JPS62283274A - Valve using electrostrictive element - Google Patents
Valve using electrostrictive elementInfo
- Publication number
- JPS62283274A JPS62283274A JP12835186A JP12835186A JPS62283274A JP S62283274 A JPS62283274 A JP S62283274A JP 12835186 A JP12835186 A JP 12835186A JP 12835186 A JP12835186 A JP 12835186A JP S62283274 A JPS62283274 A JP S62283274A
- Authority
- JP
- Japan
- Prior art keywords
- electrostrictive element
- valve
- displacement
- valve body
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 claims abstract description 56
- 230000007246 mechanism Effects 0.000 claims abstract description 38
- 239000012530 fluid Substances 0.000 claims description 15
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract description 3
- 238000013459 approach Methods 0.000 abstract 1
- 206010011224 Cough Diseases 0.000 description 5
- 230000008602 contraction Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000035939 shock Effects 0.000 description 3
- 239000000945 filler Substances 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000007850 degeneration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
３、発明の詳細な説明
［産業上の利用分野］
本発明は、電歪素子を用いた弁に関し、特に、積層形の
電歪素子によって弁体を駆動する構造の電歪索子を用い
た弁に関する。Detailed Description of the Invention 3. Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a valve using an electrostrictive element, and particularly to a valve having a structure in which a valve body is driven by a laminated electrostrictive element. This invention relates to a valve using electrostrictive cords.
［従来の技術］
電気信号による弁の制御においては、通常のソレノイド
など゛による！磁気力によって弁体の駆動を行う構造の
ものに代わって、小形軽量化、さらには、消費電力の低
減が可能であるなどの観点から、圧電磁器などを金属板
などを介して平面状にはり合わせて構成される、いわゆ
るバイモルフ構造の電歪素子を用いることが考えられる
。[Prior Art] In the control of valves using electrical signals, ordinary solenoids are used! Instead of a structure in which the valve body is driven by magnetic force, piezoelectric ceramics or the like are pasted onto a flat surface through a metal plate, etc., from the viewpoint of being smaller and lighter, and furthermore, reducing power consumption. It is conceivable to use an electrostrictive element having a so-called bimorph structure.
［発明が解決しようとする問題点］
しかしながら、バイモルフ構造の電歪素子においては、
応答速度や弁体の駆動力が比較的小さく、さらに、変形
イ繰り返す間に電歪素子自体の形状や弁体の駆動力が変
化し、弁体の変位による流体道路の開閉動作を迅速かつ
安定に制御できない場合があることを本発明者は見いだ
した。[Problems to be solved by the invention] However, in the bimorph structure electrostrictive element,
The response speed and driving force of the valve body are relatively small, and the shape of the electrostrictive element itself and the driving force of the valve body change during repeated deformation, making the opening and closing operation of the fluid road due to the displacement of the valve body quick and stable. The present inventor has found that there are cases where it cannot be controlled.
そこで、本発明の目的は、弁体の変位による流体通路の
開閉を迅速かつ安定に制御することが可能な電歪素子を
用いた弁を提供することにある。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a valve using an electrostrictive element that can quickly and stably control opening and closing of a fluid passage by displacement of a valve body.
［問題点を解決するための手段］
本発明は、本体と、この本体内に設けられた弁体室と、
弁体室における流体通路の開口部に形成された弁座に接
離されることによって流体通路の開閉を行う弁体と、こ
の弁体を動作させる電歪素子と、電歪素子の変位を拡大
して弁体に伝達する変位拡大機構とを設けたものである
。[Means for solving the problems] The present invention provides a main body, a valve body chamber provided in the main body,
A valve body that opens and closes a fluid passage by being brought into contact with and separated from a valve seat formed at an opening of a fluid passage in a valve body chamber, an electrostrictive element that operates this valve body, and an electrostrictive element that expands the displacement of the electrostrictive element. A displacement amplifying mechanism is provided for transmitting the displacement to the valve body.
［作用］
上記した手段によれば、たとえば、電歪素子を積層形の
電歪素子で構成することにより、電歪素子による弁体の
変位が迅速かつ経時的に安定に行われ、弁体の変位によ
る流体通路の開閉を迅速かつ安定に制ｉｎすることがで
きる。[Function] According to the above-mentioned means, for example, by configuring the electrostrictive element as a laminated electrostrictive element, the valve body is quickly and stably displaced by the electrostrictive element over time, and the valve body is Opening and closing of the fluid passage due to displacement can be quickly and stably controlled.
［実施例］
図は、本発明の一実施例である電歪素子を用いた弁の要
部を示す略断面図である。[Example] The figure is a schematic cross-sectional view showing a main part of a valve using an electrostrictive element, which is an example of the present invention.
ブロック状の本体ｌの内部には、密閉された弁体室Ａが
形成されている。この弁体室Ａには、本体１の壁面を貫
通して、入口流路（ＩＮ）２ （流体通路）および排気
流路（ＥＸＨ）３ （流体通路）が対向して開口され、
入口流路２および排気流路３の弁体室Ａの内部における
開口部には、それぞれ弁座４および弁座５が突設されて
いる。A sealed valve body chamber A is formed inside the block-shaped main body l. In this valve body chamber A, an inlet passage (IN) 2 (fluid passage) and an exhaust passage (EXH) 3 (fluid passage) are opened facing each other through the wall surface of the main body 1.
A valve seat 4 and a valve seat 5 are protruded from the openings of the inlet flow path 2 and the exhaust flow path 3 inside the valve body chamber A, respectively.
また、排気流路３の近傍には、本体１の壁面を貫通して
出口流路（ＯＵＴ）６が形成されている。Further, near the exhaust flow path 3, an outlet flow path (OUT) 6 is formed passing through the wall surface of the main body 1.
弁体室への内部には、本体ｌと独立に設けられたコの字
形の枠材７ａおよび核枠材７ａに一端が変形自在に一体
に係止され、他端部が前記入口流路２および排気流路３
の弁座４と弁座５との間に延在されるアーム７ｂからな
る変位拡大機構７が設けられており、枠材７ａの一部が
複数の固定ねじ８によって本体ｌに係止されることによ
り、変位拡大機構７が本体ｌに固定されている。Inside the valve body chamber, one end is deformably locked integrally with a U-shaped frame member 7a and a core frame member 7a provided independently of the main body l, and the other end is connected to the inlet channel 2. and exhaust flow path 3
A displacement magnifying mechanism 7 consisting of an arm 7b extending between the valve seat 4 and the valve seat 5 is provided, and a part of the frame member 7a is locked to the main body l by a plurality of fixing screws 8. As a result, the displacement magnifying mechanism 7 is fixed to the main body l.
変位拡大機構７には、一端が枠材７ａに係止され他端が
アーム７ｂに係止される積層形の電歪素子９が、入口流
路２および出口流路３の弁座４および弁座５の対向方向
にほぼ平行に設けられ、リード線１０を通じて外部から
所定の極性の直流電圧が印加される際に発生される咳電
歪素子９の比較的小さな伸縮変位が、テコの原理によっ
て、弁座４と弁座５との間に延在されるアーム７ｂの端
部の該弁座４と弁座５との間を往復する方向の比較的大
きな変位に拡大されて出力される構造とされている。In the displacement magnification mechanism 7, a laminated electrostrictive element 9 whose one end is locked to a frame member 7a and the other end is locked to an arm 7b is attached to the valve seats 4 and valves of the inlet flow path 2 and the outlet flow path 3. The relatively small expansion and contraction displacement of the cough electrostrictive element 9, which is provided substantially parallel to the direction facing the seat 5 and is generated when a DC voltage of a predetermined polarity is applied from the outside through the lead wire 10, is caused by the lever principle. , a structure in which the end of the arm 7b extending between the valve seats 4 and 5 is magnified to a relatively large displacement in the direction of reciprocating between the valve seats 4 and 5 and output. It is said that
電歪素子９のリード！１０が本体１を貫通する部分は、
充填材１０ａによって密閉されている。Lead of electrostrictive element 9! The part where 10 penetrates the main body 1 is
It is sealed with a filler 10a.
入口流路２および排気流路３の弁座４および弁座５の間
に延在されるアーム７ｂの端部には、弁座４および弁座
５に対向する位置に弁体１１および弁体１２がそれぞれ
係止され、電歪素子９の伸縮変位が拡大されて出力され
るアーム７ｂに駆動されることによって、弁体１１また
は弁体１２の弁座４または弁座５に対する密着および離
脱動作が行われるように構成されている。At the end of the arm 7b extending between the valve seats 4 and 5 of the inlet flow path 2 and the exhaust flow path 3, a valve body 11 and a valve body are disposed at positions facing the valve seats 4 and 5. 12 are respectively locked, and the expansion/contraction displacement of the electrostrictive element 9 is magnified and driven by the arm 7b to be output, thereby allowing the valve body 11 or the valve body 12 to come into close contact with the valve seat 4 or the valve seat 5, and to separate from the valve seat 5. is configured to take place.
すなわち、電歪素子９が伸長される際には、アーム７ｂ
の端部が入口流路２の弁座４に接近する方向に変位され
、弁体１１が弁座４に密着されて入口流路２が閉止され
、逆に、電歪素子９が縮退される際には、アーム７ｂの
端部が排気流路３の弁座５に接近する方向に変位され、
弁体１２が弁座５に密着されることによって排気流路３
が閉止されるものである。That is, when the electrostrictive element 9 is extended, the arm 7b
is displaced in a direction approaching the valve seat 4 of the inlet channel 2, the valve body 11 is brought into close contact with the valve seat 4, and the inlet channel 2 is closed, and conversely, the electrostrictive element 9 is retracted. In this case, the end of the arm 7b is displaced in a direction approaching the valve seat 5 of the exhaust flow path 3,
Since the valve body 12 is in close contact with the valve seat 5, the exhaust flow path 3
is closed.
弁体１１とアーム７ｂとの間には、該アーム７ｂの側に
固定される固定子１３ａおよび該固定子１３ａに案内さ
れ弁体１１が係止されるとともに、ばねＬ３ｂを介して
アーム７ｂに変位自在に支持される可動子１３Ｃなどか
らなる緩衝機構１３が設けられ、アーム７ｂに駆動され
ることによって弁体１１が入口流路２の弁座４に密着さ
れる際の衝撃などが吸収されるとともに、アーム７ｂの
弁座４に対する１頃斜などに影響されることなく、弁体
１１が弁座４に対して確実に密着される構造とされてい
る。Between the valve body 11 and the arm 7b, there is a stator 13a fixed to the side of the arm 7b, and the valve body 11 guided by the stator 13a is locked, and is connected to the arm 7b via a spring L3b. A buffer mechanism 13 consisting of a movable member 13C supported so as to be freely displaceable is provided, and is driven by the arm 7b to absorb the impact when the valve body 11 is brought into close contact with the valve seat 4 of the inlet channel 2. In addition, the structure is such that the valve body 11 is reliably brought into close contact with the valve seat 4 without being affected by the inclination of the arm 7b relative to the valve seat 4.
同様に、弁体１２とアーム７ｂとの間には、該アーム７
ｂの側に固定される固定子１４ａおよび該固定子１４ａ
に案内され弁体１２が係止されるとともに、ばね１４ｂ
を介してアーム７ｂに変位自在に支持される可動子１４
ｃなどからなる緩衝機構１４が設けられ、アーム７ｂに
駆動されることによって弁体１２が排気流路３の弁座５
に密着される際の衝撃などが吸収されるとともに、アー
ム７ｂの弁座５に対する傾斜などに影響されることなく
、弁体１２が弁座５の全面に確実に密着される構造とさ
れている。Similarly, between the valve body 12 and the arm 7b, the arm 7
A stator 14a fixed to the b side and the stator 14a
The valve body 12 is locked while being guided by the spring 14b.
A movable element 14 is movably supported by the arm 7b via the arm 7b.
A shock absorbing mechanism 14 consisting of a shock absorber 14, etc.
The valve body 12 is structured so as to absorb the shock caused when the valve body 12 is brought into close contact with the valve seat 5, and to ensure that the valve body 12 is brought into close contact with the entire surface of the valve seat 5 without being affected by the inclination of the arm 7b relative to the valve seat 5. .
