JPS629075A - Piezo-electric control valve - Google Patents

Piezo-electric control valve

Info

Publication number
JPS629075A
JPS629075A JP14693185A JP14693185A JPS629075A JP S629075 A JPS629075 A JP S629075A JP 14693185 A JP14693185 A JP 14693185A JP 14693185 A JP14693185 A JP 14693185A JP S629075 A JPS629075 A JP S629075A
Authority
JP
Japan
Prior art keywords
lever
spreading
enlarged
displacement
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14693185A
Other languages
Japanese (ja)
Inventor
Yukio Kobayashi
幸雄 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CKD Corp
Original Assignee
CKD Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CKD Corp filed Critical CKD Corp
Priority to JP14693185A priority Critical patent/JPS629075A/en
Publication of JPS629075A publication Critical patent/JPS629075A/en
Pending legal-status Critical Current

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  • Electrically Driven Valve-Operating Means (AREA)

Abstract

PURPOSE:To miniaturize the spreading mechanism for the displacement of a piezo-electric element, by successively pressing laterally lined plural spreading levers in the point end of the spreading lever in the preceding stage and spreading the displacement. CONSTITUTION:Plural spreading levers 1, 2, 3 are turnably supported by supporting axes (a), (b). While the spreading levers 1, 2, 3, facing their free end to the other supporting axis, respectively provide pins 1p, 2p in the lateral direction from the other supporting axis to this side position. Further the spreading lever 3 provides a slit 13 for mounting a valve shaft. While the pin 1p of the spreading lever 1 is adapted to and engaged with the upper to a rotatably supporting part of the spreading lever 2, and the pin 2p of the spreading lever 2 is adapted to the upper of a position to a rotatably supporting part of the spreading lever 3. And the displacement part of a piezo-electric element is adapted to the upper of a position 12 to a rotatably supporting part of the spreading lever 1. By this constitution, a spreading mechanism can be formed in a small size.

Description

【発明の詳細な説明】 〔概要〕 2本の支軸を間隔をおいて平行に配設し、かつ少なくと
も2本の拡大テコを互いに平行に配設し、隣接する拡大
テコを交互に異なる支軸に軸支して、先端を他方の支軸
に向け、各拡大テコの自由端寄りの位置で、隣接する次
の段の拡大テコの軸支部寄りの位置を変位させ、最後の
段の拡大テコで弁体に駆動力を加え、最初の段の拡大テ
コの軸支部寄りの位置に圧電素子の変位による力を作用
させることで、圧電素子の微小変位を拡大して弁体を駆
動可能とする。
[Detailed Description of the Invention] [Summary] Two support shafts are arranged parallel to each other with an interval, and at least two enlarged levers are arranged parallel to each other, and adjacent enlarged levers are alternately provided with different supports. It is supported on a shaft, and the tip is directed toward the other support shaft, and the position of each expansion lever near the free end displaces the position of the expansion lever of the next stage adjacent to the shaft, and the expansion of the last stage is performed. By applying driving force to the valve body using a lever and applying force due to the displacement of the piezoelectric element to the position near the shaft of the first stage expansion lever, it is possible to magnify the minute displacement of the piezoelectric element and drive the valve body. do.

〔産業上の利用分野〕[Industrial application field]

内燃機関の燃料噴射弁などのように高速動作を要する弁
装置においては、圧電素子に信号電圧を印加して変形さ
せることで、弁体を駆動する構成が提案されている。本
発明は、このように圧電素子を利用して弁体を駆動する
圧電式の制御弁に関する。
In a valve device that requires high-speed operation, such as a fuel injection valve for an internal combustion engine, a configuration has been proposed in which a valve body is driven by applying a signal voltage to a piezoelectric element to deform it. The present invention relates to a piezoelectric control valve that uses a piezoelectric element to drive a valve body.

〔従来の技術〕[Conventional technology]

特公昭49−6043号公報などに記載されているよう
に、圧電素子に電圧を印加したときの変位を利用して、
燃料噴射弁などを駆動することが提案されている。この
ように圧電素子を駆動源として利用する場合、圧電素子
の変位量のみでは、弁体の変位量として不足するため、
圧電素子の変位量を拡大する機構が色々試みられている
。例えばテコ式、リンク式、液圧式などが提案されてい
る。その中でもテコ式が機構的に最もシンプルであり、
製造も容易である。
As described in Japanese Patent Publication No. 49-6043, etc., using the displacement when voltage is applied to a piezoelectric element,
It has been proposed to drive fuel injection valves and the like. When using a piezoelectric element as a drive source in this way, the amount of displacement of the piezoelectric element alone is insufficient for the amount of displacement of the valve body.
Various mechanisms have been attempted to increase the amount of displacement of piezoelectric elements. For example, lever type, link type, hydraulic type, etc. have been proposed. Among them, the lever type is mechanically the simplest,
It is also easy to manufacture.

第2図(イ)はテコ式の一例であり、1つのテコ4の支
点を固定し、支点寄りの位置に、圧電素子9を連結し、
自由端で弁体を駆動する。圧電素子9の変位量がΔX、
支点から圧電素子9の作用点までの長さを1とし、レバ
ー比を1対nとすると、自由端では、nΔXの変位量が
得られる。
FIG. 2(a) is an example of a lever type, in which the fulcrum of one lever 4 is fixed, and a piezoelectric element 9 is connected at a position near the fulcrum.
The free end drives the valve body. The amount of displacement of the piezoelectric element 9 is ΔX,
Assuming that the length from the fulcrum to the point of action of the piezoelectric element 9 is 1 and the lever ratio is 1:n, a displacement amount of nΔX is obtained at the free end.

このテコ式拡大機構を、(ロ)図のように2段重ねにし
て、1段目のテコ4aの自由端で、その上の2段目のテ
コ4bの支点寄り位置を変位させ、2段目のテコの自由
端で弁体を駆動すると、n2ΔXの変位量が得られる。
This lever-type enlarging mechanism is stacked in two stages as shown in (B), and the free end of the lever 4a in the first stage displaces the position near the fulcrum of the lever 4b in the second stage above it. When the valve body is driven with the free end of the eye lever, a displacement amount of n2ΔX is obtained.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

ところがこのような拡大機構では、変位量が拡大される
につれて、変位方向のスペースが大きくなり、特に多段
式にして大きな変位量を得ようとした場合に、テコ4a
、4bの変位方向のスペースを大きくしなければならず
、大型の装置となってしまう。本発明の技術的課題は、
従来の圧電式制御弁におけるこのような問題を解消し、
圧電素子の変位量の拡大機構を小型化することにある。
However, in such an expanding mechanism, as the amount of displacement is expanded, the space in the displacement direction becomes larger, and especially when trying to obtain a large amount of displacement using a multi-stage system, it is difficult to use the lever 4a.
, 4b in the displacement direction must be increased, resulting in a large-sized device. The technical problem of the present invention is
Solving these problems with conventional piezoelectric control valves,
The object of the present invention is to miniaturize a mechanism for enlarging the displacement of a piezoelectric element.

〔問題点を解決するための手段〕[Means for solving problems]

第1図は本発明による圧電式制御弁の基本原理を説明す
る斜視図である。aSbは支軸であり、互いに平行に配
設されている。そして両支軸a1bには、複数の拡大テ
コすなわち第1の拡大テコ1と、第2の拡大テコ2と、
第3の拡大テコ3が軸支されている。第1の拡大テコ1
は、第1の支軸aに、第2の拡大テコ2は第2の支軸す
に、そして第3の拡大テコ3は第1の支軸aにそれぞれ
軸支されている。そして各拡大テコ1.2.3の自由端
は、他方の支軸に向けられており、それぞれ他方の支軸
より手前の位置に横向きのピン1p、2pを有しており
、第3の拡大テコ3には、弁軸取付はスリット13が設
けられている。第1の拡大テコ1のピン1pは第2の拡
大テコ2の軸支部寄りの上に当接して係合し、第2の拡
大テコ2のピン2pは第3の拡大テコ3の軸支部寄りの
位置の上に当接している。そして第1の拡大テコ1の軸
支部寄りの位置12上に、圧電素子の変位部が当接され
る。
FIG. 1 is a perspective view illustrating the basic principle of a piezoelectric control valve according to the present invention. aSb are supporting shafts, which are arranged parallel to each other. Both support shafts a1b have a plurality of enlarged levers, that is, a first enlarged lever 1, a second enlarged lever 2,
A third enlarged lever 3 is pivotally supported. 1st expansion lever 1
is supported by the first support shaft a, the second enlarged lever 2 is supported by the second support shaft, and the third enlarged lever 3 is supported by the first support shaft a. The free end of each expansion lever 1.2.3 is directed toward the other support shaft, and each has horizontal pins 1p and 2p at a position in front of the other support shaft. The lever 3 is provided with a slit 13 for attaching the valve stem. The pin 1p of the first enlarged lever 1 abuts and engages the second enlarged lever 2 near the pivot part, and the pin 2p of the second enlarged lever 2 comes near the pivot part of the third enlarged lever 3. It is in contact with the position above. Then, the displacement portion of the piezoelectric element is brought into contact with a position 12 near the shaft portion of the first enlarged lever 1.

〔作用〕[Effect]

各拡大テコ1.2.3のピン位置は、他方の支軸より自
己の軸支部寄りの位置にある。そのため第1の拡大テコ
1の軸支部寄りの位置の作用点に、圧電素子の変位によ
る力が加わると、該拡大テコ1の先端のピン位置の変位
量が拡大され、次の拡大テコ2の軸支部寄り位置を押圧
して該拡大テコ2を回動させる。すると第2の拡大テコ
2のピン2pの位置の変位量が更に拡大され、最終段の
拡大テコ3の軸支部寄り位置を押圧して回動させるため
、その自由端寄り位置の出力部(スリット13)の変位
量は、更に拡大される。第2図の従来のテコ式拡大機構
の式を利用して表すと、n3ΔX倍の拡大率となる。
The pin position of each enlarged lever 1.2.3 is located closer to its own shaft than the other shaft. Therefore, when a force due to the displacement of the piezoelectric element is applied to the point of action near the shaft of the first expansion lever 1, the amount of displacement of the pin position at the tip of the expansion lever 1 is expanded, and the next expansion lever 2 is moved. The enlarged lever 2 is rotated by pressing the position near the shaft support. Then, the amount of displacement of the position of the pin 2p of the second enlarged lever 2 is further enlarged, and in order to press and rotate the position near the shaft support of the final stage enlargement lever 3, the output part (slit The displacement amount of 13) is further expanded. If expressed using the formula of the conventional lever-type enlarging mechanism shown in FIG. 2, the enlargement ratio will be n3ΔX times.

〔実施例〕〔Example〕

次に本発明による圧電式制御弁が実際上どのように具体
化されるかを実施例で説明する。第3図、第4図は、本
発明による圧電式制御弁の実施例を示す図で、第4図は
第3図のIV−IV断面図、第3図は拡大部ケーシング
内を示す正面図である。5は拡大部ケーシングであり、
その底部寄りの位置に支軸a、bが内臓支持され、該支
軸asbに3本の拡大テコ1.2.3が軸支されている
。6はノズル部本体であり、ノズルニードル7が内臓さ
れたノズルキャップ8と、圧電素子9のセットスクリュ
ー10が取付けられていると共に、拡大部ケーシング5
の蓋の役目を兼ねている。
Next, examples will be used to explain how the piezoelectric control valve according to the present invention is actually implemented. 3 and 4 are views showing an embodiment of the piezoelectric control valve according to the present invention, FIG. 4 is a sectional view taken along line IV-IV in FIG. 3, and FIG. 3 is a front view showing the inside of the enlarged part casing. It is. 5 is an enlarged part casing;
Support shafts a and b are internally supported at positions near the bottom, and three enlarged levers 1.2.3 are pivotally supported on the support shaft asb. Reference numeral 6 denotes a nozzle part main body, to which a nozzle cap 8 containing a nozzle needle 7 and a set screw 10 of a piezoelectric element 9 are attached, as well as an enlarged part casing 5.
It also serves as a lid.

支軸aに第1の拡大テコlと第3の拡大テコ3が回動可
能に軸支され、再拡大テコ1と3との間に第2の拡大テ
コ2が配設され、別の支軸すに回動可能に軸支されてい
る。圧電素子9の先端の球面状の加圧半丸台11が、第
1の拡大テコ1の支軸a寄りの位置の球面凹部12中に
嵌入している。また最終段の拡大テコ3の自由端のスリ
ット13中に、ノズルニードル7の後端の小径首部7a
が嵌太し、拡大テコ3が矢印a1方向に移動すると、ヘ
ッド部7bを介してノズルニードル7が矢印a1方向に
引っ張られる。
A first enlarged lever 1 and a third enlarged lever 3 are rotatably supported on the support shaft a, and a second enlarged lever 2 is disposed between the re-enlarged levers 1 and 3. It is rotatably supported on a shaft. A spherical pressurizing semicircular base 11 at the tip of the piezoelectric element 9 is fitted into a spherical recess 12 at a position closer to the spindle a of the first enlarged lever 1. Also, in the slit 13 at the free end of the final stage enlargement lever 3, a small diameter neck portion 7a at the rear end of the nozzle needle 7 is inserted.
When the expansion lever 3 moves in the direction of the arrow a1, the nozzle needle 7 is pulled in the direction of the arrow a1 via the head portion 7b.

ノズルニードル7は、通常はスプリング14でノズル1
5方向に押圧され、先端のニードル部7Cでノズル15
を閉止している。
The nozzle needle 7 is normally connected to the nozzle 1 by a spring 14.
The nozzle 15 is pressed in five directions and the needle part 7C at the tip
is closed.

ノズルキャップ8の内部は、入口16と連通しており、
入口16に流体源が接続される。したがってニードル部
7cが後退してノズル15を開くと、ノズル15から流
体が噴出する。なお17.18はシール用のOリングで
ある。またノズル閉止用のスプリング14の一端は、0
リング17上の平座金19に当接し、他端はEワッシャ
ー20上の平座金21に当接されている。
The inside of the nozzle cap 8 communicates with the inlet 16,
A fluid source is connected to the inlet 16. Therefore, when the needle portion 7c retreats to open the nozzle 15, fluid is ejected from the nozzle 15. Note that 17 and 18 are O-rings for sealing. Also, one end of the spring 14 for closing the nozzle is 0.
It abuts on a flat washer 19 on the ring 17, and the other end abuts on a flat washer 21 on the E washer 20.

ノズル部本体6は、ネジ22で拡大部ケーシング5に取
付は固定され、拡大機構が内臓されているケーシング5
が閉鎖される。
The nozzle main body 6 is fixedly attached to the enlarged part casing 5 with screws 22, and the casing 5 has an enlarged mechanism built therein.
will be closed.

〔動作説明〕[Operation explanation]

通常はスプリング14によって、ノズルニードル7は、
矢印a2方向に押圧されて、ノズル15を閉止している
。いまリード線23に100V〜200VDCの駆動電
圧を印加すると、圧電素子9は伸長して先端の加圧半丸
台11が、矢印a1方向に変位して、第1の拡大テコ1
の球面凹部12を押圧し、第1の拡大テコ1を支軸aを
支点にして矢印a1方向に回動させる。その結果該第1
の拡大テコ1の先端のビン1p位置の変位量が拡大され
、該ピン1pで次の段の拡大テコ2の支軸す寄りの位置
を押圧し、先端のピン2p位置の変位量を拡大する。そ
して該ピン2pで最終段の拡大テコ3を支軸aの回りに
回動させ、先端のスリット13で、ノズルニードル7の
後端のヘッド7bを矢印a1方向に引っ張る。するとノ
ズルニードル7が、スプリング14に抗して矢印a1方
向に移動し、先端のニードル部7Cがノズル15から離
れて、ノズル15が開かれ、入口16から流入した流体
が、ノズル15から噴出する。
Usually, a spring 14 causes the nozzle needle 7 to
The nozzle 15 is closed by being pressed in the direction of arrow a2. Now, when a driving voltage of 100V to 200VDC is applied to the lead wire 23, the piezoelectric element 9 expands, and the pressing half-round base 11 at the tip is displaced in the direction of the arrow a1, and the first enlargement lever 1
The first enlarged lever 1 is rotated in the direction of the arrow a1 about the supporting shaft a. As a result, the first
The amount of displacement at the position of the pin 1p at the tip of the enlarged lever 1 is expanded, and the pin 1p presses the position near the spindle of the enlarged lever 2 at the next stage, expanding the amount of displacement at the position of the pin 2p at the tip. . Then, the final stage enlarged lever 3 is rotated around the support shaft a by the pin 2p, and the head 7b at the rear end of the nozzle needle 7 is pulled in the direction of the arrow a1 by the slit 13 at the tip. Then, the nozzle needle 7 moves in the direction of the arrow a1 against the spring 14, the needle portion 7C at the tip moves away from the nozzle 15, the nozzle 15 is opened, and the fluid that has flowed in from the inlet 16 is jetted out from the nozzle 15. .

そして図示例では、各拡大テコ1.2.3のレバー比は
約1対5のため、圧電素子9の変位量が、最終段の拡大
テコ3のスリット13位置では、125倍に拡大される
In the illustrated example, the lever ratio of each of the enlargement levers 1, 2, and 3 is approximately 1:5, so the amount of displacement of the piezoelectric element 9 is expanded 125 times at the slit 13 position of the enlargement lever 3 at the final stage. .

〔発明の効果〕〔Effect of the invention〕

以上のように本発明によれば、2本の支軸a1bを平行
に配設して、それぞれの支軸a、bに、複数の拡大テコ
1.2.3を交互に異なる支軸a、bに回動可能に軸支
し、最初の段の拡大テコ1の先端の横向きのピンipで
次の段の拡大テコ2の支点寄りの位置を加圧し、その先
端のビン2p位置を拡大する構成になっている。このよ
うにして、横に並べた複数の拡大テコ1.2・・・を順
次、前の段の拡大テコの先端で押圧し、変位量を拡大す
るので、複数の拡大テコ1.2.3を横に密接して配設
でき、拡大機構部を小型にできる。拡大率を上げるため
に、拡大テコを増やしても、増設拡大テコの寸法分だけ
しか大型化しない。また支軸は常に2本で足りる。
As described above, according to the present invention, two support shafts a1b are arranged in parallel, and a plurality of enlarged levers 1.2.3 are alternately attached to different support shafts a, b, respectively. It is rotatably supported on the shaft b, and the horizontal pin ip at the tip of the first stage's expanding lever 1 presses the position near the fulcrum of the next stage's expanding lever 2, and the position of the tip of the bottle 2p is expanded. It is configured. In this way, the plurality of enlargement levers 1.2.. . can be arranged side by side in close proximity, and the enlargement mechanism can be made smaller. Even if you increase the number of expansion levers to increase the expansion rate, the size will only increase by the size of the additional expansion lever. Also, two spindles are always sufficient.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明による圧電式制御弁の基本原理を説明す
る側面図、第2図は従来のテコ式拡大機構の斜視図、第
3図は本発明による圧電式制御弁の拡大機構部の正面図
、第4図は第3図のIV−IV’断面図である。 図において、a、bは支軸、1.2.3は拡大テコ、i
p、 2pはピン、7はノズルニードル、9は圧電素子
、12は球面凹部、13はスリット、15はノズルをそ
れぞれ示す。
FIG. 1 is a side view explaining the basic principle of the piezoelectric control valve according to the present invention, FIG. 2 is a perspective view of a conventional lever-type expansion mechanism, and FIG. 3 is a view of the expansion mechanism of the piezoelectric control valve according to the present invention. The front view and FIG. 4 are sectional views taken along line IV-IV' in FIG. In the figure, a and b are the support shafts, 1.2.3 is the expansion lever, and i
p and 2p are pins, 7 is a nozzle needle, 9 is a piezoelectric element, 12 is a spherical recess, 13 is a slit, and 15 is a nozzle.

Claims (1)

