JPS6289140U - - Google Patents

Info

Publication number
JPS6289140U
JPS6289140U JP1985181815U JP18181585U JPS6289140U JP S6289140 U JPS6289140 U JP S6289140U JP 1985181815 U JP1985181815 U JP 1985181815U JP 18181585 U JP18181585 U JP 18181585U JP S6289140 U JPS6289140 U JP S6289140U
Authority
JP
Japan
Prior art keywords
substrate
cleaning device
water
gas
substrate cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985181815U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985181815U priority Critical patent/JPS6289140U/ja
Publication of JPS6289140U publication Critical patent/JPS6289140U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Elimination Of Static Electricity (AREA)
JP1985181815U 1985-11-26 1985-11-26 Pending JPS6289140U (US20110158925A1-20110630-C00042.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985181815U JPS6289140U (US20110158925A1-20110630-C00042.png) 1985-11-26 1985-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985181815U JPS6289140U (US20110158925A1-20110630-C00042.png) 1985-11-26 1985-11-26

Publications (1)

Publication Number Publication Date
JPS6289140U true JPS6289140U (US20110158925A1-20110630-C00042.png) 1987-06-08

Family

ID=31127031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985181815U Pending JPS6289140U (US20110158925A1-20110630-C00042.png) 1985-11-26 1985-11-26

Country Status (1)

Country Link
JP (1) JPS6289140U (US20110158925A1-20110630-C00042.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55162379A (en) * 1979-06-04 1980-12-17 Fujitsu Ltd Pure water washing method
JPS603121A (ja) * 1983-06-21 1985-01-09 Oki Electric Ind Co Ltd 半導体ウエハの処理方法
JPS6240459A (ja) * 1985-08-16 1987-02-21 Toshiba Corp プレ−トクリ−ナ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55162379A (en) * 1979-06-04 1980-12-17 Fujitsu Ltd Pure water washing method
JPS603121A (ja) * 1983-06-21 1985-01-09 Oki Electric Ind Co Ltd 半導体ウエハの処理方法
JPS6240459A (ja) * 1985-08-16 1987-02-21 Toshiba Corp プレ−トクリ−ナ

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