JPS6288752U - - Google Patents

Info

Publication number
JPS6288752U
JPS6288752U JP17699585U JP17699585U JPS6288752U JP S6288752 U JPS6288752 U JP S6288752U JP 17699585 U JP17699585 U JP 17699585U JP 17699585 U JP17699585 U JP 17699585U JP S6288752 U JPS6288752 U JP S6288752U
Authority
JP
Japan
Prior art keywords
substrate support
electrode
cvd apparatus
plasma cvd
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17699585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17699585U priority Critical patent/JPS6288752U/ja
Publication of JPS6288752U publication Critical patent/JPS6288752U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP17699585U 1985-11-18 1985-11-18 Pending JPS6288752U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17699585U JPS6288752U (enrdf_load_stackoverflow) 1985-11-18 1985-11-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17699585U JPS6288752U (enrdf_load_stackoverflow) 1985-11-18 1985-11-18

Publications (1)

Publication Number Publication Date
JPS6288752U true JPS6288752U (enrdf_load_stackoverflow) 1987-06-06

Family

ID=31117776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17699585U Pending JPS6288752U (enrdf_load_stackoverflow) 1985-11-18 1985-11-18

Country Status (1)

Country Link
JP (1) JPS6288752U (enrdf_load_stackoverflow)

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