscope
alignment
mask
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60232698A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0466376B2 (enrdf_load_stackoverflow
Inventor
Chiyoushin Sai
兆申 蔡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP60232698A priority Critical patent/JPS6292318A/ja
Publication of JPS6292318A publication Critical patent/JPS6292318A/ja
Publication of JPH0466376B2 publication Critical patent/JPH0466376B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP60232698A 1985-10-17 1985-10-17 目合せ装置 Granted JPS6292318A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60232698A JPS6292318A (ja) 1985-10-17 1985-10-17 目合せ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60232698A JPS6292318A (ja) 1985-10-17 1985-10-17 目合せ装置

Publications (2)

Publication Number Publication Date
JPS6292318A true JPS6292318A (ja) 1987-04-27
JPH0466376B2 JPH0466376B2 (enrdf_load_stackoverflow) 1992-10-23

Family

ID=16943368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60232698A Granted JPS6292318A (ja) 1985-10-17 1985-10-17 目合せ装置

Country Status (1)

Country Link
JP (1) JPS6292318A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0466376B2 (enrdf_load_stackoverflow) 1992-10-23

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees