JPS6288752U - - Google Patents
Info
- Publication number
- JPS6288752U JPS6288752U JP17699585U JP17699585U JPS6288752U JP S6288752 U JPS6288752 U JP S6288752U JP 17699585 U JP17699585 U JP 17699585U JP 17699585 U JP17699585 U JP 17699585U JP S6288752 U JPS6288752 U JP S6288752U
- Authority
- JP
- Japan
- Prior art keywords
- substrate support
- electrode
- cvd apparatus
- plasma cvd
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 4
- 239000012212 insulator Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 239000002994 raw material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17699585U JPS6288752U (cg-RX-API-DMAC7.html) | 1985-11-18 | 1985-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17699585U JPS6288752U (cg-RX-API-DMAC7.html) | 1985-11-18 | 1985-11-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6288752U true JPS6288752U (cg-RX-API-DMAC7.html) | 1987-06-06 |
Family
ID=31117776
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17699585U Pending JPS6288752U (cg-RX-API-DMAC7.html) | 1985-11-18 | 1985-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6288752U (cg-RX-API-DMAC7.html) |
-
1985
- 1985-11-18 JP JP17699585U patent/JPS6288752U/ja active Pending
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