さらに、入口流路２の弁座４の周囲における本体ｌとア
ーム７ｂとの間には、該アーム７ｂの端部を排気流路３
の弁座５に接近する方向に付勢するように、すなわち、
電歪素子９の縮退によるアーム７ｂの変位を助勢するよ
うに構成された助勢ばね１５が設けられている。Furthermore, between the main body l and the arm 7b around the valve seat 4 of the inlet flow path 2, the end of the arm 7b is connected to the exhaust flow path 2.
in a direction approaching the valve seat 5, that is,
A support spring 15 is provided that is configured to support the displacement of the arm 7b due to the contraction of the electrostrictive element 9.
以下、本実施例の作用について説明する。The operation of this embodiment will be explained below.
まず、リード［１０を介して電歪素子９に所定の極性の
直ｉｔ圧を作用させ、電歪素子９に伸長する方向の比較
的小さな変位を与えると、テコの原理によって、変位拡
大機構７のアーム７ｂの端部には弁体１１を入口流路２
の弁座４に接近させる方向に比較的大きな変位が発生さ
れ、アーム７ｂは助勢ばね１５の付勢力に抗して弁座４
に接近し、弁体１１が弁座４に密着されて入口流路２が
閉止され、咳人口流路２に作用される圧縮空気などが弁
体室Ａの内部に流入することが阻止される。First, when a direct pressure of a predetermined polarity is applied to the electrostrictive element 9 through the lead [10, and a relatively small displacement in the direction of expansion is applied to the electrostrictive element 9, the displacement amplifying mechanism 7 A valve body 11 is connected to the end of the arm 7b of the inlet channel 2.
A relatively large displacement is generated in the direction of bringing the arm 7b closer to the valve seat 4, and the arm 7b resists the biasing force of the assisting spring 15 and moves toward the valve seat 4.
, the valve body 11 is brought into close contact with the valve seat 4, the inlet flow path 2 is closed, and compressed air or the like acting on the cough artificial flow path 2 is prevented from flowing into the inside of the valve body chamber A. .
次に、電歪素子９に印加される直流電圧の極性を逆転さ
せ、該電歪素子９に縮退する方向に比較的小さな変位を
与えると、変位拡大機構７のアーム７ｂの端部には、テ
コの原理によって弁体１２を排気流路３の弁座５に接近
させる方向に比較的大きな変位が発生され、入口流路２
の弁座４から弁体１１が離脱され入口流路２が開放され
るとともに、アーム７ｂおよび助勢ばね１５の付勢力に
よって排気流路３の弁座５に弁体１２が密着されて排気
流路３が閉止され、入口流路２から弁体室Ａの内部に流
入される圧縮空気などが出口流路６を通して図示しない
所定の流体圧機器などに供給され、所定の仕事が行われ
る。Next, when the polarity of the DC voltage applied to the electrostrictive element 9 is reversed and a relatively small displacement is applied to the electrostrictive element 9 in the direction of degeneration, the end of the arm 7b of the displacement amplifying mechanism 7 Due to the lever principle, a relatively large displacement is generated in the direction of bringing the valve body 12 closer to the valve seat 5 of the exhaust flow path 3, and the inlet flow path 2
The valve body 11 is removed from the valve seat 4 of the exhaust passage 3, opening the inlet passage 2, and the valve body 12 is brought into close contact with the valve seat 5 of the exhaust passage 3 by the urging force of the arm 7b and the assisting spring 15, thereby opening the exhaust passage. 3 is closed, compressed air flowing into the valve body chamber A from the inlet channel 2 is supplied to a predetermined fluid pressure device (not shown) through the outlet channel 6, and a predetermined work is performed.
さらに、電歪素子９に印加される直流電圧の極性を逆転
させ、電歪素子９に伸長する方向の変位を与えると、変
位拡大機構７のアーム７ｂは再び入口流路２に接近する
方向に比較的大きく変位され、入口流路２の弁座４に弁
体ｌｌが密着されて人口流路２が閉止されるとともに、
弁体１２が排気流路３の弁座５から離脱されて排気流路
３が開放され、弁体室Ａの内部や出口流路６などの残圧
が排気流路３を通じて速やかに外部に排出される。Furthermore, when the polarity of the DC voltage applied to the electrostrictive element 9 is reversed and a displacement is applied to the electrostrictive element 9 in the direction of extension, the arm 7b of the displacement magnifying mechanism 7 is again moved in the direction approaching the inlet channel 2. The valve body 11 is displaced relatively largely, and the valve body 11 is brought into close contact with the valve seat 4 of the inlet flow path 2, and the artificial flow path 2 is closed.
The valve body 12 is removed from the valve seat 5 of the exhaust flow path 3 to open the exhaust flow path 3, and the residual pressure inside the valve body chamber A, the outlet flow path 6, etc. is quickly discharged to the outside through the exhaust flow path 3. be done.
このように、本実施例においては、積層形の電歪素子９
の伸縮変位を変位拡大機構７のアーム７ｂによって拡大
して弁体１１および１２に伝達することにより、人口流
路２および排気流路３の開閉などが行われる構造である
ため、弁体１１および１２の変位が迅速に行われるとと
もに、弁体１１および１２の入口流路２の弁座４および
排気流路３の弁座５に対する密着動作が経時的に安定と
なる。In this way, in this embodiment, the laminated electrostrictive element 9
The structure is such that the opening and closing of the artificial flow path 2 and the exhaust flow path 3 are performed by magnifying the expansion and contraction displacement of 12 is quickly displaced, and the operation of the valve bodies 11 and 12 in close contact with the valve seat 4 of the inlet flow path 2 and the valve seat 5 of the exhaust flow path 3 becomes stable over time.
さらに、変位拡大機構７が本体１と独立に構成されてい
ることにより、たとえば、変位拡大機構７を電歪素子９
と線膨張係数が近イ以した素材で構成することで、温度
変化によるアーム７ｂの位置ずれなどを防止できるとと
もに、本体ｌを構成する材質には、電歪素子９との線膨
張係数などの整合性を考慮する必要がなく、本体ｌの設
計の自由度が向上される。Furthermore, since the displacement magnification mechanism 7 is configured independently from the main body 1, for example, the displacement magnification mechanism 7 can be connected to the electrostrictive element 9.
By constructing the main body l from a material with a coefficient of linear expansion close to that of the electrostrictive element 9, it is possible to prevent the arm 7b from shifting due to temperature changes. There is no need to consider consistency, and the degree of freedom in designing the main body l is improved.
また、変位拡大機構７のアーム７ｂと弁体ＩＩおよび弁
体１２との間に、該弁体１１および１２をアーム７ｂに
対して変位自在に支持する緩衝機構１３および１４が設
けられていることにより、アーム７ｂが人口流路２の弁
座４と排気流路３の弁座５との間を比較的高速に１２動
される場合でも、弁体１１および１２が弁座４および５
に衝突して損傷されることが防止されるとともに、電歪
素子９に過大な引張応力や圧縮応力などが作用されるこ
とが回避され、さらに、変位拡大機構７のアーム７ｂが
変位される際の弁座４および弁座５に対する傾斜が緩衝
機構１３および１４によって吸収されるため、弁体Ｘ１
および１２の弁座４および５に対する確実な密着状態を
実現できる。Furthermore, buffer mechanisms 13 and 14 are provided between the arm 7b of the displacement magnification mechanism 7 and the valve bodies II and 12, which support the valve bodies 11 and 12 so as to be freely displaceable with respect to the arm 7b. Therefore, even when the arm 7b is moved between the valve seat 4 of the artificial flow path 2 and the valve seat 5 of the exhaust flow path 3 at a relatively high speed, the valve bodies 11 and 12 move between the valve seats 4 and 5.
This prevents the electrostrictive element 9 from being damaged by collision with the electrostrictive element 9, and avoids applying excessive tensile stress or compressive stress to the electrostrictive element 9. Furthermore, when the arm 7b of the displacement amplifying mechanism 7 is displaced, Since the inclination of the valve element X1 with respect to the valve seat 4 and the valve seat 5 is absorbed by the buffer mechanisms 13 and 14,
And a reliable state of close contact with the valve seats 4 and 5 of 12 can be realized.
