JPS629217B2 - - Google Patents

Info

Publication number
JPS629217B2
JPS629217B2 JP56157757A JP15775781A JPS629217B2 JP S629217 B2 JPS629217 B2 JP S629217B2 JP 56157757 A JP56157757 A JP 56157757A JP 15775781 A JP15775781 A JP 15775781A JP S629217 B2 JPS629217 B2 JP S629217B2
Authority
JP
Japan
Prior art keywords
semiconductor wafer
reference plate
objective lens
pattern
warpage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56157757A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5858740A (ja
Inventor
Sunao Nishioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP56157757A priority Critical patent/JPS5858740A/ja
Publication of JPS5858740A publication Critical patent/JPS5858740A/ja
Publication of JPS629217B2 publication Critical patent/JPS629217B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P74/00—

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP56157757A 1981-10-02 1981-10-02 半導体ウエハのそり測定装置 Granted JPS5858740A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56157757A JPS5858740A (ja) 1981-10-02 1981-10-02 半導体ウエハのそり測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56157757A JPS5858740A (ja) 1981-10-02 1981-10-02 半導体ウエハのそり測定装置

Publications (2)

Publication Number Publication Date
JPS5858740A JPS5858740A (ja) 1983-04-07
JPS629217B2 true JPS629217B2 (enExample) 1987-02-27

Family

ID=15656665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56157757A Granted JPS5858740A (ja) 1981-10-02 1981-10-02 半導体ウエハのそり測定装置

Country Status (1)

Country Link
JP (1) JPS5858740A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01142511A (ja) * 1987-11-27 1989-06-05 Mitsubishi Cable Ind Ltd 多心光ファイバ心線用コネクタ組立方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6131911A (ja) * 1984-07-25 1986-02-14 Toshiba Corp 表面検査装置
JP2539778B2 (ja) * 1984-11-22 1996-10-02 株式会社日立製作所 検査方法および検査装置
JPS6227606A (ja) * 1985-07-29 1987-02-05 Hitachi Electronics Eng Co Ltd フオ−カススキヤンによるパタ−ン検査方法
JPS62156507A (ja) * 1985-12-04 1987-07-11 ケイエルエイ・インストラメンツ・コ−ポレ−シヨン 三次元物体の表面を検査する光学的検査装置
CN113555292A (zh) * 2020-04-23 2021-10-26 海太半导体（无锡）有限公司 一种监控基板弯曲的系统

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01142511A (ja) * 1987-11-27 1989-06-05 Mitsubishi Cable Ind Ltd 多心光ファイバ心線用コネクタ組立方法

Also Published As

Publication number Publication date
JPS5858740A (ja) 1983-04-07

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