JPS6289143U - - Google Patents
Info
- Publication number
- JPS6289143U JPS6289143U JP18000285U JP18000285U JPS6289143U JP S6289143 U JPS6289143 U JP S6289143U JP 18000285 U JP18000285 U JP 18000285U JP 18000285 U JP18000285 U JP 18000285U JP S6289143 U JPS6289143 U JP S6289143U
- Authority
- JP
- Japan
- Prior art keywords
- grooves
- storage cassette
- display means
- wafer storage
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012769 display material Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 6
- 239000003086 colorant Substances 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18000285U JPS6289143U (US06633600-20031014-M00021.png) | 1985-11-22 | 1985-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18000285U JPS6289143U (US06633600-20031014-M00021.png) | 1985-11-22 | 1985-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6289143U true JPS6289143U (US06633600-20031014-M00021.png) | 1987-06-08 |
Family
ID=31123559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18000285U Pending JPS6289143U (US06633600-20031014-M00021.png) | 1985-11-22 | 1985-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6289143U (US06633600-20031014-M00021.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01230246A (ja) * | 1987-11-06 | 1989-09-13 | Tel Sagami Ltd | 半導体ウェハの移し換え方法及び半導体ウェハの移し換え装置並びに半導体ウェハの熱処理ボート |
| JPH01250839A (ja) * | 1988-03-31 | 1989-10-05 | Tokyo Electron Ltd | Ｌｃｄ基板の検査装置 |
-
1985
- 1985-11-22 JP JP18000285U patent/JPS6289143U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01230246A (ja) * | 1987-11-06 | 1989-09-13 | Tel Sagami Ltd | 半導体ウェハの移し換え方法及び半導体ウェハの移し換え装置並びに半導体ウェハの熱処理ボート |
| JPH01250839A (ja) * | 1988-03-31 | 1989-10-05 | Tokyo Electron Ltd | Ｌｃｄ基板の検査装置 |
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