また、本体１とアーム７ｂとの間に、該アーム７ｂの端
部を排気流路３の弁座５に接近する方向に付勢するよう
に、すなわち、電歪素子９の縮退によるアーム７ｂの変
位を助勢するように構成された助勢ばね１５が設けられ
ていることにより、圧縮応力に比較して引張応力に比較
的弱い積層形の電歪素子９の変位動作が安定に行われる
。Further, between the main body 1 and the arm 7b, the end portion of the arm 7b is biased in the direction approaching the valve seat 5 of the exhaust flow path 3, that is, the arm 7b is By providing the assisting spring 15 configured to assist displacement, the displacement operation of the laminated electrostrictive element 9, which is relatively weak against tensile stress compared to compressive stress, is performed stably.
なお、本発明は前記実施例になんら限定されるものでは
なく、その主旨を逸脱しない範囲で種々変更可能である
ことは言うまでもない。It goes without saying that the present invention is not limited to the above-mentioned embodiments, and that various changes can be made without departing from the spirit thereof.
たとえば、変位拡大機構を複数段に構成してもよいもの
である。For example, the displacement magnification mechanism may be configured in multiple stages.
［発明の効果］
（１）１本体と、咳本体内に設けられた弁体室と、咳弁
体室における流体通路の開口部に形成された弁座に接離
されることによって該流体通路の開閉を行う弁体と、該
弁体を動作させる電歪素子と、該電歪素子の変位を拡大
して前記弁体に伝達する変位拡大機構とからなる構造で
あるため、たとえば、電歪素子を積層形の電歪素子で構
成することにより、電歪素子による弁体の変位が迅速か
つ経時的に安定に行われ、弁体の変位による流体通路の
開閉を迅速かつ安定に制御することができる。[Effects of the Invention] (1) The main body, the valve body chamber provided in the cough body body, and the valve seat formed at the opening of the fluid passage in the cough valve body chamber come into contact with and separate from each other, so that the fluid passage can be improved. The structure consists of a valve body that opens and closes, an electrostrictive element that operates the valve body, and a displacement amplification mechanism that magnifies the displacement of the electrostrictive element and transmits it to the valve body. By configuring the valve body with a laminated electrostrictive element, the valve body can be quickly and stably displaced by the electrostrictive element over time, and the opening and closing of the fluid passage can be quickly and stably controlled by the displacement of the valve body. can.
（２）、変位拡大機構が本体と独立に構成されているこ
とにより、たとえば、変位拡大機構を電歪素子と線膨Ｉ
Ａｘｉ数が近（以した素材で構成することで、温度変化
による変位拡大機構の位置ずれなどを防止できるととも
に、本体を構成する材質には、電歪素子との線膨張係数
の整合性を考慮する必要がなく、本体の設計の自由度が
向上される。(2) Since the displacement magnification mechanism is configured independently from the main body, for example, the displacement magnification mechanism can be used with an electrostrictive element and a linear expansion I
By constructing the material with a similar Axi number, it is possible to prevent the displacement magnification mechanism from shifting due to temperature changes, and the material constituting the main body has a linear expansion coefficient that is consistent with that of the electrostrictive element. This improves the degree of freedom in designing the main body.
（３）、変位拡大機構が、一端が本体内の枠体に連結さ
れかつ他端には弁体が設けられたアームを有し、このア
ームの一端の近傍と枠体との間に電歪素子が介設されて
いることにより、テコの原理を用いて電歪素子の変位を
有効に拡大して弁体に伝達し、弁作用に必要な十分に大
きい弁体変位量を得ることができる。(3) The displacement amplifying mechanism has an arm that is connected to a frame in the main body at one end and a valve body is provided at the other end, and has an electrostrictive gap between the vicinity of one end of the arm and the frame. By interposing the element, the displacement of the electrostrictive element can be effectively expanded and transmitted to the valve body using the lever principle, and a sufficiently large amount of valve body displacement necessary for valve action can be obtained. .
