JPS6290777U - - Google Patents

Info

Publication number
JPS6290777U
JPS6290777U JP18379985U JP18379985U JPS6290777U JP S6290777 U JPS6290777 U JP S6290777U JP 18379985 U JP18379985 U JP 18379985U JP 18379985 U JP18379985 U JP 18379985U JP S6290777 U JPS6290777 U JP S6290777U
Authority
JP
Japan
Prior art keywords
fixing part
substrate holding
substrate
resist solution
fixing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18379985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18379985U priority Critical patent/JPS6290777U/ja
Publication of JPS6290777U publication Critical patent/JPS6290777U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
JP18379985U 1985-11-29 1985-11-29 Pending JPS6290777U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18379985U JPS6290777U (enrdf_load_stackoverflow) 1985-11-29 1985-11-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18379985U JPS6290777U (enrdf_load_stackoverflow) 1985-11-29 1985-11-29

Publications (1)

Publication Number Publication Date
JPS6290777U true JPS6290777U (enrdf_load_stackoverflow) 1987-06-10

Family

ID=31130867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18379985U Pending JPS6290777U (enrdf_load_stackoverflow) 1985-11-29 1985-11-29

Country Status (1)

Country Link
JP (1) JPS6290777U (enrdf_load_stackoverflow)

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