【特許請求の範囲】[Claims] 2本の支軸(a)(b)を間隔をおいて平行に配設し、
少なくとも2本の拡大テコ(1)(2)・・・を互いに
平行に、かつ前記支軸(a)(b)に対し直角に配設し
、第1の拡大テコ(1)は、第1の支軸(a)に軸支し
て先端を第2の支軸(b)に向け、第2の拡大テコ(2
)は、第2の支軸(b)に軸支して先端を第1の支軸(
a)に向けることで、隣接する拡大テコ(1)(2)・
・・を交互に異なる支軸に軸支して、先端を他方の支軸
に向け、各拡大テコ(1)(2)・・・の自由端寄りの
位置を、隣接する次の段の拡大テコ(2)・・・の軸支
部寄りの位置に係合させ、最終段の拡大テコで、弁体に
駆動力を加え、最初の段の拡大テコ(1)の軸支部寄り
の位置に、圧電素子の変位による力を作用させる構成と
することを特徴とする圧電式制御弁。
Two supporting shafts (a) and (b) are arranged in parallel with an interval,
At least two enlarged levers (1), (2), etc. are arranged parallel to each other and perpendicular to the support shafts (a) and (b), and the first enlarged lever (1) is the first enlarged lever. is supported on the support shaft (a) with the tip facing the second support shaft (b), and then
) is pivoted on the second support shaft (b) and its tip is attached to the first support shaft (b).
By pointing toward a), the adjacent expansion levers (1), (2),
... are alternately supported on different support shafts, with the tips facing the other support shaft, and the positions near the free ends of each enlargement lever (1), (2) ... are used to enlarge the adjacent next stage. Engage the lever (2) at a position closer to the shaft support, apply driving force to the valve body with the enlarged lever at the final stage, and move it to the position closer to the shaft support of the first stage enlarged lever (1). A piezoelectric control valve characterized in that it is configured to apply force due to displacement of a piezoelectric element.
JP14693185A 1985-07-03 1985-07-03 Piezo-electric control valve Pending JPS629075A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14693185A JPS629075A (en) 1985-07-03 1985-07-03 Piezo-electric control valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14693185A JPS629075A (en) 1985-07-03 1985-07-03 Piezo-electric control valve

Publications (1)

Publication Number Publication Date
JPS629075A true JPS629075A (en) 1987-01-17

Family

ID=15418808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14693185A Pending JPS629075A (en) 1985-07-03 1985-07-03 Piezo-electric control valve

Country Status (1)

Country Link
JP (1) JPS629075A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62283274A (en) * 1986-06-02 1987-12-09 Koganei Seisakusho:Kk Valve using electrostrictive element
JPS6328973U (en) * 1986-08-11 1988-02-25
JPH02163580A (en) * 1988-12-15 1990-06-22 Agency Of Ind Science & Technol Fluid control valve using piezoelectric element
JP2006527346A (en) * 2003-06-11 2006-11-30 ウエストポート リサーチ インク. Valve apparatus and method for injecting gaseous fuel
KR101301107B1 (en) * 2012-04-12 2013-08-27 주식회사 프로텍 Piezoelectric pump
DE10248433B4 (en) * 2002-10-17 2015-01-15 Cummins Ltd. Device for conveying media, in particular injection device for internal combustion engines of motor vehicles
KR20180033907A (en) * 2016-09-27 2018-04-04 한국전기연구원 piezoelectric servo motor
JP2019533190A (en) * 2016-10-20 2019-11-14 エーエスエムエル ネザーランズ ビー.ブイ. Pressure control valve, fluid handling structure for lithographic apparatus, and lithographic apparatus

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62283274A (en) * 1986-06-02 1987-12-09 Koganei Seisakusho:Kk Valve using electrostrictive element
JPH0326301B2 (en) * 1986-06-02 1991-04-10 Koganei Ltd
JPS6328973U (en) * 1986-08-11 1988-02-25
JPH0319654Y2 (en) * 1986-08-11 1991-04-25
JPH02163580A (en) * 1988-12-15 1990-06-22 Agency Of Ind Science & Technol Fluid control valve using piezoelectric element
DE10248433B4 (en) * 2002-10-17 2015-01-15 Cummins Ltd. Device for conveying media, in particular injection device for internal combustion engines of motor vehicles
JP2006527346A (en) * 2003-06-11 2006-11-30 ウエストポート リサーチ インク. Valve apparatus and method for injecting gaseous fuel
JP4904586B2 (en) * 2003-06-11 2012-03-28 ウエストポート パワー インク. Valve device for injecting gaseous fuel
KR101301107B1 (en) * 2012-04-12 2013-08-27 주식회사 프로텍 Piezoelectric pump
KR20180033907A (en) * 2016-09-27 2018-04-04 한국전기연구원 piezoelectric servo motor
JP2019533190A (en) * 2016-10-20 2019-11-14 エーエスエムエル ネザーランズ ビー.ブイ. Pressure control valve, fluid handling structure for lithographic apparatus, and lithographic apparatus
US11199771B2 (en) 2016-10-20 2021-12-14 Asml Netherlands B.V. Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus

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