（４）、変位拡大機構と弁体との間に、咳弁体を変位拡
大ｍ構に対して変位自在に支持する緩衝機構が設けられ
ていることにより、変位拡大機構が比較的高速に揺動さ
れる場合でも、弁体が弁座に衝突して損傷されることが
防止されるとともに、電歪素子に過大な引張応力や圧縮
応力などが作用されることが回避され、さらに、変位拡
大機構の弁座に対する傾斜が緩衝機構によって吸収され
るため、弁体の弁座に対する確実な密着状態を実現でき
る。(4) A buffer mechanism is provided between the displacement amplifying mechanism and the valve body to support the cough valve body so as to be freely displaceable with respect to the displacement amplifying mechanism, so that the displacement amplifying mechanism can oscillate at a relatively high speed. Even when the valve body is moved, the valve body is prevented from colliding with the valve seat and damaged, and excessive tensile stress or compressive stress is also prevented from being applied to the electrostrictive element. Since the inclination of the mechanism with respect to the valve seat is absorbed by the buffer mechanism, it is possible to realize a reliable state of close contact between the valve body and the valve seat.
（５）、電歪素子の縮退方向における変位拡大機構の変
位を助勢する助勢ばねが設けられていることにより、圧
縮応力に比較して引張応力に比較的弱い積層形の電歪素
子の変位動作が安定に行われる。(5) Displacement operation of a laminated electrostrictive element that is relatively weak against tensile stress compared to compressive stress due to the provision of an assisting spring that assists the displacement of the displacement magnification mechanism in the direction of contraction of the electrostrictive element. is performed stably.
図は本発明の一実施例である電歪素子を用いた弁の要部
を示す略断面図である。
ｌ・・・・・本体、
２・・・・・入口流路（流体通路）、
３・・・・・排気流路（流体通路）、
４．５・・・弁座、
６・・・出口流路、 ７・・・変位拡大機構、７ａ・
・枠材、 ７ｂ・・アーム、８・・・固定ねし、
９・・・電歪素子、１０・・・リード線、１０ａ・・
充填材、１１．１２・・・・弁体、
１３．１４・・・・緩衝機構、
１３ａ、１４ａ・・固定子、
１３ｂ、１４ｂ・・ばね、
１３ｃ、１４ｃ・・可動子、
１５・・・・・・・助勢ばね、
Ａ・・・・・・・弁体室。The figure is a schematic cross-sectional view showing the main parts of a valve using an electrostrictive element, which is an embodiment of the present invention. l...Main body, 2...Inlet flow path (fluid path), 3...Exhaust flow path (fluid path), 4.5...Valve seat, 6...Outlet Channel, 7... Displacement magnification mechanism, 7a.
・Frame material, 7b...Arm, 8...Fixing screw,
9... Electrostrictive element, 10... Lead wire, 10a...
Filler, 11.12...Valve body, 13.14...Buffer mechanism, 13a, 14a...Stator, 13b, 14b...Spring, 13c, 14c...Mover, 15... ...Supporting spring, A.... Valve body chamber.
Claims (6)
体室における流体通路の開口部に形成された弁座に接離
されることによって該流体通路の開閉を行う弁体と、該
弁体を動作させる電歪素子と、該電歪素子の変位を拡大
して前記弁体に伝達する変位拡大機構とからなることを
特徴とする電歪素子を用いた弁。(1) A main body, a valve body chamber provided in the main body, and a valve body that opens and closes the fluid passage by coming into contact with and separating from a valve seat formed at the opening of the fluid passage in the valve body chamber. A valve using an electrostrictive element, comprising: an electrostrictive element that operates the valve body; and a displacement magnification mechanism that magnifies the displacement of the electrostrictive element and transmits the expanded displacement to the valve body.
特徴とする特許請求の範囲第１項記載の電歪素子を用い
た弁。(2) A valve using an electrostrictive element according to claim 1, wherein the electrostrictive element is a laminated type electrostrictive element.
成されていることを特徴とする特許請求の範囲第１項記
載の電歪素子を用いた弁。(3) A valve using an electrostrictive element according to claim 1, wherein the displacement magnification mechanism is configured independently of the main body.
に連結されかつ他端には前記弁体が設けられたアームを
有し、前記アームの前記一端の近傍と前記枠体との間に
前記電歪素子が介設されていることを特徴とする特許請
求の範囲第１項記載の電歪素子を用いた弁。(4) The displacement magnification mechanism has an arm having one end connected to a frame in the main body and the other end provided with the valve body, and the vicinity of the one end of the arm and the frame 2. A valve using an electrostrictive element according to claim 1, wherein the electrostrictive element is interposed between the valves.
を前記変位拡大機構に対して変位自在に支持する緩衝機
構が設けられていることを特徴とする特許請求の範囲第
１項記載の電歪素子を用いた弁。(5) A buffer mechanism is provided between the displacement amplifying mechanism and the valve body to support the valve body so as to be freely displaceable with respect to the displacement amplifying mechanism. A valve using the electrostrictive element according to item 1.
機構の変位を助勢する助勢ばねが設けられていることを
特徴とする特許請求の範囲第１項記載の電歪素子を用い
た弁。(6) A valve using an electrostrictive element according to claim 1, further comprising an assisting spring that assists the displacement of the displacement magnifying mechanism in the retraction direction of the electrostrictive element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12835186A JPS62283274A (en) | 1986-06-02 | 1986-06-02 | Valve using electrostrictive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12835186A JPS62283274A (en) | 1986-06-02 | 1986-06-02 | Valve using electrostrictive element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62283274A true JPS62283274A (en) | 1987-12-09 |
| JPH0326301B2 JPH0326301B2 (en) | 1991-04-10 |
Family
ID=14982666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12835186A Granted JPS62283274A (en) | 1986-06-02 | 1986-06-02 | Valve using electrostrictive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62283274A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS639578U (en) * | 1986-07-08 | 1988-01-22 | ||
| JPH01316576A (en) * | 1988-03-01 | 1989-12-21 | Hitachi Metals Ltd | Piezoelectricity driven valve |
| US5148833A (en) * | 1988-12-23 | 1992-09-22 | Kabushiki Kaisha Komatsu Seisakusho | High-speed flow control valve |
| JPH04370481A (en) * | 1991-06-14 | 1992-12-22 | Ckd Corp | Switching valve |
| WO2000033395A1 (en) * | 1998-11-30 | 2000-06-08 | Marco Systemanalyse Und Entwicklung Gmbh | Piezo-electric tilting element |
| WO2000036658A1 (en) * | 1998-12-15 | 2000-06-22 | Siemens Aktiengesellschaft | Actuator for displacing a final control element and fuel injection valve with an actuator of this type |
| WO2013088661A1 (en) * | 2011-12-13 | 2013-06-20 | 株式会社サタケ | Piezoelectric valve, and optical granulated substance sorter equipped with air-blowing means that uses this piezoelectric valve |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS629075A (en) * | 1985-07-03 | 1987-01-17 | Ckd Corp | Piezo-electric control valve |
-
1986
- 1986-06-02 JP JP12835186A patent/JPS62283274A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS629075A (en) * | 1985-07-03 | 1987-01-17 | Ckd Corp | Piezo-electric control valve |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS639578U (en) * | 1986-07-08 | 1988-01-22 | ||
| JPH01316576A (en) * | 1988-03-01 | 1989-12-21 | Hitachi Metals Ltd | Piezoelectricity driven valve |
| US5148833A (en) * | 1988-12-23 | 1992-09-22 | Kabushiki Kaisha Komatsu Seisakusho | High-speed flow control valve |
| JPH04370481A (en) * | 1991-06-14 | 1992-12-22 | Ckd Corp | Switching valve |
| WO2000033395A1 (en) * | 1998-11-30 | 2000-06-08 | Marco Systemanalyse Und Entwicklung Gmbh | Piezo-electric tilting element |
| WO2000036658A1 (en) * | 1998-12-15 | 2000-06-22 | Siemens Aktiengesellschaft | Actuator for displacing a final control element and fuel injection valve with an actuator of this type |
| WO2013088661A1 (en) * | 2011-12-13 | 2013-06-20 | 株式会社サタケ | Piezoelectric valve, and optical granulated substance sorter equipped with air-blowing means that uses this piezoelectric valve |
| JP2013124695A (en) * | 2011-12-13 | 2013-06-24 | Satake Corp | Piezoelectric valve and optical particulate sorter including jet air means utilizing the piezoelectric valve |
| US9097359B2 (en) | 2011-12-13 | 2015-08-04 | Satake Corporation | Piezoelectric valve, and optical granulated substance sorter equipped with air-blowing means that uses this piezoelectric valve |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0326301B2 (en) | 1991-04-10 |
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